[KSCI] Korea Science Citation Index Service

Magnetic Properties of Al-Co-N Thin Films Dispersed with Co Particles

Han, Chang-Suk (Dept. of Defense Science & Technology, Hoseo University)

Publication Information

Journal of the Korean Society for Heat Treatment / v.21, no.1, 2008 , pp. 3-9 More about this Journal

Abstract

Al-Co-N thin films, Al-Co-N/Al-N and Al-Co-N/Al-Co multilayers containing various amounts of Co content were deposited by using a two-facing targets type dc sputtering (TFTS) system. The films were also annealed successively and isothermally at different annealing temperatures. Irrespective of Co content and preparation methods, all the as-deposited films were observed non-magnetized. It was found that annealing conditions can control the magnetic and electrical properties as well as the microstructure of the films.

Keywords

Composite target; Al-Co-N; Al-Co; saturation magnetization; thin films; multilayer films;

Citations & Related Records

Reference

1	K. I. Arai and M. Yamaguchi : J. Magn. Soc. Jpn. 27 (2003) 642
2	T. Kobayashi, M. Kubota, H. Satoh, T. Kamura, K. Yamauchi and S. Takahashi : IEEE Trans, Magn. MAG.-31 (1995) 1536
3	C. S. Han and O. Nittono : J. Kor. Inst. Met & Mater. 39 (2001) 253
4	C. S. Han and O. Nittono : J. Kor. Inst. Met & Mater. 39 (2001) 747
5	R. Chubachi and N. Tamagawa : IEEE Trans. Magn. MAG-30 (1994) 45
6	K. Asami, S. Ohnuma and T. Masumoto : Surface and Interface Analysis, 26 (1998) 659 DOI ScienceOn
7	N. X. Sun, S. X. Wang, C. Y. Hung, C. X. Chien and H. C. Tong : Materials Research Society Symposia Proceedings, 614 (2001) 2
8	H. Shibaya and I. Fukuda : IEEE Trans. Magn. MAG-33 (1997) 1005
9	R. F. Sooho : IEEE. Trans. Magn., 25 (1989) 1803 DOI ScienceOn
10	J. S. Fang, L. C. Yang, C. S. Hsu, G. S. Chen, Y. W. Lin and G. S. Chen : Journal of Vacuum Science & Technology, 22 (2004) 698 DOI ScienceOn