An Analysis and Assessment of Transient Vibration Phenomenon for Precision Equipment Due to Adjacent Utility Operation in TFT-LCD Fab |
Baek, Jae-Ho
(RMS테크놀러지(주))
Lee, Hong-Ki (RMS테크놀러지(주)) Son, Sung-Wan (RMS시스템(주)) Chun, Chong-Keun (선문대학교 기계공학부) |
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