Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

The Magnetic Sensor with Lateral Field Emitter Arrays

평면구조의 전계방출형 자기 센서

  • 남명우 (영남대학교 전자공학과) ;
  • 김시헌 (영남대학교 전자공학과) ;
  • 남태철 (영남대학교 전자공학과)
  • Published : 1995.05.01
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Abstract

We have fabricated the vacuum magnetic device with a lateral field emitter arrays constructed on n-Si wafer, and investigated its magnetic characteristics. The device is consited to tip-arrayed emitter. gate and split-anode, The fabricated vacuum magnetic device has showed a good linearity of magnetic field and a high sensitivity compared with the conventional semiconductor magnetic device.

Keywords