Ultra-thin aluminum thin films deposited by DC magnetron sputtering for the applications in flexible transparent electrodes (DC 마그네트론 스퍼터링법으로 증착된 초박형 Al 박막의 투명전극 적용성 연구)
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- Journal of the Microelectronics and Packaging Society
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- v.25 no.2
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- pp.19-23
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- 2018