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http://dx.doi.org/10.5050/KSNVN.2007.17.8.726

An Analysis and Assessment of Transient Vibration Phenomenon for Precision Equipment Due to Adjacent Utility Operation in TFT-LCD Fab  

Baek, Jae-Ho (RMS테크놀러지(주))
Lee, Hong-Ki (RMS테크놀러지(주))
Son, Sung-Wan (RMS시스템(주))
Chun, Chong-Keun (선문대학교 기계공학부)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.17, no.8, 2007 , pp. 726-735 More about this Journal
Abstract
Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.
Keywords
Vibration Criteria; Dynamic Stiffness Criteria; Clean Room; Sub-structure; Pad;
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  • Reference
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