• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.423-423
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• 2009

미진동 제어라는 분야에 대한 연구는 반도체 산업이 초고도화 및 초정밀화가 진전되고 있는 최근에 들어와 학계보다는 전문 반도체와 TFT-LCD의 미진동제어 관련 엔지니어 그룹과 정밀 장비 제작사를 중심으로 이루어져왔다. 고집적 생산 제품을 가공 및 검사하기 위해서는 가공 선폭 이상의 분해 성능을 가진 고정밀도의 생산 및 검사 장비가 필요하다. 이런 고정밀도 생산 및 검사장비는 내외부로부터 입력되는 진동에 민감한 영향을 받는다. 초기 반도체 산업을 주도한 미국을 중심으로 일부 학자와 반도체 진동 제어를 수행하는 전문연구소에서 작성한 BBN-Criteria는 정밀장비의 용도나 분해능 별로 정리된 진동허용규제치를 지침서로 사용하여 왔다. 그러나 장비의 엄밀한 주파수 특성 및 정밀도 측면에서 불확실한 영역부분을 가지고 있기 때문에 미소한 진동을 제어하는 구조 설계자 관점에서는 불충분한 자료이다. 그리고 주파수 분해능을 가진 진동허용규제치를 제시하는 것이 바람직하지만 대부분의 제작사에서는 그렇지 못하고 있다. 그런 이유에는 장비 개개의 진동허용규제치가 다른 고가의 장비 전량에 대하여 시험을 수행해야 하는 점, 가진(加振)특성, 중량, 크기 등의 진동실험 자체에 어려움 때문이다. 또한 진동실험시 가진주파수의 분해능의 결려에 따른 장비의 동적 특성이 고려되지 않은 불확실한 영역 부분을 포함한 진동허용규제치를 제시함으로서 불확실한 영역부분의 진동 하한치를 진동허용규제치의 상한치로 결정하는 문제로 인하여 진동허용규제치가 더욱 가혹하게 제시되어 건물 구조 설계와 방진의 어려움을 가중시킬 여지가 있다. 본 논문에서는 이런 어려움 등을 회피하는 방법으로 주파수응답함수(Frequency Response Function, FRF)를 이용하여 정밀장비의 진동허용규제치를 결정하는 간편하면서도 더욱 정밀한 새로운 방법을 모색하였다.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.1
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• pp.11-16
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• 2011

When the trains are passed the station, a serious force is applied to ground and the caused vibration is propagated to the area of the station by the ground and rocks. The caused vibration brings about the operation interruption of the equipment which is sensitive to the vibration, or will bring about the structural damage of the station. In this study, to investigate the vibrational evaluation of railway station by the train service, the vibration simulation was performed and analyzed the effect of the vibration isolating countermeasure. From the vibration measurement, all trains that passed through the station exceeded the vibration criteria. Therefore, the vibration isolating countermeasure was established and the vibration simulation was performed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.10
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• pp.968-975
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• 2010

The high interest for the ground vibrations which is caused by the train service is risen. When the trains are passed, a serious force is applied to ground and the caused vibration is propagated to the area of the building by the ground and rocks. This vibration comes to feel in the residents with the direct vibration, it is radiated in sound. The caused vibration and radiated sound affect the human's life, and this vibration brings about the operation interruption of the equipment which is sensitive to the vibration, or will bring about the structural damage of the building. In this study, the effect of the vibrations caused by the passing trains on the railway station and buildings is investigated by vibration measurement. Indoor and outdoor measurement is carried out by each trains.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.165-169
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• 2000

High level vibrationional environments induced while launching of spacecraft can damage sensitive equipment or payloads, unless the equipment is properly designed. This is a critical issue for KOMPSAT-2 which will carry a high resolution electro-optic camera and a sophisticated attitude and orbit control system. Thus careful consideration on the launch environment is required in the design stage of spacecraft. This requires generation of vibration specification for each component. This paper describes the generation process of vibrational specification for KOMPAT-2, which is designed and tested by Korean engineers.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.875-878
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• 2006

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function, therefore, it is very important to predict precisely vibration environment of microelectronics production facility due to adjacent blast work. However, it is not easy to evaluate a quantitative vibration response of structure due blast because it can be determined by the characteristics of vibration sources, propagation through rock and soil and dynamic properties of building. In this paper, vibration influence evaluation of micro-electronic Production building induced from adjacent blast activity was performed by real measurement data obtained on ground and structure at same time. And blast vibration allowable limit on ground was supposed by measurement data analysis in order to avoid operation error of precision equipments

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.8
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• pp.726-735
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• 2007

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.5
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• pp.475-483
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• 2011

A hybrid electromagnetic actuator with an air mount is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In the design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, in order to confirm the design performance, a dynamic characteristic test is carried out for the prototype of a hybrid electromagnetic actuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.299-304
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• 2009

A hybrid electromagnetic actuator with an air spring is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In basic design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, some design parameters are optimized under several constraint conditions. Through this study, the design procedure for a specific electromagnetic actuator is set up using a simple reluctance method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.433-437
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• 2004

A provision crane is generally installed on the upper deck to the rear of the accommodation of the ship in order to load and unload engine part or something heavy. There are two types of provision cranes: one is jib-type and the other is monorail-type. So the natural frequency of the jib-type crane equipment is low, therefore, there are some possibility of resonance between crane structure and the main excitation sources of the ship in normal operating range. This study describe a vibration reduction technique for provision crane by applying a proper countermeasure through finite element analysis and modal test. In order to find out weak point in design of provision crane, a sensitive analysis has been performed.

• Earthquakes and Structures
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• v.6 no.3
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• pp.281-300
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• 2014

This study proposes a scheme to design control parameters for a data center facility with a vibration controller on its top floor and a secondary isolation device with its own vibration controller designed to protect vibration-sensitive computer equipment. The aim is to reduce the effects of acceleration and drift from an earthquake on computer servers placed on the isolation device that must operate during a seismic event. A linear elastic model is constructed and the evaluation function of the linear quadratic Gaussian (LQG) control is formulated. The relationship between the control parameters and the responses is examined, and based on the observations, a control parameter design scheme is constructed to reduce the responses of both the building and the computer server effectively.