• Title/Summary/Keyword: treatment target

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Electrical characteristic of PZT thin film deposit by Rf-magnetron sputtering as Pb excess ratio of target (Sputtering법으로 성장한 PZT 박막의 Target의 Pb Excess에 따른 전기적 특성에 관한 연구)

  • Lee, Kyu-Il;Kang, Hyun-Il;Park, Young;Park, Ki-Yeub;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.570-573
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    • 2002
  • Pb(Zr0.52Ti0.48)O3 (PZT) thin films were deposited on the Pt/Ti bottom electrode by rf magnetron sputtering method from target containing 5%, 25% and 50% Pb excess for applying ferroelectric random access memory (FRAM). PZT films were deposited at $300^{\circ}C$ and then they were crystallized by rapid thermal annealing (RTA) at $700^{\circ}C$. After RTA treatment, our results showed that all PZT films indicated perovskite polycrystalline structure with preferred orientation (110) and no pyrochlore phase was observed by X-ray diffraction (XRD) and by Scanning electron microscopy (SEM). A well-fabricated PZT film of excess Pb 25% capacitor showed a leakage current density in the order of $2.63{\times}10^{-7}A/cm^2$ at 100kV/cm, a remanent polarization of $3.385{\mu}C/cm^2$ and a coercive field of 41.32 kV/cm. The results showed that Pb excess of target affects to electrical properties of PZT thin film.

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Comparison of Target Approximation Techniques for Stereotactic Radiosurgical Plan

  • Choi, Kyoung-Sik;Oh, Seong-Jong;Lee, Jeong-Woo;Choe, Bo-Young;Kim, Moon-Chan;Chung, Hyun-Tai;Suh, Tae-Su
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2005.04a
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    • pp.47-50
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    • 2005
  • The aim of radiosurgery cures a patient to deliver the lower dose at the normal organ and the higher dose at the tumor. Therefore accuracy of the dose is required to gain effect of radiosurgery in surgical planning. In this paper, we developed the methods of target approximation for a fast treatment planning. Nominally, the stereotactic radiosurgery(SRS) using Linac and Gamma knife produces spherical dose distribution through circular collimators using multiple arcs and 201 holes on semi-spherical helmet by $^{60}Co$. We developed an automatic radiosurgical plan about spherical packing arrangement. To automatically plan the SRS, new planning methods based on cylinder and cube structure for target shaping was developed. This approach using heuristic and stochastic algorithm is a useful radiosurgical plan without restrictions in the various tumor shapes and the different modalities.

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Deposition of Al Doped ZnO Films Using ICP-assisted Sputtering on the Plastic Substrate (유도결합 플라즈마 스퍼터링을 이용한 플라스틱 기판 상의 Al이 도핑된 ZnO 박막 증착)

  • Jung, Seung-Jae;Han, Young-Hun;Lee, Jung-Joong
    • Journal of the Korean institute of surface engineering
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    • v.39 no.3
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    • pp.98-104
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    • 2006
  • Al-doped ZnO (AZO) films were deposited on the plastic substrate by inductively coupled plasma (ICP) assisted DC magnetron sputtering. The AZO films were produced by sputtering a metallic target (Zn/Al) in a mixture of argon and oxygen gases. AZO films with an electrical resistivity of ${\sim}10^3\;{\Omega}cm$ and an optical transmittance of 80% were obtained even at a low deposition temperature. In-situ process control methods were used to obtain stable deposition conditions in the transition region without any hysteresis effect. The target voltage was controlled either at a constant DC power. It was found that the ratio of the zinc to oxygen emission intensity, I (O 777)/I (Zn 481) decreased with increasing the target voltage in the transition region. The $Ar/O_2$ plasma treatment improve the adhesion strength between the polycarbonate substrate and AZO films.

Deposition of Cu-Ni films by Magnetron Co-Sputtering and Effects of Target Configurations on Film Properties

  • Seo, Soo-Hyung;Park, Chang-Kyun;Kim, Young-Ho;Park, Jin-Seok
    • KIEE International Transactions on Electrophysics and Applications
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    • v.3C no.1
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    • pp.23-27
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    • 2003
  • Structural properties of Cu-Ni alloy films, such as preferred orientation, crystallite size, in-ter-planar spacing, cross-sectional morphology, and electrical resistivity, are investigated in terms of tar-get configurations that are used in the film deposition by means of magnetron co-sputtering. Two different target configurations are considered in this study: a dual-type configuration in which two separate tar-gets (Cu and Ni) and different bias types (RF and DC) are used and a Ni-on-Cu type configuration in which Ni chips are attached to a Cu target. The dual-type configuration appears to have some advantages over the Ni-on-Cu type regarding the accurate control of atomic composition of the deposited Cu-Ni alloy. However, the dual-type-produced film exhibits a porous and columnar structure, the relatively large internal stress, and the high electrical resistivity, which are mainly due to the relatively low mobility of adatoms. The affects of thermal treatment and deposition conditions on the structural and electrical properties of dual-type Cu-Ni films are also discussed.

