• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.125-127
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• 2007

에어 베어링은 높은 강성과 낮은 마찰력과 같은 장점들로 인하여 높은 정밀도를 요구하는 반도체나 디스플레이 장비의 선형 스테이지에 주로 사용 되어지고 있다. 하지만 현재까지 높은 정밀도를 요구하는 회전형 스테이지에는 아직까지 크로스 롤러링을 이용하여 가이드를 하고 있다. 본 논문에서는 높은 정밀도를 갖는 회전 스테이지의 설계를 위하여 구동 성능과 오차요소에 대한 성능에 대해 설계 목표를 제시 하였고 이러한 스테이지를 구현하기 위해 에어베어링을 적용한 회전형 스테이지를 설계하였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.11a
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• pp.32.1-32.1
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.103-109
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• 2007

LCD (Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD (Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1996.04b
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• pp.68-72
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• 1996

본 연구에서는 에어오일 윤활하의 고속용 앵귤러 콘택트 볼베어링에 있어서, 여러 축방향의 하중과 윤활량의 변화에 대하여 회전속도에 따른 베어링의 마찰 토오크를 변화를 측정하고, 또한 회전속도, 하중 및 윤활량의 변화가 베어링 접촉부에서의 유막형성에 어떠한 영향을 미치는가를 알아보고자 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.159-159
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.467-468
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.33-34
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.109-110
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• 2009

• Tribology and Lubricants
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• v.36 no.6
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• pp.332-341
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• 2020

High-speed turbomachinery implements gas foil bearings (GFBs) due to their distinctive advantages, such as high efficiency, lesser part count, and lower weight. This paper provides the test results of the static structural stiffnesses and loss factors of bump-type foil thrust bearings with increasing preload and bearing deflection. The focus of the current work is to experimentally quantify variability in structural stiffnesses and loss factors among the four test thrust bearings with identical design values and material of the bump and top foil geometries using the same (open-source) fabrication method. A simple test setup, using a rigidly mounted non-rotating shaft and thrust disk, measures the bearing bump deflections with increasing static loads on the test bearing. The inner and outer diameters of the test bearings are 41 mm and 81 mm, respectively. The loss factor, best-representing energy dissipation in the test bearings, is estimated from the area inside the local hysteresis loop of the load versus the bearing deflection curve. The measurements show that structural stiffnesses and loss factors of the test bearings significantly rely on applied preloads and bearing deflections. Local structural stiffnesses of the test bearings increase with applied preloads but decrease with bearing deflections. Changes of loss factors are less sensitive to applied preloads and bearing deflections compared to those of structural stiffnesses. Up to 35% variability in static load structural stiffnesses is found between bearings, while up to 30% variability in loss factors is found between bearings.

• Composites Research
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• v.28 no.4
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• pp.219-225
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• 2015

Air spoiler, which can reduce the drag during operation, can be considered as a possible means to reduce carbon dioxide emission and to increase fuel efficiency. In this study, a composite air spoiler was designed and tested by static and repeated loads. The Green Water Pressure of 0.1 MPa a ship experiences during operation was perpendicularly applied to the air spoiler. Air spoiler was manufactured with sandwich panel which has glass fabric face and balsa core. Multiple sandwich panels were assembled to steel frame by bolt joint. The joint was designed to have bearing failure and examined by static and fatigue tests. Tests showed that the designed joint has enough margin of safety to endure joint failure. The developed sandwich panel to air spoiler is planned to be applied to a large scale commercial ship.