Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

Dynamic Modeling and Analysis of an Eccentric MEMS Gyroscope

편심형 MEMS 자이로스코프의 동적 모델링 및 해석

  • 하동진 (한양대학교 기계설계학과) ;
  • 신상하 (한양대학교 기계설계학과) ;
  • 유홍희 (한양대학교 기계설계학과)
  • Published : 2004.04.28
Download PDF
⟨ Previous Next ⟩

Abstract

Dynamic modeling of an eccentric MEMS gyroscope is presented and the dynamic characteristics of the gyroscope are investigated with the modeling method. It is found that the eccentricity of the MEMS gyroscope affects the dynamic characteristics significantly. Different from conventional MEMS gyroscopes, the zero-rate output is significantly reduced in this gyroscope. To obtain general guidelines of the gyroscope design, dimensionless parameters are first identified and the effects of the parameters on the gyroscope performance measures are investigated.

Keywords