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http://dx.doi.org/10.5757/JKVS.2007.16.2.091

Development of a Residual Gas Analyzer Calibration System  

Hong, S.S. (Advanced Technology Division, Korea Research Institute of Standards and Science)
Lim, I.T. (Advanced Technology Division, Korea Research Institute of Standards and Science)
Kim, J.T. (Advanced Technology Division, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.16, no.2, 2007 , pp. 91-98 More about this Journal
Abstract
The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.
Keywords
Quadrupole mass spectrometer; gas sensitivity; calibration;
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  • Reference
1 J. A. Basford, J. Vac. Sci. Technol., A9(3), 1991-1993 (1991)
2 N. Ogiwara, M. shiho, Vacuum 44, 661-663 (1993)   DOI   ScienceOn
3 INFICON Technical Notes, Partial Pressure Measurements, 1-3 (2006)
4 J. A. Basford, L, Lieszkovszky, A. R. Filippelli, D. Boeckmann, E. Ellefson, H. Holkeboer, M. Stupak, Recommended practice for calibration of partial pressure analyzers, J. Vac. Sci. Technol. A11, A29-A31 (1993)
5 D. J. Mitchell, J. Vac. Sci. Technol. A3(3), 527-530 (1985)
6 Y. H. Shin, S. S. Hong, C. R. Lee, J. Y. Lim, J. H. Pa, K. H. Chung, J. of Kor. Vac. Soc. 2(1), 9-16 (1993)
7 W. Aberth, C. Spindt, Int. J. Mass Spec. Ion Phys. 25, 183-198 (1977)   DOI   ScienceOn
8 L. Lieszkovszky, A. R. Filippelli, C. R. Tilford, J. Vac. Sci. Technol. A8, 3838-3854 (1990)
9 M. Hoffman, B. Singh, R. A. Outlaw, Handbook of Vacuum Science and Technology, 303-319 (1998)