• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.1
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• pp.64-72
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• 2004

In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.37-43
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.312.1-312
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure rates of turn about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. (omitted)

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.946-969
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• 2003

Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. MEMS gyroscopes have shown that slight mistuning in fabricated process often leads to significant difference of vibration characteristics between expected and real designs. The difference frequently affects the MEMS gyroscope design in a negative way. As long as the coupling between excited and sensed motions exists, such difference occurs inevitably. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated for the design of the MEMS gyroscope.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.970-976
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• 2003

In this paper, we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the notation of the gyroscope main body. The motions of the ring are electro-statically derived, sensed and balanced by electrodes. The equations of motion are formulated. The scheme of angular velocities sensing by force-to-rebalance method is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.8
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• pp.655-660
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• 2004

Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. Slight mistuning in fabricated MEMS gyroscopes often leads to significant difference of vibration characteristics between expected and real designs. This difference frequently results in a negative effect to the MEMS gyroscope performance. As long as the coupling between excited and sensed motions exists, such difference inevitably occurs. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated.

• Journal of KSNVE
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• v.10 no.5
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• pp.880-885
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• 2000

In a verical type, vibratory gyroscope, the coupled motion between the reference and sensing vibrations causes the zero-point output which means non-zero sensing vibration without angular velocity. This structural coupling leaks to an inherent discrepancy between the natural frequencies of the reference and sensing oscillations, causing the degradation of the sensing performance and dynamic stability. In this paper, the dynamic characteristics associated the coupling phenomenon are theoretically analyzed. Effects of reference frequency and coupling factor on the rotational direction and amplitude of elliptic oscillation are studied. A technique to predict the existence of curve veering of crossing in frequency trajectories is introduced to apply the design of micro gyroscopes with decoupled structures.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.792-797
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• 2004

Dynamic modeling of an eccentric MEMS gyroscope is presented and the dynamic characteristics of the gyroscope are investigated with the modeling method. It is found that the eccentricity of the MEMS gyroscope affects the dynamic characteristics significantly. Different from conventional MEMS gyroscopes, the zero-rate output is significantly reduced in this gyroscope. To obtain general guidelines of the gyroscope design, dimensionless parameters are first identified and the effects of the parameters on the gyroscope performance measures are investigated.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.12
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• pp.1001-1009
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• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.88-91
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• 2005

Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and uncertainty. I'll propose the method of changing the natural frequency through the imposing the axial force on the anchor part to separate the sensing part and the tuning part. When the shape of section is the form of rectangular, the degree of the natural frequencies' change under axial force appears D be different. Applying a tuning force of 30 $\mu$N, the natural frequencies' difference can be reduced by 5 percent.