Design of Cymbal Displacement Amplification Device for Micro Punching System

마이크로 펀칭시스템 구현을 위한 심벌변위확대기구의 설계

  • 최종필 (강원대학교 기계메카트로닉스공학과 대학원) ;
  • 이광호 (강원대학교 기계메카트로닉스공학과 대학원) ;
  • 이해진 (한국생산기술연구원 디지털 성형공정팀) ;
  • 이낙규 (한국생산기술연구원 디지털 성형공정팀) ;
  • 김성욱 (스페이스솔루션(주)) ;
  • 주은덕 (스페이스솔루션(주)) ;
  • 김병희 (강원대학교 기계메카트로닉스공학부)
  • Published : 2009.02.15

Abstract

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.

Keywords

References

  1. Park, S. J., Ahn, B. W., and Yoon, J. H., 2003, "Development of Ultraprecision Finishing Technique using Bonded Magnetic Abrasives," Transactions of KSMTE, Vol. 12, pp. 59-66.
  2. Zhang, B. and Zhu, Z. Q., 1994, "Design of an Inchworm-type Linear Piezo-motor," SPIE, Vol. 21, pp. 228-239.
  3. Yang, F. and Li, J. C. M., 1995, "Impression creep by an annular punch," Mechanics of Materials, Vol. 12, pp. 89-97.
  4. Yun, D. W., Ahn, K. H., and Han, C. S., 2007, "Development of Ultra Precision Rotational Stage using Semi-inchworm Driving Mechanism with PZT," Journal of the Semiconductor & Display Equipment Technology, Vol. 6, No. 1, pp. 37-41.
  5. Lim, J. H., Shon, J. H., Kim, J. J., Park, B. O., and Cho, S. H., 1995, "Variations of Piezoelectric Properties and Compressive Strength of PZT Ceramics with Poling Directions," Journal of the Korean Ceramic Society, Vol. 32, No. 10, pp. 1131-1138.
  6. Lobontiu, N., Paine, J., Garcia, E., and Goldfarb, M., 2002, "Design of Symmetric Conic-section Flexure Hinges based on Closed-form Compliance Equations," Mech. Mach. Theory, Vol. 37, pp. 477-498. https://doi.org/10.1016/S0094-114X(02)00002-2
  7. Han, C. S. and Kim, S. H., 2002, "Three-axis Lever Actuator with Flexure Hinges for an Optical Disk System," Review of Scientific Instruments, Vol. 73, pp. 3678-3686. https://doi.org/10.1063/1.1505098
  8. Smith, S. T. and Chetwynd, D. G. 1994, Foundations of Ultra-precision Mechanism Design, CRC Press, London.