• Title/Summary/Keyword: 채널농도

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Ion Implant 시뮬레이션을 통한 MOSFET 최적점에 대한 연구

  • Lee, Dong-Bin
    • Proceeding of EDISON Challenge
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    • 2015.03a
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    • pp.347-349
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    • 2015
  • 본 연구에서는 MOSFET 제작방법중 하나인 이온주입법에서 다양한 변수로 작용하는 도핑농도, 에너지주입, 바탕농도의 역할에 대해서 알아보고 채널길이가 감소함에 따른 단채널효과를 억제할 수 있는 최적점에 대하여 분석하였으며 Ion Implant 이차원 시뮬레이션값과 비교하였다. 결과적으로 농도와 에너지주입 그리고 채널길이에 따른 MOSFET의 최적화된 모델을 분석하였다.

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Threshold Voltage Movement for Channel Doping Concentration of Asymmetric Double Gate MOSFET (도핑농도에 따른 비대칭 이중게이트 MOSFET의 문턱전압이동현상)

  • Jung, Hakkee;Lee, jongin;Jeong, Dongsoo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2014.05a
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    • pp.748-751
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    • 2014
  • This paper has analyzed threshold voltage movement for channel doping concentration of asymmetric double gate(DG) MOSFET. The asymmetric DGMOSFET is generally fabricated with low doping channel and fully depleted under operation. Since impurity scattering is lessened, asymmetric DGMOSFET has the adventage that high speed operation is possible. The threshold voltage movement, one of short channel effects necessarily occurred in fine devices, is investigated for the change of channel doping concentration in asymmetric DGMOSFET. The analytical potential distribution of series form is derived from Possion's equation to obtain threshold voltage. The movement of threshold voltage is investigated for channel doping concentration with parameters of channel length, channel thickness, oxide thickness, and doping profiles. As a result, threshold voltage increases with increase of doping concentration, and that decreases with decrease of channel length. Threshold voltage increases with decrease of channel thickness and bottom gate voltage. Lastly threshold voltage increases with decrease of oxide thickness.

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Analysis of Subthreshold Current Deviation for Gate Oxide Thickness of Double Gate MOSFET (채널도핑농도에 따른 이중게이트 MOSFET의 문턱전압이하 전류 변화 분석)

  • Jung, Hakkee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.05a
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    • pp.768-771
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    • 2013
  • This paper analyzed the change of subthreshold current for channel doping concentration of double gate(DG) MOSFET. Poisson's equation had been used to analyze the potential distribution in channel, and Gaussian function had been used as carrier distribution. The potential distribution was obtained as the analytical function of channel dimension, using the boundary condition. The subthreshold current had been analyzed for channel doping concentration, and projected range and standard projected deviation of Gaussian function. Since this analytical potential model was verified in the previous papers, we used this model to analyze the subthreshold current. As a result, we know the subthreshold current was influenced on parameters of Gaussian function and channel doping concentration for DGMOSFET.

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Method for the Measurement of Dissolved Oxygen in a Cell Culture Microchannel Using Oxygen-Sensitive Luminescence (산소 민감 발광 염료를 이용한 마이크로 채널 내에서 배양되는 세포 주변의 산소 농도 측정)

  • Lee, Seung-Youl;Jin, Song-Wan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.5
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    • pp.533-538
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    • 2012
  • In this study, we used an $O_2$-sensitive luminescent dye to measure the $O_2$ concentration of culture media around HeLa cells cultured in a microchannel. $[Ru(bpy)_3]^{2+}$, which dissolves easily in water and which has no phototoxic effect, was used as the $O_2$-sensitive dye. The ratiometric sensing method was applied by introducing calcein as the $O_2$-insensitive dye, in order to overcome the disadvantages of intensity-based sensing. By performing calibration with an amperometric $O_2$ sensor, we could calculate the exact concentration of $O_2$ in the culture media. We applied this technique to measure the $O_2$ concentration around the cultured cells in the microchannel. As expected, the $O_2$ concentration gradually decreased as the cells moved farther away from the channel. This method is expected to be applicable to the investigation of hypoxia, which occurs commonly in scaffolds.

Analysis of Subthreshold Swing for Channel Length of Asymmetric Double Gate MOSFET (비대칭 DGMOSFET의 채널길이에 대한 문턱전압이하 스윙 분석)

