Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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An Analysis and Assessment of Transient Vibration Phenomenon for Precision Equipment Due to Adjacent Utility Operation in TFT-LCD Fab

TFT-LCD 생산공장 내 유틸리티 가동으로 인한 정밀장비 과도진동 현상 및 평가

  • Published : 2007.08.20
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Abstract

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

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References

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