Multi-wafer planetary type chemical vapor deposition reactors are widely used in thin film growth and suitable for large scale production because of the high degree of growth rate uniformity and process reproducibility. In this study, a two-dimensional model for estimating the effect of the gap between satellite and wafer on the wafer surface temperature distribution is developed and analyzed using computational fluid dynamics technique. The simulation results are compared with the results obtained from an analytical method. The simulation results show that a drop in the temperature is noticed in the center of the wafer, the temperature difference between the center and wafer edges is about $5{\sim}7^{\circ}C$ for all different ranges of the gap, and the temperature of the wafer surface decreases when the size of the gap increases. The simulation results show a good agreement with the analytical ones which is based on one-dimensional heat conduction model.

In this paper, the measurement of the inner diameter dimension of the circular hole by using a machine vision system was studied. This paper was focused on the theory and key technologies of machine vision inspection technology for the improvement of measurement accuracy and speed of the micro circular holes. A new method was proposed and was verified through the experiments on Gray conversion, binarization, edge extraction and Hough transform in machine vision system processes. Firstly, the Hough transform was proposed in order to improve the speed increase and implementation ease, it demonstrated the superiority of Hough transform and improvement through a comparative experiment. Secondly, we propose a calibration method of the system in order to obtain exactly the inner diameter of the circular hole. Finally, we demonstrate the reliability of the entire system as a MATLAB-based implementation of the GUI program, measuring the inner diameter of the circular hole through the circular holes of different dimensions measuring experiment.

In this paper, a fused illumination mechanism for detecting surface defects in steel plates was designed by applying the discriminant function that can differentiate the contrast of defects and non-defects. There is low contrast, non-uniformity, and no feature characteristics in steel plate surfaces. The fused illumination mechanism is devised, based on those characteristics. Optimum parameters of the fused illumination mechanism are determined by applying the discriminant function after acquiring the defect image in steel plate surfaces. The performance of the proposed mechanism is verified by experminets.

For process improvement and cutting down on expenses in solar cell industry, it is necessary to improve recycling process of wafer manufacturing. In this research, a study is introduced to develop classifier which is for recycling of abrasive. First of all, recycling process of wafer manufacturing is analyzed. And then, 3 steps of experiments such as oil removal, impurities removal and classification were executed. For the classification of slurry, a classifier is designed and manufactured. From experiments, it is verified that ultra sound vibration and flux are very important factors for classification. By experiencing the recycling processes and making devices, the technique can be initiated industry if needed such as decreasing waste and cutting down on expenses.

Arago's disk system consists of a speed controller of the DC motor (inner loop controller) and a position controller of the magnetic bar angle (main controller), which are implemented by the design of the PI and PID controller, respectively. First, we analyzed the nonlinear characteristics of the Arago disk system and found the operating point range of three locations as a result. In this paper, a gain scheduler method was applied to guarantee a constant control performance in the range of $0{\sim}130^{\circ}C$, and a structure to change the controller according to the control reference value based on the previously obtained operating points was experimentally implemented. The Distributed Control Systems (DCS) configuration using the Controller Area Network (CAN) was used to verify the proposed method by improving the operational efficiency of the entire experimental system. So, simplicity of the circuit and easy diagnosis were achieved through a single CAN bus communication.

We have fabricated flexible and stretchable pressure sensors using silver nanowires (AgNWs) and analyzed their electric responses. AgNWs are spray coated directly onto uncured polydimethylsiloxane (PDMS) such that AgNWs penetrate into the uncured PDMS, enhancing the adhesion properties of AgNWs. However, the single-layered AgNW sensor exhibits unstable electric response and low pressure sensitivity. To tackle it, we have coated a conductive polymer, poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) onto the AgNW layer. Such a hybrid bilayer sensor ensures a stable electric response because the over-coating layer of PEDOT:PSS effectively suppresses the protrusion of AgNWs from PDMS during release. To enhance the sensitivity further, we have also fabricated a stacked bilayer AgNW sensor. However, its electric response varies depending sensitively on the initial overlap pressure.

In this paper, a new method of laser trimming of thick film heater is studied. Various laser waves (IR, Green, UV) are used to ablation the heater and the process parameters are also presented. For given initial printed resisters, the cutting length should be prepared to obtain the target resister value in advance. Therefore, the cutting model is very important. The well-known model was tested and proven that it is valid only within a certain range of cutting length. A new model is proposed for a wide range of resister laser trimming. The cutting lengths and resister variation was obtained and formulated. To verify the presented method, the cutting lengths of each resister are calculated for various target resister value and laser trimming using UV is conducted.

