In recent years, developments in the semiconductor and electronic industries have brought a rapid increase in the use of large size silicon wafer. For further improvement of the ultra precision surface and flatness of Si wafer necessary to high density ULSI, it is known that polishing is very important. However, most of these investigation was experiment less than 300mm diameter. Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study reports the machining variables that has major influence on the characteristic of wafer polishing. It was adapted to polishing pressure, machining speed, and the slurry mix ratio, the optimum condition is selected by ultra precision wafer polishing using load cell and infrared temperature sensor. The optimum machining condition is selected a result data that use a pressure and table speed data. By using optimum condition, it achieves a ultra precision mirror like surface.

In the design of modem rotating machinery, it is often necessary to increase the performance of rotor-bearing system. Since a critical speed range influences the performance and safety of the whole system, it should be necessary to constrain the critical speed and thus resonance response in design process to result in large vibration. Consequently the minimization of resonance response amplitudes within the operation range of the rotor system becomes the most primary design objective. In this paper, based on the assumption that the external shape of rotating-shaft, bearing supporting positions and etc, the natural frequency analysis of spindle is performed by ANSYS $10.0^{(R)}$ Optimum design is conducted using the RBF model.

For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.

This study analyzes the rolled circular rod strip with radius of loom and length of 350cm by using finite element analysis. The material strength and its durability of the rolled strip can be predicted through this study. As the penetration tolerance by contact decreases, the contact rigidity of strip increases. As the contact rigidity becomes the highest at the elapsed time of 1.2 second, the contact stress becomes the lowest. On the contrary, von-Mises stress becomes highest at this time. The total deformation on strip increases from the upper part of strip at the position near to rotating roll to the lower part of strip at the position near to fixing roll.

An object transport system is driven by a conveyor belt system or a magnetic levitation system. It is an indispensable device in many fields and especially it is very important in the factory automation. However, the conventional transport system can damage precision optical components by the contact force and destroy the inner structure of semiconductor by the magnetic field. The new transport system for transporting without damage is required. The ultrasonic transport system is a device that transports objects on the elastic body using ultrasonic wave. In this paper, an object transport system using the ultrasonic wave is developed for transporting precision elements without damage. Traveling waves are generated by the ultrasonic wave generator fixed in both ends of the beam. The traveling wave of the ultrasonic transport system is theoretically analyzed. Transport direction of the object is examined according to phase difference and frequency. The theoretical results are verified by experiments.

Titanium and its alloys, due to their superior properties of high specific strength and excellent corrosion resistance, are increasingly used in living applications in the 21century. The applications in aerospace and medical industries demand machining process more frequently to obtain a desired product. But unfortunately, this material is one of the most difficult-to-cut. In the turning process of titanium alloys, the key point for successful work is to select proper tool materials and cutting conditions. This study suggests a guidance for selecting the tool materials and the cutting speeds to improve tool life and surface integrity in Ti-6Al-4V titanium turning process. The experiments investigate the change of surface roughnesses, cutting forces and flank wear with various cutting parameters of tool materials, depth of cuts and feeds. As the results, K10 type of insert tip was assured as the best for turning of Ti-6Al-4V titanium alloy.

Molecular flows inside a guide block in the OLED(organic luminescent emitting device) deposition process have been simulated using DSMC(direct simulation Monte Carlo) method. Because the organic materials are evaporated under vacuum, molecules flow at a high Knudsen number of the free molecular regime, where the continuum mechanics is not valid. A guide block is designed as a part of the linear cell source to transport the evaporated materials to a deposition chamber, When solving the flows, the inlet boundary condition is proved to affect significantly the whole flow pattern. Thus, it is proposed that the pressure should be specified at the inlet. From the analysis of the density distributions at the nozzle exit of the guide block, it is shown that the longer nozzle can emit molecules more straightly. Finally, a nondimensionalized mass flow profile is obtained by numerical experiments, where various nozzle widths and inlet pressures are tested.