MoN-Cu Thin Films Deposited by Magnetron Sputtering with Single Alloying Target (단일 합금타겟을 이용한 마크네트론 스퍼터링 공정으로 증착된 MoN-Cu 박막)

  • Lee, Han-Chan;Moon, Kyoung-Il;Shin, Paik-Kyun
    • Journal of the Korean institute of surface engineering
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    • v.49 no.4
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    • pp.368-375
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    • 2016
  • MoN-Cu thin films were prepared to achieve appropriate properties of high hardness and low friction coefficient, which could be applied to automobile engine parts for reducing energy consumption as well as solving wear problems. Composite thin films of MoN-Cu have been deposited by various processes using multiple targets such as Mo and Cu. However, those deposition with multiple targets revealed demerits such as difficulties in exact control of composition and homogeneous deposition. This study is aiming for suggesting an appropriate process to solve those problems. A single alloying target of Mo-Cu (10 at%) was prepared by powder metallurgy methods of mechanical alloying (MA) and spar plasma sintering (SPS). Thin film of MoN-Cu was then deposited by magnetron sputtering using the single alloying target of Mo-Cu (10 at%). Properties of the resulting MoN-Cu thin film were examined and compared to those of MoN-Cu thin films prepared with double targets of Mo and Cu.

How to Determine the Moving Target Exactly Considering Target Size and Respiratory Motion: A Phantom Study (종양의 움직임과 호흡주기에 따른 체적 변화에 대한 연구: 팬텀 Study)

  • Kim, Min-Su;Back, Geum-Mun;Kim, Dae-Sup;Kang, Tae-Yeong;Hong, Dong-Ki;Kwon, Kyung-Tae
    • The Journal of Korean Society for Radiation Therapy
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    • v.22 no.2
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    • pp.145-153
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    • 2010
  • Purpose: To accurately define internal target volume (ITV) for treatment of moving target considering tumor size and respiratory motion, we quantitatively investigated volume of target volume delineated on CT images from helical CT and 4D CT scans. Materials and Methods: CT images for a 1D moving phantom with diameters of 1.5, 3, and 6 cm, acryl spheres were acquired using a LightSpeed $RT^{16}CT$ simulator. To analyze effect of tumor motion on target delineation, the CT image of the phantoms with various moving distances of 1~4 cm, and respiratory periods of 3~6 seconds, were acquired. For investigating the accuracy of the target trajectory, volume ratio of the target volumes delineated on CT images to expected volumes calculated with diameters of spherical phantom and moving distance were compared. Results: Ratio$_{helical}$ for the diameter of 1, 5, 3, and 6 cm targets were $32{\pm}14%$, $45{\pm}14%$, and $58{\pm}13%$, respectively, in the all cases. As to 4DCT, RatioMIP were $98{\pm}8%$, $97{\pm}5%$, and $95{\pm}1%$, respectively. Conclusion: The target volumes delineated on MIP images well represented the target trajectory, in comparison to those from helical CT. Target volume delineation on MIP images might be reasonable especially for treatment of early stage lung cancer, with meticulous attention to small size target, large respiratory motion, and fast breathing.

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Respiratory Review of 2014: Asthma

  • Yoon, Ho Il
    • Tuberculosis and Respiratory Diseases
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    • v.77 no.6
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    • pp.237-242
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    • 2014
  • Asthma is a chronic inflammatory disease of the airway that comprises a variety of etiologies and inflammatory phenotypes. Clinically, there is a wide range of patients with varying severities and responses to individual drugs. The introduction of inhaled corticosteroid therapy has dramatically changed the treatment of asthma. Recent development of new therapies suggests the possibility of another breakthrough. These can be categorized as follows: anti-cytokine therapies that usually target eosinophilic inflammation, sublingual immunotherapy, and bronchial thermoplasty. In this paper, we will review the major articles related to asthma treatment that were published in 2013.

Magnetic Properties of Al-Co-N Thin Films Dispersed with Co Particles

  • Han, Chang-Suk
    • Journal of the Korean Society for Heat Treatment
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    • v.21 no.1
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    • pp.3-9
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    • 2008
  • Al-Co-N thin films, Al-Co-N/Al-N and Al-Co-N/Al-Co multilayers containing various amounts of Co content were deposited by using a two-facing targets type dc sputtering (TFTS) system. The films were also annealed successively and isothermally at different annealing temperatures. Irrespective of Co content and preparation methods, all the as-deposited films were observed non-magnetized. It was found that annealing conditions can control the magnetic and electrical properties as well as the microstructure of the films.

Gene Therapy for Oral Cancer

  • Chung, In-Jae
    • Biomolecules & Therapeutics
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    • v.15 no.4
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    • pp.273-280
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    • 2007
  • New treatment approaches are needed to improve the effectiveness of oral cancer treatment, since surgical resection of the tumor in oral region causes various oral dysfunctions. The molecular biology of oral cancer has been progressively delineated. Concurrently, gene therapy techniques have been developed that allow targeting or replacement of dysfunctional genes in cancer cells, offering the potential to treat a wide range of cancer. Oral carcinoma is attractive target for gene therapy because of its accessibility. In this article, we review the current status of gene therapy as applied to oral carcinoma.