• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.277-284
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• 1998

To establish the calibration system of hot cathode ionization gauges as transfer gauges, researches were concentrated on measurements of the pressure ratio, the orifice conductance as well as the porous plug conductance of a ultrahigh vacuum standards system. Two ionization gauges obtained from two different vendors were calibrated in the pressure range of $7{times}10^{-7}$ to $4{times}10^{-3}$ Pa by injecting argon gas into the standards system. As a result, a 4% difference was revealed in non-linearity of the extractor ionization gauge due to the pressure difference between high vacuum and ultrahigh vacuum, and 3% for the stabil ionization gauge. It has been understood that the extractor ionization gauge is able to be used within the 10% error, the uncertainty of the extractor ionization gauge, if properly regulating the sensitivity of the gas. The stabil ionization gauge was also proved to be useable in the maximum error margin of 4% without the control of the gas sensitivity.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.632-639
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• 2014

Mechanical stress and the vacuum level are the two main factors dominating the quality factor of a resonator operated in the vacuum range 1 mTorr to 10 Torr. This means that if the quality factor of a resonator is very insensitive to the mechanical stress in the vacuum range, it is sensitive to mainly the ambient vacuum level. In this paper, a wafer-level packaged MEMS resonator with a highly vacuum-sensitive quality factor is presented. The proposed device is characterized by a package with out-of-plane symmetry and a suspending structure with only a single anchor. Out-of-plane symmetry helps prevent deformation of the packaged device due to thermal mismatch, and a single-clamped structure facilitates constraint-free displacement. As a result, the proposed device is very insensitive to mechanical stress and is sensitive to mainly the ambient vacuum level. The average quality factors of the devices packaged under pressures of 50, 100, and 200 mTorr were 4987, 3415, and 2127, respectively. The results demonstrated the high controllability of the quality factor by vacuum adjustment. The mechanical robustness of the quality factor was confirmed by comparing the quality factors before and after high-temperature storage. Furthermore, through more than 50 days of monitoring, the stability of the quality factor was also certified.

• Journal of the Korean Vacuum Society
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• v.11 no.4
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• pp.189-193
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• 2002

We have developed a characteristics evaluating system for low vacuum gauges with a project of basis of vacuum technology construction. By using this system, we also performed a characteristics evaluation as to the accuracy, linearity, repeatability, gas sensitivity, and long-term stability of thermal conductivity gauges.

• Vacuum Magazine
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• v.4 no.3
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• pp.6-11
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• 2017

The tactile sensor of the future robot is becoming a necessity as a sensory organ which can communicate with the person most directly. Recently, the Nature-inspired technology has provided a new direction for the development of these tactile sensors. Here, we review three different nature-inspired tactile sensory system; high sensitivity pressure sensor inspired by beetle wings, highly sensitive strain sensor inspired by the spider's sensory organs, Tactile sensor inspired by human fingertip. These nature-inspired tactile sensors are expected to provide a breakthrough that not only can sensitively measure the pressure, but also delicately recognize the softness and texture of the material just like human.

• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.91-98
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• 2007

The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.197.1-197.1
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• 2014

VO2 has intensively investigated for several decades due to its interesting physical properties, including metal-insulator transition (MIT), thermochromic and thermoelectric properties, near the room temperature. And also gas and photo sensing properties of VO2 nanowires have attracted increasing research interest due to the high sensitivity and multi-sensing capability. We studied the light-induced resistance change of VO2 nanowires. In particular, we have investigated plasmonic enhancement of the photo-sensing properties of the VO2 nanowires. To select proper wavelength, we performed finite-difference time-domain simulations of electric field distribution in the VO2 nanowires attached with Ag nanoparticles. Localized surface plasmon resonance (LSPR) is expected at wavelength of 560 nm. The photo-sensitivity was carefully examined as a function of the sample temperature. In the presentation, we will discuss physical origins of the photo-induced resistance change in VO2.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.703-708
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• 1996

Humidity sensing cheracterisrics of vacuum deposited plasma poly merized $YbPc_2$ films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than $38^{\circ}C$ of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.123.2-123.2
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• 2013

Etching endpoint detection with plasma impedance monitoring (PIM) is demonstrated for small area dielectric layers inductive coupled plasma etching. The endpoint is determined by the impedance harmonic signals variation from the I-V monitoring system. Measuring plasma impedance has been examined as a relatively simple method of detecting variations in plasma and surface conditions without contamination at low cost. Cluster analysis algorithm is modified and applied to real-time endpoint detection for sensitivity enhancement in this work. For verification, the detected endpoint by PIM and real-time cluster analysis is compared with widely used optical emission spectroscopy (OES) signals. The proposed technique shows clear improvement of sensitivity with significant noise reduction when it is compared with OES signals. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as end point detection.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.239-239
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• 2013

For more than four decades, ion-sensitive field-effect transistor (ISFET) sensors that respond to the change of surface potential on a membrane have been intensively investigated in the chemical, environmental, and biological spheres, because of their potential, in particular their compatibility with CMOS manufacturing technology. Here, we demonstrate a new type of ISFET with dual-gate (DG) structure fabricated on ultra-thin body (UTB), which highly boosts sensitivity, as well as enhancing chemical stability. The classic ion-sensitive field-effect transistor (ISFET) has been confronted with chronic problems; the Nernstian response, and detection limit with in the Debye length. The super-coupling effects imposed on the ultra thin film serve to not only maximize sensitivity of the DG ISFET, but also to strongly suppress its leakage currents, leading to a better chemical stability. This geometry will allow the ISFET based biosensor platform to continue enhancement into the next decade.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.05a
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• pp.124-128
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• 1995

We have fabricated the vacuum magnetic device with a lateral field emitter arrays constructed on n-Si wafer, and investigated its magnetic characteristics. The device is consited to tip-arrayed emitter. gate and split-anode, The fabricated vacuum magnetic device has showed a good linearity of magnetic field and a high sensitivity compared with the conventional semiconductor magnetic device.