Presently, the semiconductor industry has the chronic problem. In the semiconductor industry, it has the semiconductor wafer, a package, the optical filter cut by using the saw blade, the mold, a laser etc. The cutting technique has the difficulty due to the rising of the production cost by the wearing of mold, the poor quality problem due to generated heat at the moment of cutting procedure and curve cutting etc. The goal of this time of national research and development project is develop the apparatus for solving the problem that the existing cutting technique has. The technology is so called waterjet abrasive method. This technology will be mainly applied to cut a semiconductor package and a wafer. Two important things to be considered are ripple effect(in other words, the scale of a market) and simplicity of an application.

Interactive Graphic Robotics Integrated Programming(IGRIP) can handle various types of robot models and can exchange graphic or numerical data easily with other CAD software. In a cutting process of shape-steels, however. IGRIP is inconvenient because the users must generate all the tag points manually. In this study we developed an automation program module in order to generate the tag points automatically in IGRIP This program can read and analyze the macro data containing the information for cutting processes of shape-steels and can generate automatically the parts, the devices, the tag points and the Graphic Simulation Language(GSL) program files useful in IGRIP.

In order to optimize the polishing process, Run to Run control scheme has been applied to the micro mold polishing in this study. Also, to fully understand the effect of parameters on the surface roughness a design of experiment is performed. By linear approximation of main factors such as gap and rotational speed of micro quill, EWMA (Exponential Weighted Moving Average) gradual mode controller is adopted as a optimizing tool. Consequently, the process converged quickly at a target value of surface roughness Ra 10nm and Rmax 50nm, and was hardly affected by unwanted process noises like initial surface quality and wear of magnetic abrasives.

Butterfly valve is a kind of rotational valve which opens and closes the flow of fluid on rotating the disk 90 degrees in the valve body. In this paper, butterfly valve design safety evaluation which is based on the international valve specifications is investigated. Both body and disk of the butterfly valve are considered under the normal and pressurized operating conditions. A finite element analysis is carried out to compute the distribution of the displacement, stress and safety factor by using ANSYS. On the basis of calculated design safety we offer the design modification and compare with them.

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.

This study proposes a web-based remote monitoring system for evaluating degradation of machine tools using ART2(Adaptive Resonance Theory 2) neural network. A number of studies on the monitoring of machine tools using neural networks have been reported. However, when normal condition is changed due to factors such as maintenance, tool change etc., or a new failure signal is generated, such algorithms need to be entirely retrained in order to accommodate the new signals. To cope with such problems, this study develops a remote monitoring system using ART2 in which new signals when required are simply added to the classes previously trained. This system can monitor degradation as well as failure of machine tools. To show the effectiveness of the proposed approach, the system is experimentally applied to monitoring a simulator similar to the main spindle of a machine tool, and the results show that the proposed system can be extended to monitoring of real industrial machine tools and equipment.

For precise tracking control of a servo system with nonlinear friction, a robust friction compensation scheme is presented in this paper. The nonlinear friction is difficult to identify the friction parameters exactly through experiments. Friction parameters can be also varied according to contact conditions such as the variation of temperature and lubrication. Thus, in order to overcome these problems and obtain the desired position tracking performance, a robust adaptive back-stepping control scheme with a dual friction observer is developed. In addition, to estimate lumped friction uncertainty due to modeling errors, a DEKF recurrent neural network and adaptive reconstructed error estimator are also developed. The feasibility of the proposed control scheme is verified through the experiment fur a ball-screw system.

The purpose of this study is to provide a decision support to select an appropriate layered manufacturing(LM) machine that suits the application of a part. Selection factors include concept model, form/fit/functional model, pattern model far molding, material property, build time and part cost that greatly affect the performance of LM machines. However, the selection of a LM is not an easy decision because they are uncertain and vague. For this reason, the aim of this research is to propose hybrid multiple attribute decision making approaches to effectively evaluate LM machines. In addition, because subjective considerations are relevant to selection decision, a fuzzy logic approach is adopted. The proposed selection procedure consists of several steps. First, we identify LM machines that the users consider After constructing the evaluation criteria, we calculate the weights of the criteria by applying the fuzzy Analytic Hierarchy Process(AHP) method. Finally, we construct the fuzzy Technique of Order Preference by Similarity to Ideal Solution(TOPSIS) method to achieve the ranking order of all machines providing the decision information for the selection of LM machines.

