• Title/Summary/Keyword: 두께감소

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Ultra-thin aluminum thin films deposited by DC magnetron sputtering for the applications in flexible transparent electrodes (DC 마그네트론 스퍼터링법으로 증착된 초박형 Al 박막의 투명전극 적용성 연구)

  • Kim, Daekyun;Choi, Dooho
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.2
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    • pp.19-23
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    • 2018
  • In this study, the feasibility of Al-based transparent electrodes for optoelectronic devices was investigated. Al thin films having thickness in the range of 3-12 nm were deposited on glass substrates, and sheet resistance was measured for films thicker than 7 nm and the values continue to decrease with increasing film thickness. The grain size in the films was found to increase with increasing grain size. 85% visible light transmittance was measured at the thickness of 3 nm, and decreased to 50% and 60% when the film thickness reaches 4 nm and 5 nm, respectively. The results of this study can be used in the applications of oxide/metal/oxide type transparent electrodes.

Analysis of Subthreshold Swing for Ratio of Channel Length and Thickness of Asymmetric Double Gate MOSFET (비대칭 DGMOSFET의 채널길이와 두께 비에 따른 문턱전압이하 스윙 분석)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.19 no.3
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    • pp.581-586
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    • 2015
  • This paper has analyzed the variation of subthreshold swing for the ratio of channel length and thickness for asymmetric double gate MOSFET. The asymmetric double gate MOSFET has the advantage that the factors to control the short channel effects increase since top and bottom gate structure can be fabricated differently. The degradation of transport property due to rapid increase of subthreshold swing can be specially reduced in the case of reduction of channel length. However, channel thickness has to be reduced for decrease of channel length from scaling theory. The ratio of channel length vs. thickness becomes the most important factor to determine subthreshold swing. To analyze hermeneutically subthreshold swing, the analytical potential distribution is derived from Poisson's equation, and conduction path and subthreshold swing are calculated for various channel length and thickness. As a result, we know conduction path and subthreshold swing are changed for the ratio of channel length vs. thickness.

Relationship of Threshold Voltage Roll-off and Gate Oxide Thickness in Asymmetric Junctionless Double Gate MOSFET (비대칭형 무접합 이중게이트 MOSFET에서 산화막 두께와 문턱전압이동 관계)

  • Jung, Hakkee
    • Journal of IKEEE
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    • v.24 no.1
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    • pp.194-199
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    • 2020
  • The threshold voltage roll-off for an asymmetric junctionless double gate MOSFET is analyzed according to the top and bottom gate oxide thicknesses. In the asymmetric structure, the top and bottom gate oxide thicknesses can be made differently, so that the top and bottom oxide thicknesses can be adjusted to reduce the leakage current that may occur in the top gate while keeping the threshold voltage roll-off constant. An analytical threshold voltage model is presented, and this model is in good agreement with the 2D simulation value. As a result, if the thickness of the bottom gate oxide film is decreased while maintaining a constant threshold voltage roll-off, the top gate oxide film thickness can be increased, and the leakage current that may occur in the top gate can be reduced. Especially, it is observed that the increase of the bottom gate oxide thickness does not affect the threshold voltage roll-off.

Characterization of gate oxide breakdown in junctionless amorphous InGaZnO thin film transistors (무접합 비정질 InGaZnO 박막 트랜지스터의 게이트 산화층 항복 특성)

  • Chang, Yoo Jin;Seo, Jin Hyung;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.22 no.1
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    • pp.117-124
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    • 2018
  • Junctionless amorphous InGaZnO thin film transistors with different film thickness have been fabricated. Their device performance parameters were extracted and gate oxide breakdown voltages were analyzed with different film thickness. The device performances were enhanced with increase of film thickness but the gate oxide breakdown voltages were decreased. The device performances were enhanced with increase of temperatures but the gate oxide breakdown voltages were decreased due to the increased drain current. The drain current under illumination was increased due to photo-excited electron-hole pair generation but the gate oxide breakdown voltages were decreased. The reason for decreased breakdown voltage with increase of film thickness, operation temperature and light intensity was due to the increased number of channel electrons and more injection into the gate oxide layer. One should decide the gate oxide thickness with considering the film thickness and operating temperature when one decides to replace the junctionless amorphous InGaZnO thin film transistors as BEOL transistors.