This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

Solar cell industry requires high technologies to stabilize apparatuses for the wafer manufacturing. Vibrations of squaring & grinding machines are one of the most critical factors for causing residual stresses of ingots, which are the main reasons of the breakage in the following processes such as wire sawing, cleaning, and modularity. In this study, the structure of a squaring & grinding machine has been analyzed through experiments and computer simulations to figure out the ways to suppress the vibrations effectively, and further to minimize the breakage of wafers. The result shows that simple design changes of applying a few ribs can improve the stability of the machine.

Recently, advance in technology have increased the importance of visual inspection in semiconductor inspection areas. In PCB visual inspection, accurate line estimation is critical to the accuracy of the entire process, since it is utilized in preprocessing steps such as calibration and alignment. We propose a line estimation method that is differently weighted for the line candidates using a histogram of gradient information, when the position of the initial approximate corner points is known. Using the obtained line equation of the outline, corner points can be calculated accurately. The proposed method is compared with the existing method in terms of the accuracy of the detected corner points. The proposed method accurately detects corner points even when the existing method fails. For high-resolution frames of 3.5mega-pixels, the proposed method is performed in 89.01ms.

As the demand on displays increases, new thin-film transistors such as metal oxide transistor are continuously being invented. When designing a circuit consisting of such new transistors, a new transistor model based on proper charge transport mechanisms is needed for each of them. In this paper, a modeling framework which enables to choose charge transport mechanisms that are limited to certain operation regions and assemble them into a transistor model instead of making an integrated transistor model dedicated to each transistor. The framework consists of a graphic user interface to choose charge transport models and a current calculation part, which is also implemented in AIM-SPICE for circuit simulation.

This paper presents the implementation for the master changing algorithm between nodes in a general electric vehicle. The packet processing method based on the unique network method of an electric vehicle is that the method of processing a communication packet has the priority from the node of a vehicle installed at both ends. An important factor in deciding master or slave in a train is that the request data, the status data, and transmits or control codes of sub-devices are controlled from the node which master becomes. If the request data or the status data is transmitted from the non- master side, it is very important that only one of the devices of both stages be master since the data of the request data may collide with each other. This paper proposes an algorithm to select master or slave depending on which vehicle is started first, which node is master or slave, and whether the vehicle key is operation. Finally experimental results show the stable performance and effectiveness of the proposed algorithm.

As the automobile industry has shifted to software, the Automotive SPICE standard has been established to ensure efficient product development process and quality. In the assessment model, the HIS Scope is the minimum standard for small and medium automotive electric companies to meet OEM requirements. However, in order to achieve the HIS Scope, the output of each process stage that meets the verification criteria of Automotive SPICE must be created. In particular, the test phase takes a lot of resources, which is a big burden for small and medium-sized companies. In this paper, we propose a methodology for creating test cases of software integration test phase based on UML sequence diagram, which is a software design phase of Automotive SPICE HIS Scope, by applying behavior model based testing method. We also propose a tool chain for automating the creation process. This will reduce the resources required to create a test case.

Augmented Reality(AR) is the core technology of the future knowledge service industry. It is expected to be used in various fields such as medical, education, entertainment etc. Briefly, augmented reality technology is a technique in which a mapped virtual object is augmented when a real-world object is viewed through a device after mapping a real-world object and a virtual object. In this paper, we implemented object detection and tracking system, which is a key technology of augmented reality. To speed up the object tracking, the ORB algorithm, which is a lightweight algorithm compared to the detection algorithm, is applied. In addition, KNN classifier, which is a machine learning algorithm, was applied to detect a single object by learning multiple images.

High dynamic range (HDR) imaging offers a radically approach of representing colors in digital images. Instead of using the range of colors produced by given devices, HDR imaging method manipulates and stores all colors and brightness levels visible to the human eye. To faithfully represent, store and then reproduce all these effects, the original scene must be stored and treated using high fidelity HDR techniques. Then, tone mapping is required to accommodate HDR image to low dynamic range (LDR) devices, and tone mapping operation of HDR image for realistic display is commonly researched. However, color visualization for analyzing scene luminance in HDR imaging has less attention from researches. This paper presents and implements a method for reproduction and visualization of the false color in HDR images. We produce a color visualization framework with several mapping functions, and evaluate their effectiveness by using RMAE and SNR with commonly used HDR image data. Experiment reveals that the sigmodal mapping function shows better performance in the false color visualization, compared to other methods.

