• Journal of IKEEE
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• v.2 no.1 s.2
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• pp.101-107
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• 1998

This paper is studied micro-defect characteristics by phosphorus 1MeV ion implantation and Rs, SRP, SIMS, XTEM for the RTA process was measured and simulated. As the dose is higher, the Rs is lower. When the dose are $1{\times}10^{13}/cm^2,\;5{\times}10^{13}/cm^2,\;1{\times}10^{14}/cm^2$, the Rp are $1.15{\mu}m,\;1.15{\mu},\;1.10{\mu}m$ respectively. As the RTA time is longer, the maximum concentration position is deeper from the surface and the concentration is lower. Before the RTA was done, we didn't observe any defect. But after the RTA process was done, we could observe the RTA process changed the micro-defects into the secondary defects. The simulation using the buried layer and connecting layer structure was performed. As results, the connecting layer had more effect than the buried layer to latch-up immune. Trigger current was more $0.6mA/{\mu}m$ and trigger voltage was 6V at dose $1{\times}10^{14}/cm^2$ and the energy 500KeV of connecting layer Lower connecting layer dose, latch-up immune characteristics was better.

• Electrical & Electronic Materials
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• v.12 no.9
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• pp.57-63
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• 1999

SOI 구조의 MOSFET은 제조공정이 상대적으로 간단하며 CMOS 래치 업 현상이 일어나지 않고, soft error에 의한 회로의 오동작 가능성이 매우 낮은 이외에도 낮은 기생 정전용량 및 누설전류 특성을 가지므로 0.1 미크론 이하의 소자를 제작하는데 적합하여 저전압, 초고속 VLSI 설계에 적합한 소자로 각광받고 있다. 본고에서는 새로운 구조의 SOI MOSFET 구조들의 특성과 장, 단점을 검토하고 나아가 BJT(Bipolar Junction Transistor) 및 기타 소자들을 SOI 구조로 제작한 결과에 대해 간단히 검토함으로써 1999년 현재 SOI 기술의 현황을 소개하고자 한다.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1372-1373
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• 2006

An electrostatic discharge (ESD) protection device, so called, N-type SCR with P-type MOSFET pass structure (NSCR_PPS), was analyzed for high voltage I/O applications. A conventional NSCR_PPS device shows typical SCR-like characteristics with extremely low snapback holding voltage, which may cause latchup problem during normal operation. However, a modified NSCR_PPS device with proper junction/channel engineering demonstrates highly latchup immune current- voltage characteristics.

• Journal of Software Assessment and Valuation
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• v.16 no.2
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• pp.109-115
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• 2020

In this paper, the problem that occurs when negative voltage is generated using an inexpensive buck device in an IT device that is supplied with a single power by an adapter or battery is analyzed. For the cause analysis, the principle of operation of the buck device and the principle of the inverter circuit were examined, and the circuit characteristics of the inverter circuit were analyzed using the buck device. As a result of the analysis, it was confirmed that the inverter circuit using the buck device initially needs a large starting current, and in particular, in the case of a current capacity that is less than the starting current in the circuit that supplies power, it was confirmed that it could fall into a state similar to the latch-up phenomenon. In order to confirm the analysis result, an experimental circuit was constructed and the input current was checked. If the supply current is sufficient, it is confirmed that over-current flows and starts. If the supply current is insufficient, the circuit cannot start and a latch-up phenomenon occurs.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1953-1955
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• 1999

The effects of the local lifetime control on the characteristics of IGBT are investigated using the 2-dimensional device simulator, MEDICI. Many lumped resistive turn-off simulations are carried out to analyze the effects of the minority carrier lifetime, the width, and the position of the region with a reduced local minority carrier lifetime. As a result of these simulations, it is concluded that the on state voltage drop$(V_{CE,SAT})$ is only slightly increased while the switching behavior is greatly improved if the low lifetime region is properly set. And these results are compared with IGBTs having uniform lifetime.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1111-1113
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• 1995

To improve latch up characteristics of IGBT, this paper proposed new structure with reverse channel. IGBT proposed by this paper were designed on SOI substrate, $p^+$-substrate, and $n^+$-substrate, respectively. As a result of the simulation, we had achieved high latch up voltage and high conduction current density at IGBT with proposed structure. Latch up voltage of Conventional IGBT was 2.5V but IGBT with proposed structure was latched up at $5{\sim}94V$, respectively. And was showed high conduction current desity($10^4{\sim}10^7A/cm^2$)

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.9
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• pp.551-554
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• 2014

This paper was showed latch up characteristics of super junction power MOSFET by parasitic thyristor according to trench etch angle. As a result of research, if trench etch angle of super junction MOSFET is larger, we obtained large latch up voltage. When trench etch angle was $90^{\circ}$, latch up voltage was more 50 V. and we got 700 V breakdown voltage. But we analyzed on resistance. if trench etch angle of super junction MOSFET is larger, we obtained high on resistance. Therefore, we need optimal point by simulation and experiment for solution of trade off.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.11
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• pp.686-689
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• 2014

Electrostatic discharge has been considered as a major reliability problem in the semiconductor industry. ESD reliability is an important issue for these products. Therefore, each I/O (Input/Output) PAD must be designed with a protection circuitry that creates a low impedance discharge path for ESD current. This paper presents a novel Lateral Insulated Gate Bipolar (LIGBT)-based ESD protection circuit with latch-up immunity and high robustness. The proposed circuit is fabricated by using 0.18 um BCD (bipolar-CMOS-DMOS) process. Also, TLP (transmission line pulse) I-V characteristic of proposed circuit is measured. In the result, the proposed ESD protection circuit has latch-up immunity and high robustness. These characteristics permit the proposed circuit to apply to power clamp circuit. Consequently, the proposed LIGBT-based ESD protection circuit with a latch-up immune characteristic can be applied to analog integrated circuits.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.44 no.2
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• pp.222-227
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• 1995

A new IGBT structure, which may suppress latch-up phenomena considerably, is proposed and verified by MEDICI simulation. The proposed structure employing the segmented $n^{+}$ buffer layer increases latch-up current capability due to suppression of the current flowing through the resistance of $p^{-}$ well, $R_{p}$, which is the main cause of latch-up phenomena without degradation of forward characteristics. The length of the $n^{+}$ buffer layer is investigated by considering the trade-off between the latch-up current capability and the forward voltage drop. The segmented $N^{+}$ buffer layer results in better latch-up immunity in comparison with the uniform buffer layer.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.159-160
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• 2002

본 논문에서는 반도체 응용부문 중 그 활용도가 높은 MOSFET(Metal-Oxide-Semiconductor Field Effect Transistor)의 새로운 구조를 제안하였다. 제안한 소자를 가지고 전자회로의 구성할 때 인접 디바이스들과 연계되어 발생되는 래치 업(latch-up)을 근본적으로 제거하고, 개별소자의 완전한 절연을 실현하였으며 누설전류 또한 제거된다. 이는 SOI기판 위에 벌크실리콘 공정을 이용하여 구현된다. 즉, 소자 양옆의 트랜치 웰(Trench-well)과 SOI 기판의 절연층으로 소자의 독립성을 지켜준다. 또한 게이트 절연층을 트랜치 구조로 기존 MOS구조의 채널 부분에 위치시키고 드레인과 소스를 위치시켜 자연적으로 자기정렬이 되어진다. 이와 같은 과정으로 게이트-소스, 게이트-드레인 기생 커패시터의 효과를 현저히 줄일 수 있다.