Design of Pad Type Air-Bearing for LCD Inspection |
Oh, Hyun-Seong
(부산대학교 정밀기계공학과)
Lee, Sang-Min (부산대학교 정밀기계공학과) Park, Jeong-Woo (부산대학교 나노융합기술학과) Kim, Yong-Woo (부산대학교 나노융합기술학과) Lee, Deug-Woo (부산대학교 나노융합기술학과) |
1 | http://www.kwangwo.co.krI2002/k_lcd_detail.htm |
2 | Hausler, G., 'Optical preprocessing for automated inspection,' Optics and Lasers in Engineering, Vol. 10, Issues 3-4, pp. 251-263, 1989 DOI ScienceOn |
3 | Holster, P. L. and Jacobs, J. A. H., 'Theoretical analysis and experimental verification on the static properties of externally pressurized air-bearing pads with load compensation,' Tribology International, Vol. 20, Issue 5, pp. 276-289, 1987 DOI ScienceOn |
4 | NEWS, 'Small vacuum pump for precision applications,' World Pumps, Vol. 2004, Issue 453, p. 11,2004 |
5 | BFI VDEH INST FUER ANGEWANDTE, 'Method and device for optically measuring the surface shape and for the optical surface inspection of moving strips in rolling and processing installations,' Korea Patent, App. 2004-7012273, 2004 |
6 | Michael, H., Martin, S. and Hubert, R. M., 'Microscopic ellipsometry: imaging monolayer on arbitrary reflecting supports,' Thin Solid Films, Vol. 284-285, pp. 412-416, 1996 DOI ScienceOn |
7 | Mohamed, F. and Marc, B., 'Comparison between externally pressurized gas thrust bearing with different orifice and porous systems,' Wear, Vol. 210, No. 1, pp. 311-317, 1997 DOI ScienceOn |
8 | Sogo, S., 'Air lubrication-from design to manufacture,' public inst, p. 60, 1990 |