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http://dx.doi.org/10.4313/TEEM.2012.13.5.215

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot  

Okuyama, Masanori (Institute for NanoScience Design, Osaka University)
Yamashita, Kaoru (Graduate School of Science and Technology, Kyoto Institute of Technology)
Noda, Minoru (Graduate School of Science and Technology, Kyoto Institute of Technology)
Sohgawa, Masayuki (Graduate School of Engineering Science, Osaka University)
Kanashima, Takeshi (Graduate School of Engineering Science, Osaka University)
Noma, Haruo (Advanced Telecommunications Research Institute International)
Publication Information
Transactions on Electrical and Electronic Materials / v.13, no.5, 2012 , pp. 215-220 More about this Journal
Abstract
Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.
Keywords
Ultrasonic sensor; Tactile sensor; MEMS; PZT thin film; Piezoelectric; Object detection; Piezoresitive; Normal stress; Shear stress; Diaphragm; Cantilever; Grip; Touch; PDMS;
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