실험적 방법에 의한 발파작업으로 기인하는 인접 초정밀 생산장비 FAB에 미치는 진동 영향성 평가 및 제어대책

A evaluation and countermeasure for blast-induced vibration of micro electronic production facility based on experimental method

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function, therefore, it is very important to predict precisely vibration environment of microelectronics production facility due to adjacent blast work. However, it is not easy to evaluate a quantitative vibration response of structure due blast because it can be determined by the characteristics of vibration sources, propagation through rock and soil and dynamic properties of building. In this paper, vibration influence evaluation of micro-electronic Production building induced from adjacent blast activity was performed by real measurement data obtained on ground and structure at same time. And blast vibration allowable limit on ground was supposed by measurement data analysis in order to avoid operation error of precision equipments