Recently, the manufacturer of microscopic structures along with the development of technology to produce electronics, communication and semiconductors allows various components to be smaller in size, with higher precision. Therefore, preoccupancy of micro/nano-level machining technology in order to product micro/nano-components and parts is key issue in the field of manufacturing. In this study, machinability of micro machining was studied through the machining of aluminum, brass and steel workpiece. Inspection of the cutting force variation patterns of large numbers of micro machining indicated that characteristics of the workpiece. Surface roughness prediction methods were developed by considering the variation of the static part of the feed direction cutting force. The accuracy of the proposed approaches were tested with experimental data and the agreement between the predictions and actual observations are addressed.

The cutting process of materials is accompanied with the elastic and plastic deformation due to chucking forces in the boring process of thin holes on the turning. Upon removal of chucking forces at the end of process, the original shape is remained in the plastic deformation; on the other hand, it is modified in the elastic deformation due to spring back. Fixing materials by chucks on the turning has influence on roundness because the process is conducted with unbalanced distribution load induced from the fixing of three jaws. Moreover, the amount of spring back depends on the magnitude of fixing forces. We studied the change of roundness according to fixing forces as well as the method to reduce the influence of chucking forces.

This study deals with the friction welding of SKH55 and SM45C; The friction time was variable conditions under the conditions of spindle revolution 2,000rpm, friction pressure of 190MPa, upset pressure of 270MPa and upset time of 2.0 seconds. Under these conditions, the microstructure of weld interface, tensile fracture surface and mechanical tests were studied, and so the results were as follows. 1. When the friction time is 1.0 seconds, the tensile strength of friction welds was 926MPa, which is around as much as 84% of the tensile strength of base metal(SKH55), the bending strength of friction welds was 1,542MPa, which is around as much as 80% of the bending strength of base metal(SKH55), the shear strength of friction welds was 519MPa, which is around as much as 70% of the shear strength of base metal(SKH55). 2 According to the hardness test, the hardness distribution of the weld interface was formed from 964Hv to 254Hv. HAZ(Heat Affected Zone) was formed from the weld interface to 1.5mm of SKH55 and 2mm of SM45C.

Micro end-milling is one of effective technology that is able to do ultra-precision machining while increasing the productivity and has wide application field. But selection of machining condition is very difficult because of complicated machining mechanism. Therefore this study was carried out to select working factors to get the optimum surface roughness. Machining condition are depth of cut, feed rate and spindle revolution. The result of this study showed that Surface roughness was affected, in the other of depth of cut, spindle revolution, feed rate. And this study provided an regression equation relating surface roughness to working factors through Regression Analysis and determination coefficient of regression equation had a satisfactory reliability of 79%.

Rubbing-roller is used for manufacturing liquid crystal display, and static displacement of the rubbing-roller becomes bigger as length of the rubbing roller made of aluminum is getting longer. Therefore, material of the rubbing-roller is changed from aluminum to CFRP(Carbon Fiber Reinforced plastic). Recently thermal spraying is applied to manufacturing process of long rubbing-roller. The thermal spraying has disadvantages such as increment of manufacturing time and fraction defective caused by density of stainless steel particle. In this study, fitting process by drawing was suggested and FEM analysis with Tsai-Wu failure theory and fitting experiments are carried out to find adequate shrink allowance. The suggested shrink allowance gives proper adhesive force, and CFRP failure is not occurred. Furthermore, the fitting process is applied to long rubbing-roller and availability of the fitting process is studied by measurement of roundness, straightness and shear strength.

This paper presents the dynamic analysis and input shaping control of a positioning stage. Vibration characteristics of the positioning stage are affected not only by the structural dynamics but also by the servo actuators that consist of the mechanism; driving motor and controller. This paper proposes an integrated dynamic model to accommodate both the structural dynamics and the servo actuators. Theoretical modal analysis with a commercial finite element code is carried out to investigate the dynamic characteristics of the experimental positioning stage. Experiments are performed to validate the theoretical modal analysis and estimate the equivalent stiffness due to the servo actuators. This paper deals with an input shaping scheme to suppress vibration of the positioning stage. Input shapers are systematically implemented for the positioning stage in consideration of its dynamics. The effects of servo control gain are also investigated. The experiments show that input shaping effectively removes residual vibrations and then improves the performance of positioning stage.

