• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.307-310
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• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS(Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 $\sim$ 90 nm was achieved at 7.1 mA/cm$^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 cm$^{-1}$. PL shows the band gap enegry of thin film(2.5 eV) and porous 3C-SiC(2.7 eV).

• Transactions on Electrical and Electronic Materials
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• v.15 no.6
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• pp.305-308
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• 2014

Organosilyl-modified and star-shaped poly (${\varepsilon}$-caprolactone) (m-PCL) was prepared, and added to polymethylsilsesquioxane (PMSSQ), to make composites. The end groups of m-PCL are chemically similar to PMSSQ, and m-PCL mixed well with PMSSQ in the composite. Porous PMSSQ film was made by further calcination of the composite film at elevated temperature. m-PCL-templated PMSSQ and the as-prepared porous PMSSQ were structurally, optically, and thermally characterized in thin films. The chemical binding of m-PCL and PMSSQ effectively suppressed the phase separation of PMSSQ and m-PCL during the curing process. After calcination at elevated temperature, there remained many pores in the PMSSQ matrix. The refractive indices of the resulting porous PMSSQ thin films decreased with increase of the film porosities, depending on the initial m-PCL loadings.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.801-806
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• 2003

In recent years, there has been large interest in the fabrication of the self organized nanoscale structures since not only their potential utilization in electronic, optoelectronic, and magnetic devices but also their fundamental interest such as uniformity and regularization. An attractive candidate of these materials is anodic porous alumina film(Al$_2$O$_3$) which is formed by the anodization of aluminum in an appropriate acid solution. In this study to fabricate the porous alumina film with very uniform and nearly parallel pores the anodization was carried out under constant voltage mode in 0.3M oxalic acid as an electrolyte. The hexagonally ordered arrays with a few $\mu\textrm{m}$ in size two-dimensional polycrystalline structure were obtained of which pore densities were 1.1${\times}$10$\^$10//$\textrm{cm}^2$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.45-45
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• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS (Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 ~ 90 nm was achieved at 7.1 $mA/cm^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 $cm^{-1}$. PL shows the band gap enegry of thin film (2.5 eV) and porous 3C-SiC (2.7 eV).

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.5
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• pp.459-467
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• 2005

The effect of anti freezing solution liquid film on the frost prevention is experimentally investigated. It is desirable that the antifreezing solution spreads widely on the heat exchanger surface forming thin liquid film to prevent frost nucleation and reduce the thermal resistance across the film. A porous layer coating technique is adopted to improve the wettedness of the anti freezing solution on a parallel plate heat exchanger. The antifreezing solution spreads widely on the heat exchanger surface with 100 $\mu$m thickness by the capillary force resulting from the porous structure. It is observed that the antifreezing solution liquid film prevents a parallel plate heat exchanger from frosting. The reductions of heat and mass transfer rate caused by thin liquid film are only $1\~2\%$ compared with those for non-liquid film surface.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.518-526
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• 2006

Nanoporous alumina film was fabricated by anodization of an aluminum sheet. Highly ordered nanowellstructured and nanonets-tructured metal films were fabricated by vacuum evaporation of several metals(Al, Sn, and Co) using the anodic nanoporous alumina film as a template. In this experiment, an anodic porous alumina film with the cell size of 100 nm and the pore diameter of 60 nm was used. The resistance heating method was adopted for evaporating a desired metal, and vapor deposition was carried out under the base pressure of torr. It was founded that whether the structure fabricated by vacuum evaporation is nanowell or nanonet is dependent on the amount of deposited material. When an anodic porous alumina film with the cell size of 100 nm and the pore diameter of 60 nm was used, a nanowell-structured film was fabricated when a sufficient amount of metal was suppled to cover the surface pores. On the other hand, nanonet-structured film was fabricated bellow a half the amount of metal required for nanowell-structured film.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.385-391
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• 2015

In this paper, we propose a new method to infiltrate $Fe_3O_4$-nanoparticles into a porous silicon film and a monitoring technique to detect packing density of nanoparticles within the film. Recently, research to use porous silicon as a drug carrier or a new functional sensor material by infiltrating $Fe_3O_4$-nanoparticles has been extensively performed. However, it is still necessary to enhance the packing density and to develop a monitoring technique to detect the packing density in real time. In this light, we forcibly injected a nanoparticle solution into a rugate-structured free-standing porous silicon (FPS) film by applying a pressure difference between the two sides of the film. We found that the packing density by the pressure-infiltration method proposed in this paper is enhanced, relative to that by the previous diffusion method. Moreover, a continuous shift in wavelength of the rugate reflectance peak measured from the film surface was observed while the nanoparticle solution was being injected. By exploiting this phenomenon, we could qualitatively monitor the packing density of $Fe_3O_4$-nanoparticles within the FPS film with the injection volume of the nanoparticle solution.

• Journal of Sensor Science and Technology
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• v.17 no.5
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• pp.329-337
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• 2008

Simple, small and portable oxygen sensors were fabricated by tape casting technique. Yttria stabilized zirconia containing cordierite ceramics (YSZC) were used as a porous diffused layer of oxygen in pumping cell. Yttria stabilized zirconia (YSZ) solid electrolyte, YSZC porous diffusion layer and heater-patterned ceramic sheets were prepared by co- firing method. Limit current characteristics and the linear relationship of current to oxygen concentration were observed. Viscosity variation of the slurries both YSZ and YSZC showed a similar behavior, but micro pores in the fired sheet were increased with increasing of the cordierite amount. Molecular diffusion was dominated due to the formation of large pores in porous diffusion layer. The plateau range of limit current in porous-type oxygen sensor was narrow than the one of aperture-type oxygen sensor. However limit current curve was appeared in porous-type oxygen sensor even at the lower applied voltage. The plateau range of limit-current was widen as increasing the thickness of porous diffusion layer of the YSZ containing cordierite. Measuring temperature of $600{\sim}650^{\circ}C$ was recommended for limit-current oxygen sensor. Porous diffusion layer-type oxygen sensor showed faster response than the aperture-type one and was stable up to 30 days running without any crack at interface between the layers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.328-328
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• 2007

$SnO_2$ has a high potential for electric and electronic applications. We have anodized pure tin metal and nano porous tin oxide film was obtained on pure Sn. Nano porous tin oxide were grown by anodization in nonaqueous-base electrolytes at different potentials between 5 V and 100 V. Pore size of ~100nm was observed by FE-SEM. Pore sizes as a function of applied voltage and anodizing time were characterized. We obtained nano porous tin oxide film having an uniform pore size at low temperature. High specific surface area of $SnO_2$ will be very useful for gas sensor, lithium battery, and dye sensitized solar cell.

• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.451-455
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• 2021

Porous copper bromide (CuBr) films are highly advantageous for detecting ammonia (NH₃). The fabrication of porous CuBr films requires complex high-temperature processes or multistep processes. Herein, we report the uncomplicated preparation of porous CuBr films by a spin-coating method and the films' excellent NH₃ sensing properties. The porous films were prepared by spin-coating 100, 150, and 200 mM CuBr solutions, and then dried in a vacuum oven for 2 h. All the films showed a high NH₃ response; in particular, the film prepared using a 100 mM CuBr solution showed an extremely high response (resistance ratio = 852) to 5 ppm NH₃. The film also showed fast response and recovery times, 272 s and 10 s respectively, even at room temperature. The outstanding NH₃ sensing characteristics were explained in relation to the porosity and thickness of the prepared films. The high-performance NH₃ sensors used in this study can be used for both indoor air quality and environmental monitoring applications.