• Proceedings of the KIEE Conference
• /
• 2004.11a
• /
• pp.20-22
• /
• 2004

유기 EL(Organic Light Emitting diode : OLED)은 자체발광 소자로서 액정 디스플레이(Liquid Crystal Display)에 비해 빠른 응답속도, 넓은 시야각 등의 뛰어난 화질 표현이 가능하다. 구동 박막 트랜지스터(TFT)의 전류가 OLED의 휘도를 결정하므로, 고품질의 영상을 위해 미세한 TFT 전류 조절 능력이 매우 중요하다. 비정질 실리콘(a-Si) TFT는 그레인 구조를 갖는 다결정 실리콘(poly-Si) TFT에 비해 균일한 전기적 특성을 나타내지만, 장시간 구동에 따른 문턱전압의 열화가 발생한다. 본 논문에서는 상기의 문제점을 최소화하기 위하여 positive bias에 의한 열화를 negative bias로 어닐링하는 구동방법을 제안하였다. 본 회로는 2개의 게이트 선택 신호와 6개의 a-Si TFT로 이루어져 있다. 실험 결과를 통해 추출된 소자 parameter를 바탕으로 제안된 회로의 simulation을 수행 및 검증하였다. 본 회로는 a-Si TFT에서 발생하는 문턱전압 열화 등의 신뢰성 문제를 감소시킨다.

• Journal of the Institute of Electronics Engineers of Korea TE
• /
• v.37 no.2
• /
• pp.12-16
• /
• 2000

The electrical characteristics of n-channel LDD structured poly-Si TFT's have been systematically investigated. It have been found that the LDD regions act as the effect of series resistance and reducing the electric field. Kink effect is disappeared and off current is greatly reduced, while on current is slightly reduced. On/off current ratio graph shows that LDD device's switching characteristic is better than that of conventional device. As a result of study, it is concluded that the effect of electric field's reduction is more dominant than that of series resistance.

• Proceedings of the KIEE Conference
• /
• 1996.07c
• /
• pp.1443-1445
• /
• 1996

Hydrogen passivation enhances the electrical characteristics of poly-Si TFT(Thin Film Transistor). However, the weak Si-H bonds, generated during hydrogenation, degrade the stability of the device. So, we carried out the passivation treatment with $NH_3$ or $N_2$. We compared the effect of $NH_3$ or $N_2$ passivation treatments with that of hydrogenation in terms of stability. Through the $NH_3$ passivation treatment, we obtained the most improved subthreshold swing of 1.2V/decade from the initial subthreshold swing of 1.56V/decade. When electrical stress was given, the $NH_3$ passivated devices showed best electrical stability.

• Journal of Information Display
• /
• v.1 no.1
• /
• pp.25-28
• /
• 2000

We propose a new in-situ fluorine passivation of poly-Si TFTs using excimer laser annealing to reduce the trap state density and improve reliability significantly. To investigate the effect of an in-situ fluorine passivation, we have fabricated fluorine-passivated p-channel poly-Si TFTs and examined their electrical characteristics and stability. A new in-situ fluorine passivation brought about an improvement in electrical characteristic. Such improvement is due to the formation of stronger Si-F bonds than Si-H bonds in poly-Si channel and $SiO_2$/Poly-Si interface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1993.11a
• /
• pp.64-66
• /
• 1993

The charateristics of low temperature poly-Si thin films with different growth condition were investigated and poly-Si TFTs were fabricated on solid phase crystallized (SPC) amorphous silicon films and as-deposited poly-Si films. The performance of devices fabricated on the SPC amorphous silicon films was shown to be superior to that of devices fabricated on as-deposited poly-Si films. It was found that the characteristics of low-temperature poly-Si thin films such as surface roughness, crystal texture and grain size strongly influenced the poly-Si TFT performance.

• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.30A no.10
• /
• pp.51-58
• /
• 1993

N-channel TFTs fabricated on the pre-amorphized (by Si ion implantation) and recrystallized Si film having 10.1V threshold voltage, 20.7cm$^{2}$/V$\cdot$s field effect mobility and ~10$^{5}$/ ON/OFF ratio, whowed improved characteristics comparing to those obtained from the as-deposited (by LPCVD) poly Si film which had 11.2V, 9cm$^{2}$/V$\cdot$s and ~10$^{4}$ respectively.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2004.08a
• /
• pp.95-97
• /
• 2004

We studied a low temperature ion doping process for poly-Si Thin Film Transistor (TFT) on plastic substrates. The ion doping process was performed using an ion shower system, and subsequently, excimer laser annealing (ELA) was done for the activation. We have studied the crystallinity of Si surface at each step using UV-reflectance spectroscopy and the sheet resistance using 4-point probe. We found that the temperature has increased during ion shower doping for a-Si film and the activation has not been fulfilled stably because of the thermal damage against the plastic substrate. By trying newly a pulsed ion shower doping, the ion was efficiently incorporated into the a-Si film on plastic substrate. The sheet resistance decreased with the increase of the pulsed doping time, which was corresponded to the incorporated dose. Also we confirmed a relationship between the crystallinity and the sheet resistance. A sheet resistance of 300 ${\Omega}$/sq for the Si film of 50nm thickness was obtained with a good reproducibility. The ion shower technique is a promising doping technique for ultra low temperature poly-Si TFTs on plastic substrates as well as those on glass substrates.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2007.08b
• /
• pp.1263-1265
• /
• 2007

The electrical characteristics of low temperature poly-Si (LTPS) thin-film transistors (TFT) with channel parallel and perpendicular to the direction of lateral growth were studied. The poly-Si film was crystallized using sequential lateral solidification (SLS) laser crystallization technique. The channel orientation dependent turn-on characteristics were investigated by using gated-diodes and capacitance-voltage measurements

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1993.11a
• /
• pp.55-59
• /
• 1993

In this study, we developed new process for doping poly-Si film. Sb(antimony) thin film was used as doping source. Sb was evaporated on poly-Si film deposited by LPCVD fallowed by annealing. We investigate sheet resistance variation with annealing temperature and time. Finally we adapted this process to poly-Si TFT fabrication.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07b
• /
• pp.897-897
• /
• 2005

We report QLA (Quenching-rate controlled Laser Annealing) system as new concept using pulsed DPSSL and CW lasers. This process can control temperature quenching-rate of poly-Si crystallization by additional CW laser and fabricate high quality poly-Si with faster scanning speed than conventional processes. In this paper, QLA system, the experimental results and theoretical discussion will be introduced.