A pneumatic system was proposed to evaluate displacement accuracy of the pneumatic actuator without external load and to analyze capability of integration of the proposed valve system. The proposed pneumatic system consisted of a combination of pneumatic valves, two proximity sensors, and a programmable logic controller(PLC). The position controller is based on the PLC controller connected with the proximity sensors. Displacement accuracy of the pneumatic cylinder stroke was tested by varying air pressures of the supply and discharge-side and strokes of the pneumatic cylinder. The displacement accuracy of the pneumatic cylinder stroke increased as the supply and discharge side of air pressure increased at the stroke length of 133mm. Also the displacement accuracy increased as the stroke length increased with a fixed supply and discharge side of air pressure of the pneumatic cylinder as 3.5 and $4.5kg/cm^2$, respectively. The most accurate displacement of the pneumatic cylinder(i.e., standard deviation of 0.01 mm) was obtained at the supply and discharge side of air pressure of 4.0 and $5.0kg/cm^2$, respectively, and strokes of 170 and 190 mm among arbitrarily selected supply and discharge side air pressures and strokes.

In this investigation, conductivity of conductive inks was measured. A particular attention has been given to the effect of metal powders with various conductivity on the overall conductivity of the bulk ink. The conductivity of various solutions simulating conductive inks consisting of copper and silver was measured and the results have been discussed in relation to various applications of conductive inks in practice. A conductivity model simulating systems consisting of various materials has been introduced and the results were discussed. Materials of good conductivity are adversely affected by mixing with materials of poor conductivity simply through serial connection. However, parallel connection has rather little effect on the overall conductivity. The practical implication of various mixtures of materials on conductive inks has been discussed.

Nowadays, the researches for improving LCD manufacturing process and reducing cost are getting accelerated and additionally new types of process are widely developed. In this situation, APEM(Anti Photo Exposure Method) which does not need photo-lithography is realized as one of possible alternative of LCD process. APEM makes LCD pattern by stamping and it can reduce the process cost and process time because of its simplicity. But optical alignment between pattern glass and target glass is very critical fact to realize the precise patterns. So, the analysis of deflection of large size of glass is carried out and design of experiment method is applied for optimal design of jig.

Embedded capacitor technology is one of the effective packing technologies for further miniaturization and higher performance of electric packaging system. In this paper, the embedded capacitors were simulated and fabricated in 8-layered printed circuit board employing standard PCB processes. The composites of barium titanante($BaTiO_3$) powder and epoxy resin were employed for the dielectric materials in embedded capacitors. Theoretical considerations regarding the embedded capacitors have been paid to understand the frequency dependent impedance behavior. Frequency dependent impedance of simulated and fabricated embedded capacitors was investigated. Fabricated embedded capacitors have lower self resonance frequency values than that of the simulated embedded capacitors due to the increased parasitic inductance values. Frequency dependent capacitances of fabricated embedded capacitors were well matched with those of simulated embedded capacitors from the 100MHz to 10GHz range. Quality factor of 20 was observed and simulated at 2GHz range in the 10 pF embedded capacitors. Temperature dependent capacitance of fabricated embedded capacitors was presented.

This study is to compare and analyze the material flow, deformation characteristics, and forming load of flange by means of similitude experimental method of model material using plasticine. In order to find optimal forming conditions, prototype experiments were designed to investigate forming characteristics of general-purpose flange under various working conditions. As a result of prototype experiments, billet thickness and gap-height ratio was found to be the most influential experimental parameter in flange forming. Forming loads from prototype experiments were compared to the results of finite element analysis after conducting estimation of forming loads of real material. Results of prototype experiments based on model material techniques are expected to be used as a basic data of die design f3r the development of products and process.

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

This paper presents a machining error compensation methodology due to deflection of micro cutting tools in side cutting processes. Generally in order to compensate for tool deflection errors it is necessary to carry out a series of simulations, cutting force prediction, tool deflection estimation and compensation method. These can induce numerous calculations and expensive costs. This study proposes an improved approach which can compensate for machining errors without simulation processes concerning prediction of cutting force and tool deflection. Based on SEM images of test cutting specimens, polynomial relationships between machining errors and corrected tool positions were induced. Taking into account changes of cutting conditions caused by tool position variation, an iterative algorithm was applied in order to determine corrected tool position. Experimental works were carried out to validate the proposed approach. Comparing machining errors of nominal cutting with those of compensated cutting, overall machining errors could be remarkably reduced.