열처리공학회지 (Journal of the Korean Society for Heat Treatment)

  • 제21권1호
  • /
  • Pages.3-9
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  • 2008
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  • 1225-1070(pISSN)
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  • 2508-4046(eISSN)
한국열처리공학회 (The Korean Society for Heat Treatment)
권호 표지

Magnetic Properties of Al-Co-N Thin Films Dispersed with Co Particles

  • Han, Chang-Suk (Dept. of Defense Science & Technology, Hoseo University)
  • 투고 : 2007.12.03
  • 심사 : 2008.01.11
  • 발행 : 2008.01.31
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초록

Al-Co-N thin films, Al-Co-N/Al-N and Al-Co-N/Al-Co multilayers containing various amounts of Co content were deposited by using a two-facing targets type dc sputtering (TFTS) system. The films were also annealed successively and isothermally at different annealing temperatures. Irrespective of Co content and preparation methods, all the as-deposited films were observed non-magnetized. It was found that annealing conditions can control the magnetic and electrical properties as well as the microstructure of the films.

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참고문헌

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