Dynamic Analysis of a Nano Imprinting Stage Using CAE |
Lee, Kang-Wook
(국민대학교 자동차 전문 대학원 차체 및 샤시)
Lee, Min-Gyu (국민대 기계자동차공학부) Lee, Jae-Woo (국민대 기계자동차공학부) Lim, Si-Hyung (국민대 기계자동차공학부) Shin, Dong-Hoon (국민대 기계자동차공학부) Jang, Si-Youl (국민대 기계자동차공학부) Jeong, Jae-Il (국민대 기계자동차공학부) Yim, Hong-Jae (국민대 기계자동차공학부) |
1 | Kang, Y. S., Lee, S. B. and Yim, H. J. 2006, 'Structural analysis and multi-body kinematics and dynamics of a nano-imprinting machine using CAE method,' the 1st workshop of information and knowledge paper, pp. 102-108 |
2 | Lee, M. G., Lee, J. W., Yim, H. J. and Lee, K. S., 2007, 'Dynamic Analysis of High-precision Stage Mechanism considering Flexibility of Structural Components,' Proceedings of the KSMTE 2007 Spring Annual Meeting, pp. 102-107 |
3 | Ju, J. H., Yim, H. J., Jang, S. Y and Jung, J. I., 2007, 'Kinematic and Dynamic Analysis of Precision Stage Mechanism,' Proceedings of the KSME 2007 Spring Annual Meeting, pp. 954-958 |
4 | Kang, M. S., Yang, H. J., Yim, H. J., Jang, S. Y., Jeong, J. I., Shin, D. H. and Lee, K. S., 2006, 'Structural analysis and multi-body kinematics and dynamics analysis of a nano imprinting machine using CAE method,' Proceedings of the KSME Fall Annual Meeting, pp. 23-29 |