La0.7Sr0.3MnO3 CMR thin film resistor deposited on SiO2/Si and Si substrates by rf magnetron sputtering for infrared sensor |
Choi, Sun-Gyu
(School of Advanced Materials Science and Engineering, Yonsei University)
Reddy, A. Sivasankar (School of Advanced Materials Science and Engineering, Yonsei University) Yu, Byoung-Gon (Electronics and Telecommunications Research Institute) Ryu, Ho-Jun (Electronics and Telecommunications Research Institute) Park, Hyung-Ho (School of Advanced Materials Science and Engineering, Yonsei University) |
1 | A. Rogalski, Prog. Quant. Electron 27, 59 (2003) |
2 | H. K. Kang, Y. H. Han, H. J. Shin, S. Moon, and T. H. Kim, J. Vac. Sci. Technol. B 21,1027(2003) DOI ScienceOn |
3 | A. H. Z. Ahmed and R. N. Taita, J. Appl. Phys. 94, 5326 (2003) DOI ScienceOn |
4 | R. J. Choudhary, A. S. Ogale, S. R. Shinde, S. Hullavarad, S. B. Ogale, T. Venkatesan, R. N. Bathe, S. I. Patil, and R. Kumar, Appl. Phys. Lett. 84, 3846 (2004) DOI ScienceOn |
5 | V. Bhosle, and J. Narayan, Appl. Phys. Lett. 90, 101903 (2007) DOI ScienceOn |
6 | M. Soltani, M. Chaker, X.X. Jiang, D. Nikanpour, and J. Margot, J. Vac. Sci. Technol. A 24, 1518 (2006) DOI ScienceOn |
7 | A. Lisauskas, S. I. Khartsev, and A. Grishin, Appl. Phys. Lett. 77, 756 (2000) DOI |
8 | D. Y. Kim, M. Gowtham, M. S. Shim, and J. Yi, Mater. Sci. Semicond. Process 7, 433 (2004) DOI ScienceOn |
9 | S. Y. Yang, W. L. Kuang, Y. Liou, W. S. Tse, S. F. Lee, and Y. D. Yao, J. Magn. Magn. Mater. 268, 326 (2004) DOI ScienceOn |
10 | C. -H. Lai, C. F. Hsu, Y. C. Chin, and C. Chiang, J. Vac. Sci. Technol. A 19, 1186 (2001) DOI ScienceOn |
11 | A. Goyal, M. Rajeswari, R. Shreekala, S. E. Lofland, S. M. Bhagat, T. Boettcher, C. Kwon, R. Ramesh, and T. Venkatesana, Appl. Phys. Lett. 71, 2535 (1997) DOI ScienceOn |
12 | M. Rajeswari, C. H. Chen, A. Goyal, C. Kwon, M.C. Robson, R. Ramesh, and T. Venkatesan, S. Lakeou, Appl. Phys. Lett. 68, 3555 (1996) DOI ScienceOn |
13 | P. W. Kruse, and D. D. Skatrud, Uncooled Infrared Imaging Arrays and Systems (Academic Press, San Diego, 1997) pp.43-122 |
14 | O.J. Gonzalez, G. Bistue, E. Castano, and F. J. Gracia, J. Magn. Magn. Mater. 222, 199 (2000) DOI ScienceOn |
15 | F. Yang, L. Mechin, J.M. Routoure, B. Guillet, and R.A. Chakalov, J. Appl. Phys. 99, 024903 (2006) DOI ScienceOn |
16 | A. C. Co, S. J. Xia, and V. I. Birss, J. Electrochem. Soc. 152, A570 (2005) DOI ScienceOn |
17 | C. V. Ramana, M. Massot, and C. M. Julien, Surf. Interface. Anal. 37, 412 (2005) DOI ScienceOn |
18 | J. -H. Kim and A. M. Grishina, Appl. Phys. Lett. 87, 2033502 (2005) |