• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.57-57
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• 2003

High dielectric constant materials (high K) have attracted a great deal of interest because of the dramatic scaling down of DRAM capacitor reaching its physical limit in terms of reduction of thickness. Among high-K materials that can replace silicon dioxide, tantalum pentoxide (Ta2O5) thin film, with their high dielectric constant (∼25) and good step coverage, is the candidate of choice.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.527-528
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• 2010

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.28-33
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• 1995

TiN 박막은 저온(<$500^{\circ}C$), 저압(1Torr)에서 Tetrakis(diethylamido)titanium[TDEAT, Ti(NEt2)4]single precursor를 사용하여 증착하였다. 증차고딘 박막은 SEM(Scanning Electron Microscopy)으로 surface morphology와 step coverage를 측정하였고, TEM(Transmission Electron Microscopy)분석결과 microcrystalline의 TiN을 확인하였다. XPS(X-ray Photoelectron Spectroscopy)분석결과에 따르면 $200-500^{\circ}C$구간에서는 $\beta$-hydogen elimination에 의한 반응이 일어나고 $600-700^{\circ}C$구간에서는 thermal decomposition에 의한 반응이 일어나고 있음을 알 수 있다. Carbon과 oxygen의 농도는 AES(Auger Electron Spectroscopy)를 사용하여 측정하였으며 온도가 감소할수록 carbon의 농도가 감소하는 경향을 보여주고 있다.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.190-197
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• 1992

In this study we have investigated physical and electrical properties of high temperature oxide (HTO) thin film using dichlorosilane (DCS) gas. This film had low etch rate and excellent step coverage, and its characteristics of Si-O bond were similar to those of thermal oxide. I-V curves also showed similar electrical properties to those of thermally grown oxide (SiO2) while time dependent dielectric breakdown (TDDB) results revealed 1/4 value of thermal oxide. However, defect density was measured to be much lower value than that of thermal oxide.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.989-992
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• 2004

PEMBE(plasma enhanced molecular beam epitaxy)방법으로 성장된 GaN 박막의 초기 거동현상을 실시간 X-선 산란을 이용하여 관찰하였다. 표면이 원자 계단(atomic step)을 이루고 있는 사파이어 기판 위에 성장하는 GaN 박막은 layer-by-layer 모드로 성장 후 3D 모드로 성장을 하였다. 거친 표면을 가진 사파이어 기판 위에 성장하는 GaN 박막은 성장 초기는 표면을 평평하게 만든 후, 3D 모드로 성장하였다. 플라즈마로 생성된 이온화된 질소는 표면의 에너지를 변화시켜 GaN 박막의 증착을 증진시키고, 표면의 coverage를 증가시킨다.

• Communications for Statistical Applications and Methods
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• v.24 no.1
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• pp.29-41
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• 2017

The estimation problem of expected time to failure of units is studied in a discrete set up. A simple step-stress accelerated life testing is considered with a Type-I censored sample from geometric distribution that is a commonly used distribution to model the lifetime of a device in discrete case. Maximum likelihood estimators as well as the associated distributions are derived. Exact, approximate and bootstrap approaches construct confidence intervals that are compared via a simulation study. Optimal confidence intervals are suggested in view of the expected width and coverage probability criteria. An illustrative example is also presented to explain the results of the paper. Finally, some conclusions are stated.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.170-170
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• 1999

We studied Nb growth mode on Cu(100) surface by scanning tunneling microscopy (STM) at room temperature. Nb/Cu is immiscible at room temperature and thus is an ideal system for studying surface alloy formation. Initially deposited Nb atoms are incorporated subsurface on Cu(100). After annealing, they are preferentially found at step edges and appear as bright dots surrounded by dark rings. Ordering emerges from step edges as annealed. Ordered ({{{{ SQRT { 5} }$\times${{{{ SQRT { 5} }}}})R 26.6$^{\circ}$phase Nb structure is formed at $\theta$<0.2ML after annealing to 50$0^{\circ}C$. At higher coverage, $\theta$>0.25, annealing leads to p(2$\times$2) phase. due to large mismatch in lattice parameters, the domain is limited to a few tens of nm2. Growth kinetics of the system will be discussed.

• Transactions of the Korean Society of Automotive Engineers
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• v.5 no.6
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• pp.36-43
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• 1997

To cope with quest to improve the fuel economy and vehicle performance, Continuously Variable Transmission with Changing the speed ratio between minimum and maximum ratio by infinite step, is more efficient than conventional multi-ratio transmission. In this paper, to investigate a specific CVT shift ratio diagram and CVT shift characteristics, CVT vehicle was tested on the proving ground and chassis dynamometer. The test results are as follows; CVT can obtain the excellent vehicle performance and fuel economy changing the shift ratio by infinite step, without rapid change of engine revolution and driving force. And CVT can set up a special shift range that obtains not only the engine brake effect but also the maximum speed driving.

• Journal of the Korean Institute of Telematics and Electronics
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• v.24 no.1
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• pp.85-90
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• 1987

Trench capacitors with four different structures were fabricated using plasma and reactive ion etching technique, and evaluated using their C-V and I-V characteristics. The results shows that the two step plasma etching technique is the best method to fabricate the trench capacitor because of its high breakdown field (~7.75 MV/Cm) and good step coverage. And the fixed oxide charges are comparable between the trench (3.6xE10/Cm\ulcorner~7.5xE10/Cm\ulcorner and the planar(4.5xE10/Cm\ulcorner~6.5E10/Cm\ulcorner capacitors.

• Journal of the Korean Vacuum Society
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• v.4 no.2
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• pp.142-149
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• 1995

본 연구에서는 새로운 장전자 방출법(DOFEC법)으로 W(210)면의 수소 흡착에 의한 일함수의 변화, heat of desorption에 대하여 연구하였다. 텅스텐(210)면에 수소가 흡착될 때 흡착율에 따라 일함수가 증가하다가 다시 감소하는데 이것은 수소가 처음에는(210)면의 step((100)면)에 흡착되고 dose를 증가시킴에 따라 terrace((110)면)에 흡착되기 때문임을 알았다. 즉, terrace보다 step의 sticking coefficient가 더 크며 zero coverage에서의 그 비는 2.57이며 이는 타 연구 결과와 잘 일치한다. (210)면의 step과 terrace의 수소 흡착에 대한 일함수의 정량적인 변화량 그리고 수소 dose량에 대한 각각의 면에 대한 상대적인 흡착율을 얻었으며, 이 결과는 독립된(110)면 또는 (100)면의 결과와 잘 일치됨을 알았다. 또한 이 결과는 흡착 실험에 있어서 dose량을 흡착률로 환산하는데 사용될 수 있다. 텅스텐(210)면에는 4개의 흡착 site가 존재하며 이 site들 중 $\beta$2과 $\beta$4 state는 second order 탈착 과정을 따르며 $\beta$1과 $\beta$3 state는 first order 탈착과정을 따른다. 따라서 텅스텐(210)면에는 수소가 해리적 흡착을 함과 동시에 비해리적 흡착도 함을 알았으며(210)면의 각 흡착 site를 이에 대응되는 (100)면과 (110)면의 흡착 site와 비교 검토하였다.