Poly(urethane acrylate) siloxane oligomers with Interpenetrating polymer networked nanoparticles were prepared to synthesize hard coating solution by reaction with isophorone diisocyanate(IPDI) of 1, 2, 3, 4 phr. The structures and molecular weights of the synthesized solutions were characterized by IR spectroscopy and gel permeation chromatography, respectively. In the cross-cut test for the adhesion, all the solutions showed good adhesion of 5B regardless of the content of IPDI and film thickness. The addition of 1 phr IPDI resulted in the best pencil hardness. The IPDI combined siloxane hard coating solution showed more flexibility than the siloxane solution. These results will yield the improvement in the siloxane solution using for plastic display plate.

2-Ethylhexyl acrylate, butyl acrylate, methyl methacrylate, and 2-hydroxyethyl methacrylate were polymerized to synthesize acrylic pressure sensitive adhesive (PSA). Alumina and graphite as a filler were added to acrylic PSA to give thermal conductivity. In case of addition of both graphite and alumina, the thermal conductivity of PSA was increased compared with alumina alone due to enhancement of contact between two fillers followed by increasing thermal path in PSA matrix.

This paper confirms the similarity of temperature tendency through numerical analysis and comparison with test, and it also confirms that temperature prediction of LED lightings is possible by numerical analysis. We confirmed that the temperature difference is about $10{\sim}20^{\circ}C$ except for some measurement points and shows similar tendency with the interpretation through manufacturing and performance analysis of AL heat sink applied Circular LED street lights and manufacturing and performance analysis of CMP-PLA heat sink applied Circular LED street lights. The simulations use Octree technique in SC/Tetra to set the grid size df the surface.

Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.

Terahertz waves are superior to conventional X-ray or Magnetic Resonance Tomography(MRI), and the amount of information that can be transmitted is as large as thousands of times that conventional X-ray or MRI. In addition, Terahertz waves have great performance in analyzing an object which have some layered structure. By using this advantage, we can extract the letters of a page by analyzing information such as absorption amount and reflection amount by irradiating a closed book with pulses of various frequencies within gap of a terahertz wave. However, in the image of each page using the Terahertz wave might be obtained various kinds of noise and the different character occlusion region. So, to extract letters from the terahertz image, we must take the noise and occlusion region away. We have been working to enhancement the image quality in various ways, and keep on studying de-noising processing for enhancement about the image quality and high resolution. Finally, we also keep on studying about OCR(Optical Character Recognition) technology, which based on pattern matching technique, to read letters.

Temperature uniformity of a wafer in a semiconductor process is a very important factor that determines the overall yield. Therefore, it is very important to confirm the temperature characteristics of the chuck surface on which the wafer is lifted. The temperature characteristics of the chuck depend on the external heat source, the shape of the cooling channel inside the chuck, the material on the chuck surface, and so on. In this study, CFD confirms the change of temperature characteristics according to the stacking order of ceramic materials on the chuck surface, and suggests the best lamination method.

EES System support to maximize equipment efficiency by providing real-time information of main equipment which has a significant effect on product quality and productivity, and to prevent equipment failure by detecting equipment abnormality in advance. Smart Equipment Engineering System(S-EES) integrates the activities performed at equipment that are the core of production activities and manages them by system so as to maximize the efficiency of equipment and raise the quality level of products to one level. In other words, when the product is put into the equipment, the recipe is downloaded through the RMS, the recipe is set to the optimal condition through R2R(process control), and the system detects and controls the abnormality of the equipment during operation through the FDC function in real time it means. In this way, we are working with the suitable recipe that matches the lot of product, detecting the abnormality of the equipment during operation, preventing the product from being defective, and establishing a system to maximize the efficiency through real-time equipment management. In this study, we review the present status and problems of equipment management in actual production lines, collect the requirements of the manufacturing line for the PCB line, design and develop the system, The measurement model was studied.

In this research, we present a path planning method for an autonomous flight of unmanned aerial vehicles (UAVs) through reinforcement learning under simulated environment. We design the simulator for reinforcement learning of uav. Also we implement interface for compatibility of Deep Q-Network(DQN) and simulator. In this paper, we perform reinforcement learning through the simulator and DQN, and use Q-learning algorithm, which is a kind of reinforcement learning algorithms. Through experimentation, we verify performance of DQN-simulator. Finally, we evaluated the learning results and suggest path planning strategy using reinforcement learning.