La0.7Sr0.3MnO3 CMR thin film resistor deposited on SiO2/Si and Si substrates by rf magnetron sputtering for infrared sensor (SiO2/Si 및 Si 기판에 rf magnetron sputtering법으로 증착된 적외선 센서용 La0.7Sr0.3MnO3 CMR 박막 저항체 특성연구)
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- Journal of the Korean Vacuum Society
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- v.17 no.2
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- pp.130-137
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- 2008