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Development of characteristics evaluating system for low vacuum gauges  

홍승수 (한국표준과학연구원 진공기술센터)
정광화 (한국표준과학연구원 진공기술센터)
신용현 (한국표준과학연구원 진공기술센터)
임인태 (한국표준과학연구원 진공기술센터)
박근섭 (㈜한백)
정원호 (㈜한백)
Publication Information
Journal of the Korean Vacuum Society / v.11, no.4, 2002 , pp. 189-193 More about this Journal
Abstract
We have developed a characteristics evaluating system for low vacuum gauges with a project of basis of vacuum technology construction. By using this system, we also performed a characteristics evaluation as to the accuracy, linearity, repeatability, gas sensitivity, and long-term stability of thermal conductivity gauges.
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  • Reference
1 /
[ 홍승수;신용현;전광화 ] / 한국진공학회지
2 Procedure for Calibrating Vacuum Gauges of the Thermal Conductivity Type /
[] / AVS 6.2
3 /
[ P. J. Nash;T. J. Tomson ] / J. Vac. Sci. Technol   DOI
4 /
[ 정광희;신용현(등) ] / 진공공학