Effect of Ge mole fraction and Strained Si Thickness on Electron Mobility of FD n-MOSFET Fabricated on Strained Si/Relaxed SiGe/SiO2/Si (Strained Si/Relaxed SiGe/SiO2/Si 구조 FD n-MOSFET의 전자이동에 Ge mole fraction과 strained Si 층 두께가 미치는 영향)

  • 백승혁;심태헌;문준석;차원준;박재근
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.10
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    • pp.1-7
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    • 2004
  • In order to enhance the electron mobility in SOI n-MOSFET, we fabricated fully depletion(FD) n-MOSFET on the strained Si/relaxed SiGa/SiO$_2$/Si structure(strained Si/SGOI) formed by inserting SiGe layer between a buried oxide(BOX) layer and a top silicon layer. The summated thickness of the strained Si and relaxed SiGe was fixed by 12.8 nm and then the dependency of electron mobility on strained Si thickness was investigated. The electron mobility in the FD n-MOSFET fabricated on the strained Si/SGOI enhanced about 30-80% compared to the FD n-MOSFET fabricated on conventional SOI. However, the electron mobility decreased with the strained Si thickness although the inter-valley phonon scattering was reduced via the enhancement of the Ge mole fraction. This result is attributed to the increment of intra-valley phonon scattering in the n-channel 2-fold valley via the further electron confinement as the strained Si thickness was reduced.

Effect of wing width and thickness on the polarization characteristics of vertical directional couplers using the Double-Sided Deep-Ridge waveguide structure (Double-Sided Deep-Ridge 도파관 구조 수직 방향성 결합기의 날개구조부 폭과 두께가 편광 특성에 미치는 영향)

  • 정병민;윤정현;김부균
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.293-298
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    • 2004
  • We investigate the effect of the wing width and thickness of a Double-Sided Deep-Ridge(DSDR) vertical directional coupler on the coupling length dependent on the polarization, We have found that the DSDR vertical directional coupler without a wing does not have polarization independent coupling lengths. The variation of the coupling length of TE and TM modes and the difference between the coupling lengths of the two modes are negligible as the wing width increases beyond the specific wing width for the same wing thickness. Thus, we can see that a DSDR vertical directional coupler has a wing width larger than the minimum wing width to obtain the polarization independent coupling length. The minimum wing width increases as the wing thickness increases for the same core thickness and as the core thickness decreases for the same wing width. Also, we have found that the minimum wing thickness is determined by the core thickness and the minimum wing thickness decreases as the core thickness increases.

Mechanical Strength and FEM Residual Stress Analysis of Stainless Steel/$Si_{3}M_{4}$ joints (스테인레스 스틸/질화규소 접합체의 기계적 특성 및 유한요소법에의한 잔류응력 해석)

  • Kim, Tae-U;Park, Sang-Hwan
    • Korean Journal of Materials Research
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    • v.5 no.4
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    • pp.468-475
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    • 1995
  • 활성금속 브레이징 방법으로 스테인레스 스틸과 질화규소를 접합하여 기계적 특성 및 유한요소법을 사용하여 접합체에서 발생되는 잔류응력의 크기를 조사하였다. 고강도 접합체를 제조하기 위하여 연성금속인 Cu 및 Cu/Mo 적층체를 중간재로 사용하였으며, 중간재의 두께 및 구조에 따라 접합체에서 발생되는 잔류응력의 크기 및 분포가 접합강도에 미치는 영향에 관하여 조사하였다.중간재인 Cu의 두께가 0.2mm 일대 세라믹스에 발생되는 최대 잔류응력의 크기가 급격히 감소하였으며, 최대 접합강도가 나타났다. Cu/Mo 다층 중간재를 사용한 접합체에서는 Cu/Mo 두께비가 감소할수록 접합강도는 증가되었다. 스테인레스 스틸/질화규소 접합체에서 Cu/Mo 중간재의 사용은 Cu 중간재 사용보다 접합강도를 증가시키는데 효과적이었으며, 최대 접합강도는 450Mpa 정도이었다. Cu/Mo 중간재를 사용한 접합체에서는 Mo에 최대 인장방향의 잔류응력이 발생하여 강도 측정시 Mo의 지배적인 소성변형으로 잔류응력이 감소되어 접합체의 접합강도를 향상시키는 것으로 생각된다.

