A Study on the Development of a Hybrid Electromagnetic Actuator Against Microvibration
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Moon, S.J.
(한국기계연구원)
Park, S.H. (한국산업기술시험원) Jeong, J.A. (한국기계연구원) Huh, Y.C. (한국기계연구원) Kim, C.H. (한국생산기술연구원) Choi, S.M. ((주)수퍼센츄리) |
1 | Shin, Y. H., Oh, K. Y., Lee, J. H. and Kim, K. J., 2007, Performance Enhancement of Pneumatic Vibration Isolation Table in Low Frequency by Active Control, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 17, No. 1, pp. 72-79. DOI |
2 | Sun, J. O., Shin, Y. H. and Kim, K. J., 2007, A Study on Response Analysis of 6-DOF Pneumatic Vibration Isolation Table by Transient Movements of Carriage on It, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 17, No. 6, pp. 515-523. 과학기술학회마을 DOI |
3 | Kim, H. T., Kim, C. H., Lee, K. W., Lee, G. S., Son, S. W. and Chun, C. K., 2009, Performance Estimation of Active Electro-magnetic Isolator for Semiconductor Manufacturing Machine, Proceedings of the KSNVE Annual Spring Conference, pp. 579-580. |
4 | Moon, S. J., Jung, H. J., Shin, Y. H., Jang, D. D., Jeong, J. A. and Moon, Y. J., 2011, Development of a Hybrid Mount System Combined Airspring with Piezostack Actuator for Microvibration, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 21, No. 1, pp. 56-65. 과학기술학회마을 DOI ScienceOn |
5 | Gordon, C. G., 1991, Generic Criteria for Vibration-sensitive Equipment, Proceedings of SPIE Conference on Vibration Control and Metrology, pp. 71-85, San Jose, CA |
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7 | Amick, H., Gendreau, M., Busch, T. and Gordon, C. G., 2005, Evolving Criteria for Research Facilities: I - Vibration, Proceedings of SPIE Conference on Buildings for Nanoscale Research and Beyond, pp. 1-13. |
8 | Braucer, J. R., 2006, Magnetic Actuators and Sensors, IEEE Magnetic Society, Wiley-Interscience. |
9 | An, C. H., Yim, K. H., Jin, K. B. and Rim, K. H., 2007, Active Control of Vibration Isolation Table Using Air-spring, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 17, No. 7, pp. 565-571. 과학기술학회마을 DOI |
10 | Jang, H. K., Hong, S. I., Kim, H. S., Lee, D. H. and Lee, K. D., 2006, A Vibration Isolation System Design for a Vibration-sensitive Equipment, Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 16, No. 3, pp. 307-312. 과학기술학회마을 DOI |
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