Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning |
Kim Ki-Hyun
(한국과학기술원 기계공학과)
Gweon Dae-Gab (한국과학기술원 기계공학과) Choi Young-Man (한국과학기술원 기계공학과) Kim Dong-Min (한국과학기술원 기계공학과) Nam Byoung-Uk (한국과학기술원 기계공학과) Lee Suk-Won (삼성전자 지능시스템 연구소 메카트로닉스센터) Lee Moon-Gu (삼성전자 지능시스템 연구소 메카트로닉스센터) |
1 | Kim, K. H., Lee, M. G. and Gweon, D. G., 'The Design and Performance Test of Tracking Actuator for NFR system,' KSPE(in Korean), 2001 |
2 | Elfizy, A. T., Bone, G. M and Evestawi, M. A., 'Design and control of a dual-stage feed drive,' Int. Jour. of Machine tools and Manufacture, Vo. 45, pp.153-165, 2005 DOI |
3 | Kim, D. M., Kim, K. H., Lee, S. Q. and Gweon, D. G.., 'Optimal design and control of fine stage in lithography system,' KSPE(in Korean), 2002 |
4 | Duane, C. Hanselman, ' Brushless Permanent-Manget Motor Design,' McGraw-Hili, Inc., 1994 |
5 | Hans, Butler, Richard, A. George and Jan, Baselmans, 'Scanning Stage technology for exposure tools,' Microlithography world, Spring 1999 |
6 | Lee, C. H. and Kim, S. W., 'An ultraprecision stage for alignment of wafers in advanced microlithography,' Precision Engineering, VoI.21, No.2, pp. 113-122, 1997 DOI ScienceOn |
7 | Kwon, S. J., Chung, W. K. and Youm, Y. G., 'On the Coarse/Fine Dual-Stage Manipulators with Robust Perturbation,' Proc. of IEEE Inter. Conf. on Robotics and Automation, pp. 121-126, 2001 DOI |