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Dielectric properties of PTO/PZO superlattices prepared by RF Magnetron Sputterring (RF Magnetron Sputtering으로 증착된 PTO/PZO 초격자 박막의 유전 특성)

  • 한현자;이병수
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.38-38
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    • 2003
  • PTO/PZO 초격자 박막은 박막 계면에 응력이 발생하여 기존의 박막처럼 size effect가 적용되지 않고 두께가 감소해도 높은 유전상수를 갖는다. Antiferroelectric PbZrO$_3$(PZO)와 ferroelectric PbTiO$_3$(PTO)를 적층 성장시킨 초격자는 400도에서 성장한 (100) Pt/SiO$_2$기판 위에 rf magnetron sputtering으로 증착하였다. PTO/PZO의 증착 주기는 30(PTO $_{4unti cells}$/PZO $_{4unti cells}$) 에서 1(PTO $_{125unti cells}$/PZO $_{125unti cells}$)까지 두께의 변화를 주어 준비했고 초격자 박막의 전체두께는 100nm로 고정시켰다. XRD결과, PTO/PZO는 주기에 따라 초격자의 특성인 main peak과 satellite peak을 관찰 할 수 있었다. 초격자의 주기가 감소함에 따라 2$\theta$값이 증가하고 평균 d 값이 감소되면서 PTO층에 뒤틀림이 증가하였다. PTO층의 뒤틀림 증가로 인해 superlattice의 주기가 증가함에 따라 초격자의 유전율이 증가하였고 강유전성이 향상되었다.향상되었다.

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A study on improvement of amorphous silicon solar cell using i-double layer (i-double layer를 사용한 박막태양전지 특성향상에 관한 연구)

  • Jang, Juyeon;Song, Kyuwan;Yi, Junsin
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.115.1-115.1
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    • 2011
  • 최근 기본적인 pin 구조의 박막 cell 에서 i layer를 최적화 시키는 방안으로 double layer 구조가 많이 연구되고 있다. 본 연구에서는 ASA(Advanced Semicon ductor Analysis) simulation을 이용하여 i-double layer 최적화에 대한 연구를 진행해 보았다. 두께 150/150nm의 i double layer의 band gap 가변을 한 simulation 결과를 보았을 때, p쪽의 band gap이 상승하면서 intrinsic layer 내의 field가 증가하여 recombination center가 감소하였으나 FF의 감소가 있었다. n쪽의 band gap을 상승 시켰을때 n/i 쪽 field 증가로 Voc가 상승되어 초기 효율이 증가하였으나 intrinsic layer내의 field가 감소하여 recombination center가 오히려 증가하였다. 결과적으로 electric field와 효율을 동시에 고려했을 때 두께 300nm, 1.75의 band gap을 가지는 single layer 보다 150/150nm두께에 1.8/1.7 또는 1.8/1.75의 bandgap을 가지는 double layer를 사용하였을 때 보다 높은 효율을 얻을 수 있었다.

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Effect of Thickness Eccentricity on Plastic Collapse of Subsea Pipeline under External Pressure (외압하에서 해저배관의 소성붕괴에 대한 두께 불균일 효과)

  • Baek, Jong-Hyun;Kim, Young-Pyo;Kim, Woo-Sik
    • Journal of the Korean Institute of Gas
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    • v.15 no.6
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    • pp.14-19
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    • 2011
  • The objective of this study was to investigate the effect of the thickness eccentricity on the collapse pressure of a subsea pipeline subjected to external pressure. The collapse behavior of the subsea pipeline containing initial imperfection was evaluated using elastic-plastic finite element (FE) analyses. API 5L X65 and API 5L X80 Pipelines with the thickness eccentricity values between 4~16% were adopted to investigate the plastic collapse under hydrostatic pressure. A parametric study was shown that the plastic collapse pressure decreased when either the thickness eccentricity or the ratio of diameter to thickness increased.