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Dynamic Analysis of a Nano Imprinting Stage Using CAE  

Lee, Kang-Wook (국민대학교 자동차 전문 대학원 차체 및 샤시)
Lee, Min-Gyu (국민대 기계자동차공학부)
Lee, Jae-Woo (국민대 기계자동차공학부)
Lim, Si-Hyung (국민대 기계자동차공학부)
Shin, Dong-Hoon (국민대 기계자동차공학부)
Jang, Si-Youl (국민대 기계자동차공학부)
Jeong, Jae-Il (국민대 기계자동차공학부)
Yim, Hong-Jae (국민대 기계자동차공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.16, no.5, 2007 , pp. 211-217 More about this Journal
Abstract
A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.
Keywords
Nano-imprinting stage; 3-axis stage; 4-axis stage; CAE; Simulation; Design;
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  • Reference
1 Kang, Y. S., Lee, S. B. and Yim, H. J. 2006, 'Structural analysis and multi-body kinematics and dynamics of a nano-imprinting machine using CAE method,' the 1st workshop of information and knowledge paper, pp. 102-108
2 Lee, M. G., Lee, J. W., Yim, H. J. and Lee, K. S., 2007, 'Dynamic Analysis of High-precision Stage Mechanism considering Flexibility of Structural Components,' Proceedings of the KSMTE 2007 Spring Annual Meeting, pp. 102-107
3 Ju, J. H., Yim, H. J., Jang, S. Y and Jung, J. I., 2007, 'Kinematic and Dynamic Analysis of Precision Stage Mechanism,' Proceedings of the KSME 2007 Spring Annual Meeting, pp. 954-958
4 Kang, M. S., Yang, H. J., Yim, H. J., Jang, S. Y., Jeong, J. I., Shin, D. H. and Lee, K. S., 2006, 'Structural analysis and multi-body kinematics and dynamics analysis of a nano imprinting machine using CAE method,' Proceedings of the KSME Fall Annual Meeting, pp. 23-29