Threshold Voltage Model of the MOSFET for Non-Uniform Doped Channel

채널 영역의 불균일 농도를 고려한 MOSFET 문턱전압 모델

  • Published : 2002.11.01

Abstract

The channel region of seep-sub-micrometer MOSFET is non-uniformly doped with pocket implant. Therefore, the advanced threshold voltage model is needed to account for the Short-Channel Effect and Reverse-Short-Channel Effect due to the non-uniform doping concentration in the channel region. In this paper, A scalable analytical model for the MOSFET threshold voltage is developed. The developed model is verified with MEDICI and TSUPREM simulator.

Keywords

References

  1. J. A. Greenfiled and R. W. Dutton, 'Nonplanar VLSI Device Analysis using the Solution of Poisson's Equation,' IEEE Trans. Electron Devices, vol. ED-27, 1520, 1980
  2. N.D. Arora and M.S. Sharma, 'Modeling the Anomalous Threshold Voltage Behavior of Submicrometer MOSFET's,' IEEE Trans. Electron Devices Letters, vol. EDL-13, 92, 1992 https://doi.org/10.1109/55.144969
  3. Z.H. Liu, C. Hu, J.H. Huang, T.Y. Chan, M.C. Jeng, P.K. Ko, and Y.C. Cheng, 'Threshold Voltage Model for Deep-Submicrometer MOSFET's,' IEEE Trans. Electron Devices, vol. ED-40, 86, 1993
  4. L.D. Yau, 'A Simple theorty to Predict the Threshold Voltage of a Short-Channel IGFET's,' Solid-State Electron., vol. 17, 1059, 1974 https://doi.org/10.1016/0038-1101(74)90145-2
  5. L.M. Dang,' A Simple Current Model for Short-Channel IGFET and its Application to Circuit Simulation,' IEEE Trans. Electron Devices, vol. ED-26, 436, 1979
  6. M. Orlowski, C. Mazure, and F. Lau, 'Submicron Short Channel Effects due to Gate Reoxidation Induced Lateral Interstitial Diffusion,' IEDM Tech. Dig. 632, 1987
  7. 'BSIM3 v3 MOSFET Model Users' Manual,' Depart. of Electrical Engineering and Computer Sciences, University of California, Berkeley (1997-1998)
  8. K.W. Terrill, C. Hu, and P.K. Ko, 'Analytical Model for the Channel Electric Field in MOSFET with Graded-Drain Structure,' IEEE Electron Device Letters, vol EDL-5, 440, 1984