Browse > Article

Electrostatic 2-axis MEMS Stage for an Application to Probe-based Storage Devices  

Baeck Kyoung-Lock (LG 실트론 기술연구소, 울산대학교 대학원 기계자동차공학과)
Jeon Jong Up (울산대학교 기계자동차공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.11, 2005 , pp. 173-181 More about this Journal
Abstract
We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.
Keywords
Micro stage; Electrostatic forces; Scanning Probe Microscope; Probe; Data storage device;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Carley, L. R., Bain, J. A., Fedder, G. K., Greve, D. W., Guillou, D. F., Lu, M., Mukherjee, T. and Santhanam, S., 'Single-chip Computers with Microelectromechanical Systems-based Magnetic Memory,' J. Applied Physics, Vol. 87, No. 9, pp. 6680-6685, 2000   DOI   ScienceOn
2 Kim, C.-H., Jeong, H.-M., Jeon, J. U. and Kim, Y.-K., 'Silicon Micro XY-Stage with a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage,' J. Microelectromechanical systems, Vol. 12, No. 4, pp. 470-478, 2003   DOI   ScienceOn
3 Rothuizen, H., Despont, M., Drechsler, U., Genolet, G., Haberle, W., Lutwyche, M., Stutz, R. and Vettiger, P., 'Compact Copper/epoxy-Based Electromagnetic Scanner for Scanning Probe Applications,' Proc. 15th IEEE Int. Conf. MEMS, Las Vegas, pp. 582-585, Jan. 20-24, 2002   DOI
4 United States Patent US6411589B1, Hewlett-Packard Co., Jun. 25, 2002
5 Vettiger, P., Cross, G., Despont, M., Drechsler, U., Durig, U., Gotsmann, B., Haberle, W., Lantz, M. A., Rothuizen, H. E., Stutz, R. and Binnig, G. K., 'The 'Millipede'-Nanotechnology Entering Data Storage,' IEEE Trans. on Nanotechnology, Vol. 1, No. 1, pp. 39-55, 2002   DOI