Optimization of Magnetic Abrasive Polishing Process using Run to Run Control

Run to Run 제어 기법을 이용한 자기연마 공정 관리

  • 안병운 (한양대학교 기계설계.메카트로닉스공학과 대학원) ;
  • 박성준 (충주대학교 기계공학과)
  • Published : 2009.02.15

Abstract

In order to optimize the polishing process, Run to Run control scheme has been applied to the micro mold polishing in this study. Also, to fully understand the effect of parameters on the surface roughness a design of experiment is performed. By linear approximation of main factors such as gap and rotational speed of micro quill, EWMA (Exponential Weighted Moving Average) gradual mode controller is adopted as a optimizing tool. Consequently, the process converged quickly at a target value of surface roughness Ra 10nm and Rmax 50nm, and was hardly affected by unwanted process noises like initial surface quality and wear of magnetic abrasives.

Keywords

References

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