Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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AN APPLICATION OF PLASMA-POLYMERIZED YbPc$_2$ FILM: HUMIDITY SENSOR

  • Yamana, Masao (Department of natural sciences, Faculty of Science and Engineering, Tokyo Denki University) ;
  • Kashiwazaki, Naoya (Dept. of natural sciences, Faculty of Engineering, Tokyo Denki Univ.)
  • Published : 1996.12.01
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Abstract

Humidity sensing cheracterisrics of vacuum deposited plasma poly merized $YbPc_2$ films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than $38^{\circ}C$ of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.

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