Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Dynamic Analysis of a Nano Imprinting Stage Using CAE

CAE를 이용한 나노 임프린트 스테이지의 동적 거동해석

  • 이강욱 (국민대학교 자동차 전문 대학원 차체 및 샤시) ;
  • 이민규 (국민대 기계자동차공학부) ;
  • 이재우 (국민대 기계자동차공학부) ;
  • 임시형 (국민대 기계자동차공학부) ;
  • 신동훈 (국민대 기계자동차공학부) ;
  • 장시열 (국민대 기계자동차공학부) ;
  • 정재일 (국민대 기계자동차공학부) ;
  • 임홍재 (국민대 기계자동차공학부)
  • Published : 2007.10.15
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Abstract

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.

Keywords

References

  1. Ju, J. H., Yim, H. J., Jang, S. Y and Jung, J. I., 2007, 'Kinematic and Dynamic Analysis of Precision Stage Mechanism,' Proceedings of the KSME 2007 Spring Annual Meeting, pp. 954-958
  2. Lee, M. G., Lee, J. W., Yim, H. J. and Lee, K. S., 2007, 'Dynamic Analysis of High-precision Stage Mechanism considering Flexibility of Structural Components,' Proceedings of the KSMTE 2007 Spring Annual Meeting, pp. 102-107
  3. Kang, M. S., Yang, H. J., Yim, H. J., Jang, S. Y., Jeong, J. I., Shin, D. H. and Lee, K. S., 2006, 'Structural analysis and multi-body kinematics and dynamics analysis of a nano imprinting machine using CAE method,' Proceedings of the KSME Fall Annual Meeting, pp. 23-29
  4. Kang, Y. S., Lee, S. B. and Yim, H. J. 2006, 'Structural analysis and multi-body kinematics and dynamics of a nano-imprinting machine using CAE method,' the 1st workshop of information and knowledge paper, pp. 102-108