• 센서학회지
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• 제31권5호
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• pp.279-285
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• 2022

Recently, 3D printing technology has gained increased attention in the manufacturing industry because it allows the manufacturing of complex but sophisticated structures as well as moderate production speed. Owing to advantages of 3D printers, such as flexible design, customization, rapid prototyping, and ease of access, can also be advantageous to sensor developments, 3D printing demands have increased in various active device fields, including sensor manufacturing. In particular, 3D printing technology is of significant interest in tactile sensor development where piezoelectric materials are typically embedded to acquire voltage signals from external stimuli. In regard with piezoelectricity, researchers have worked with various piezoelectric materials to achieve high piezoelectric response, but the structural approach is limited because ceramics have been regarded as challenging materials for complex design owing to their limited manufacturing methods. If appropriate piezoelectric materials and approaches to design are used, sensors can be fabricated with the improved piezoelectric response and high sensitivity that cannot be found in common bulk materials. In this study, various 3D printing technologies, material combinations, and applications of various piezoelectric sensors using the 3D printing method are reviewed.

• 센서학회지
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• 제28권2호
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• pp.106-112
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• 2019

Flexible impact force sensors composed of piezoelectric PZT/PDMS composite sandwiched between Al/PET films were fabricated and their voltage signal characteristics were evaluated under varying impact forces for electronic mitt applications. The piezoelectric impact force sensor on an ethylene-vinyl acetate (EVA) substrate exhibited an output voltage difference of no greater than 40 mV a periodical impact test in with the impact load was increased by as much as 240 N by a restoration time of 5 s in a five-time experiment, implying good sensing ability. Moreover, the impact force sensor embedded four electronic mitts showed a reliable sensitivity of less than 1 mV/N and good repeatability under 100 N-impact force during a cycle test executed 10,000 times. This indicated that the fabricated flexible piezoelectric impact sensor could be used in electronic mitt applications. However, the relatively low elastic limit of substrate material such as EVA or poly-urethane slightly deteriorated the sensitivity of the impact sensor embedded electronic mitt at over 200 N-impact forces.

• 한국군사과학기술학회지
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• 제12권4호
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• pp.491-499
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• 2009

The determination of response characteristics for pressure sensors is routinely limited to static calibration against a deadweight pressure standard. The strength of this method is that the deadweight device is a primary standard used to generate precise pressure. Its weakness lies in the assumption that the static and dynamic responses of the sensor in question are equivalent. Differences in sensor response to static and dynamic events, however, can lead to serious measurement errors. Dynamic techniques are required to calibrate pressure sensors measuring dynamic events in milliseconds. In this paper, a dynamic calibration using negative going dynamic pressure is proposed to determine dynamic pressure response for piezoelectric sensors. Sensitivity and linearity of sensor by the dynamic calibration were compared with those by the static calibration. The uncertainty of calibration results and the goodness of fit test of linear regression analysis were presented. The results show that the dynamic calibration is applicable to determine dynamic pressure response for piezoelectric sensors.

• 제어로봇시스템학회논문지
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• 제3권4호
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• pp.343-349
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• 1997

In a lightly damped cantilever beam, most of the vibration energy is found around natural frequencies. Based on this, a phase delay control for suppressing vibration of the beam is proposed in this paper. This controller is designed to behave like a velocity feedback controller at the frequencies of modes to be controlled. Also, this controller is designed in consideration with uncontrolled modes for robust stability and improving of the sensitivity function of the control system. This phase delay control is applied to vibration suppression of a cantilever beam with a pair of a piezoelectric actuator and a piezoelectric sensor. Experimental results showed that the phase delay control functions efficiently.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• 동력기계공학회지
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• 제21권4호
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• pp.51-56
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• 2017

The purpose of this study is to suggest economic analysis for piezoelectric power. Economic analysis method uses california standard test. Perspectives of california standard test is participant test, ratepayer impact measure test, program administrator cost test and total resource cost test. This study identifies the cost and benefit components. This study identifies benefit-cost calculation procedures from four test : participant test, ratepayer impact measure test, program administrator cost test and total resource cost test. In the economic analysis, the order of benefit cost ratio in piezoelectric power shows total resource cost test, program administrator cost test, ratepayer impact measure test and participant test.

• 센서학회지
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• 제31권5호
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• pp.293-300
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• 2022

Flexible, wearable, and implantable electronic sensors have started to gain popularity in improving the quality of life of sick and healthy people, shifting the future paradigm with high sensitivity. However, conventional technologies with a limited lifespan occasionally limit their continued usage, resulting in a high cost. In addition, traditional battery technologies with a short lifespan frequently limit operation, resulting in a substantial challenge to their growth. Subsequently, utilizing human biomechanical energy is extensively preferred motion for biologically integrated, self-powered, functioning devices. Ideally suited for this purpose are piezoelectric energy harvesters. To convert mechanical energy into electrical energy, devices must be mechanically flexible and stretchable to implant or attach to the highly deformable tissues of the body. A systematic analysis of piezoelectric nanogenerators (PENGs) for personalized healthcare is provided in this article. This article briefly overviews PENGs as self-powered sensor devices for energy harvesting, sensing, physiological motion, and healthcare.

• Transactions on Electrical and Electronic Materials
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• 제13권5호
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.354-360
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• 1999

PCN-PZT piezoelectric acceleration sensors of annular shear mode voltage type were fabricated and their characteristics have been investigated. Field tests are also carried out. To avoid noise problems from the environmental conditions, acceleration sensors employed solid state micro-electronics for pre-amplifier. The calibration procedures based on the principle of the comparison method were adopted for investigating the characteristics of fabricated acceleration sensors. The voltage sensitivity and resonant frequency of fabricated acceleration sensors were 83mv/g, 23kHz, respectively. The lower and upper frequency limit were 4Hz and 9kHz, respectively. The variation of the voltage sensitivity showed 10% at $-406{\circ}C\; and\; 9%\; at\; 121^{\circ}C$ compared to that of reference temperature at $40^{\circ}C$.