Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Vibration Analysis for a Coupled MEMS-Gyroscope Design

연성된 MEMS 자이로스코프 모델의 설계를 위한 진동 해석

  • 방선호 (한양대학교 대학원 기계설계학과) ;
  • 신상하 (한양대학교 대학원 기계설계학) ;
  • 유홍희 (한양대학교 기계공학부)
  • Published : 2004.08.01
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Abstract

Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. Slight mistuning in fabricated MEMS gyroscopes often leads to significant difference of vibration characteristics between expected and real designs. This difference frequently results in a negative effect to the MEMS gyroscope performance. As long as the coupling between excited and sensed motions exists, such difference inevitably occurs. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated.

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References

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Cited by

  1. Design of a vibrating MEMS gyroscope considering design variable uncertainties vol.24, pp.11, 2010, https://doi.org/10.1007/s12206-010-0904-4