A major disadvantage of thermal nanoimprint lithography(NIL) is the thermal cycle, that is, heating over glass transition temperature and then cooling below it, which requires a significant amount of processing time and limits the throughput. One of the methods to overcome this disadvantage is to make the processing temperature lower Accordingly, it is necessary to determine the effects on the processing parameters for thermal NIL at reduced temperatures and to optimize the parameters. This starts with a clear understanding of polymer material behavior during the NIL process. In this work, the squeezing and filling of thin polymer films into nanocavities during the low temperature thermal NIL have been investigated based upon a two-dimensional viscoelastic finite element analysis in order to understand how the process conditions affect a pattern quality; Pressure and initial polymer resist thickness dependency of cavity filling behaviors has been investigated.

To obtain the surface roughness with nano order, we need a ultra-precision machine, cutting condition, and materials. In this paper, the cutting condition for getting nano order smooth surface of core have been examined experimentally by the ultra-precision machine and diamond wheels. The effects of the cutting velocity, the feed rate and depth of cut on the surface roughness were studied. And also, the surface roughness was measured by the Form Talysurf series PGI 840. The champion data of developed core was surface roughness Rmax 24.6nm, figure accuracy Rmax 68.9nm.

In most multi-stage forging processes, the die spotting process or alignment of punch and die depends on the manual operation. It results a very tedious and inefficient procedure, thus the proper measurement system is needed to improve productivity and accuracy. This paper proposes a measurement system for alignment of die and punch which has a cylindrical holder, and describes the system concepts using 3 eddy-current displacement transducers and precise measurement jig. In order to apply this measurement system to real situations, the measuring procedures and system calibration method, etc. are proposed. Finally, the accuracy and productivity of this measurement system are investigated in this paper.

In this paper, a tracking control problem for a mechanical servo system with nonlinear dynamic friction is treated. The nonlinear friction model contains directly immeasurable friction state and the uncertainty caused by incomplete modeling and variations of its parameter. In order to provide the efficient solution to these control problems, we propose a hybrid control scheme, which consists of a robust friction state observer, a RFNN estimator and an approximation error estimator with sliding mode control. A sliding mode controller and a robust friction state observer is firstly designed to estimate the unknown infernal state of the LuGre friction model. Next, a RFNN estimator is introduced to approximate the unknown lumped friction uncertainty. Finally, an adaptive approximation error estimator is designed to compensate the approximation error of the RFNN estimator. Some simulations and experiments on the mechanical servo system composed of ball-screw and DC servo motor are presented. Results demonstrate the remarkable performance of the proposed control scheme.

This paper presents structural design optimization of a micro milling machine for minimum weight and compliance using a genetic algorithm with dynamic penalty function. The optimization procedure consists of two design stages, which are the static and dynamic design optimization stages. The design problem, in this study, is to find out thickness of structural members which minimize the weight, the static compliance and the dynamic compliance of the micro milling machine under several constraints such as dimensional constraints, maximum compliance limit, and safety factor criterion. Optimization results showed a great reduction in the static and dynamic compliances at the spindle nose of the micro milling machine in spite of a little decrease in the machine weight.

In general, the radial error motion of a machine tool spindle system is effected on the accuracy of the parts to be made. This paper presents in milling process an investigation into spindle rotational accuracy effects on surface roughness of processing parts. We experimented the effects on spindle rotational accuracy in milling process by cutting AL 7075 workpiece at various rotational speed. In order to analyze the effects of rotational accuracy on surface roughness, we proposed the method using iSIGHT's RBF Approximation. The proposed method can be used fur anticipating the surface roughness when some spindle rotational accuracy experiments could be done in milling process.

Thermosonic flip chip bonding is an important technology for the electronic packaging due to its simplicity, cost effectiveness and clean and dry process. Mechanical properties of the horn and the shank, such as the natural frequency and the amplitude, have a great effect on the bonding capability of the transverse flip chip bonding system. In this research, two kinds of study are performed. The first is the new design of the clamp and the second is the effect of tolerance parameters to the performance of the system. The clamp with a bent shape is newly designed to hold the nodal point of the flip chip. The second is the effect of the design parameters on the vibration amplitude and planarity at the end of the shank. The variation of the tolerance parameters changes the amplitude and the frequency of the vibration of the shank. They, in turn, have an effect on the quantity of the plastic deformation of the gold ball bump, which determined the quality of the flip chip bonding. The tolerance parameters that give the great effect on the amplitude of the shank are determined using Taguchi's method. Error of set-up angle, the length and diameter of horn and error of the length of the shank are determined to be the parameters that have peat effect on the amplitude of the system.