  • Jung, Hakkee;Lee, Jongin;Cheong, Dongsoo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2014.10a
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    • pp.745-748
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    • 2014
  • 본 연구에서는 비대칭 이중게이트(double gate; DG) MOSFET의 채널길이에 대한 문턱전압이하 스윙의 변화에 대하여 분석하였다. 문턱전압이하 스윙은 트랜지스터의 디지털특성을 결정하는 중요한 요소로서 채널길이가 감소하면 특성이 저하되는 문제가 나타나고 있다. 이러한 문제를 해결하기 위하여 개발된 DGMOSFET의 문턱전압이하 스윙의 채널길이에 대한 변화를 채널두께, 산화막두께, 상하단 게이트 전압 및 도핑농도 등에 따라 조사하고자 한다. 특히 하단 게이트 구조를 상단과 달리 제작할 수 있는 비대칭 DGMOSFET에 대하여 문턱전압이하 스윙을 분석함으로써 하단 게이트 전압 및 하단 산화막 두께 등에 대하여 자세히 관찰하였다. 문턱전압이하 스윙의 해석학적 모델을 구하기 위하여 포아송방정식에서 해석학적 전위분포모델을 유도하였으며 도핑분포함수는 가우스분포함수를 사용하였다. 결과적으로 문턱전압이하 스윙은 상하단 게이트 전압 및 채널도핑농도 그리고 채널의 크기에 매우 민감하게 변화하고 있다는 것을 알 수 있었다.

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Threshold Voltage Model of the MOSFET for Non-Uniform Doped Channel (채널 영역의 불균일 농도를 고려한 MOSFET 문턱전압 모델)

  • Jo, Myung-Suk
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.11
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    • pp.517-525
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    • 2002
  • The channel region of seep-sub-micrometer MOSFET is non-uniformly doped with pocket implant. Therefore, the advanced threshold voltage model is needed to account for the Short-Channel Effect and Reverse-Short-Channel Effect due to the non-uniform doping concentration in the channel region. In this paper, A scalable analytical model for the MOSFET threshold voltage is developed. The developed model is verified with MEDICI and TSUPREM simulator.

Analysis of Transport Characteristics for DGMOSFET according to Channel Dopiong Concentration Using Series (급수를 이용한 DGMOSFET의 채널도핑농도에 대한 전송 특성 분석)

  • Han, Jihyung;Jung, Hakkee;Jeong, Dongsoo;Lee, Jongin;Kwon, Ohshin
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.10a
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    • pp.845-847
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    • 2012
  • In this paper, the transport characteristics for doping concentration in the channel has been analyzed for DGMOSFET. The Possion equation is used to analytical. The DGMOSFET is extensively been studying because of advantages to be able to reduce the short channel effects(SCEs) to occur in conventional MOSFET. Since SCEs have been occurred in subthreshold region including threshold region, the analysis of transport characteristics in subthreshold region is very important. The threshold voltage roll-off and DIBL have been with various of doping concentration for DGMOSFET in this study.

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Analysis of Channel Doping Concentration Dependent Subthreshold Characteristics for Double Gate MOSFET (이중게이트 MOSFET에서 채널도핑농도에 따른 문턱전압이하 특성 분석)

  • Jung, Hak-Kee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.12 no.10
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    • pp.1840-1844
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    • 2008
  • In this paper, the influence of channel doping concentration, which the most important factor is as double gate MOSFET is fabricated, on transport characteristics has been analyzed in the subthreshold region. The analytical model is used to derive transport model based on Poisson equation. The thermionic omission and tunneling current to have an influence on subthreshold current conduction are analyzed, and the relationship of doping concentration and subthreshold swings of this paper are compared with those of Medici two dimensional simulation, to verify this model. As a result, transport model presented in this paper is good agreement with two dimensional simulation model, and the transport characteristics have been considered according to the dimensional parameters of double gate MOSFET.

The Study on Channel and Doping influence of MOSFET using TCAD (TCAD를 이용한 채널과 도핑 농도에 따른 MOSFET의 특성 분석)

  • 심성택;장광균;정정수;정학기;이종인
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2000.05a
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    • pp.470-473
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    • 2000
  • The metal-oxide-semiconductor field-effect transistor(MOSFET) has undergone many changes in the last decade in response to the constant demand for increased speed, decreased power, and increased patting density. The devices are scaled down day by day. Therefore, This paper investigates how MOSFET structures influence on transport properties in according to change of channel length and bias and, observes impact ionization between the drain and the gate. This paper proposes three models, i.e., conventional MOSFET, LDD MOSFET and EPI MOSFET. The gate lengths are 0.3$\mu\textrm{m}$ 0.15$\mu\textrm{m}$, 0.075$\mu\textrm{m}$ and scaling factor is λ = 2. We have presented MOSFET's characteristics such as I-V characteristic, impart ionization, electric field, using the TCAD. We have analyzed the adaptive channel and doping influences

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Dependence of Conduction Path for Device Parameter of DGMOSFET Using Series (급수를 이용한 DGMOSFET에서 소자 파라미터에 대한 전도중심 의존성)

  • Han, Jihyung;Jung, Hakkee;Jeong, Dongsoo;Lee, Jongin;Kwon, Ohshin
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.10a
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    • pp.835-837
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    • 2012
  • In this paper, we have been analyzed conduction path by device parameter of double gate(DG) structure that have top gate and bottom gate. The Possion equation is used to analytical. The change of conduction path have been investigated for various channel lengths, channel thickness and gate oxide thickness using this model, given that these parameters are very important in design of DGMOSFET. The optimum channel doping concentration is determined as the deviation of conduction path is considered according to channel doping concentration.

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