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Electrostatic 2-axis MEMS Stage with a Large Area Platform for Probe-based Storage Devices  

Chung, Il-Jin (울산대학교 대학원 기계자동차공학과)
Jeon, Jong-Up (울산대학교 기계자동차공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.9, 2006 , pp. 179-189 More about this Journal
Abstract
Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.
Keywords
Micro stage; Electrostatic actuator; Electrostatic force; Probe-based storage device;
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Times Cited By KSCI : 2  (Citation Analysis)
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