• 한국소음진동공학회논문집
• /
• 제12권3호
• /
• pp.187-194
• /
• 2002

A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural motional equations and the conjugate parameters. Overall impedance matrix of AFM cantilever can be obtained by combining two impedance matrices of the covered and the non-covered. she resonance and antiresonance frequencies and the effective electromechanical coupling factors are calculated using the derived matrices. The results and the three dimensional finite element solutions are compared with the experimental results in other publication.

• 센서학회지
• /
• 제19권4호
• /
• pp.313-319
• /
• 2010

Vibration energy harvesting is an attractive technique for potential powering of low power devices such as wireless sensors and portable electronic applications. Most energy generator developed to date are single vibration frequency based, and while some efforts have been made to broaden the frequency range of energy harvester. In this work, The effect of energy harvesting were investigated at various vibration frequencies, vibration beams, vibration point and test masses. The maximum output voltage of the bimorph piezoelectric cantilever was shifted according to vibration point. Vibration frequency with maximum output voltage decreased with the increasing length of vibration beam and increasing test mass. The sample with vibration beam length 0.5 L generated a peak output voltage of 32 $V_{rms}$ and shows a 45 % increase in voltage output in comparison to the corresponding original bimorph. It was found that a piezoelectric bimorph has a possibility to be as the energy harvesting cantilever, which is successfully tuned over a vibration frequency range to enable a maximum harvesting energy.

• Smart Structures and Systems
• /
• 제5권5호
• /
• pp.547-564
• /
• 2009

Based on the theory of piezoelasticity, an analytical solution for a typical multilayer piezoelectric composite cantilever is obtained by the Airy function method. The piezoelectric cantilever may consist of any number of layers. Moreover, the material and thickness for different layers may be different. The solution obtained in the present paper is concise and can be easily applied for the bending analysis of multilayer piezoelectric actuators considering the effect of bonding layers and electrodes. At last, a comprehensive parametric study is conducted to show the influence of electromechanical coupling (EMC), the number of piezoelectric layers, the elastic modulus of elastic layer and the thickness ratio on the bending behavior of actuators. Some interesting results for the design of multilayer piezoelectric actuators are presented.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.1513-1514
• /
• 2011

• 한국전기전자재료학회논문지
• /
• 제29권12호
• /
• pp.769-775
• /
• 2016

Characteristics of a wireless sensor powered by the IDE (interdigitated electrode) embedded piezoelectric cantilever generator were analyzed in order to evaluate its potential for use in wireless sensor applications. The IDE embedded piezoelectric cantilever was designed and fabricated to have a self-resonance frequency of 126 Hz and acceleration of 1.57 G, respectively, for the mechanical resonance with a practical conveyor system in a thermal-power plant. It produced maximum output power of 2.81 mW under the resistive load of $160{\Omega}$ at 126 Hz. The wireless sensor module is electrically connected to a rectifier capacitor with capacity of 0.68 farad and 3.8 V for power supply by the piezoelectric cantilever generator. The unloaded capacitor could be charged as a rate of approximately $365{\mu}V/s$ while the capacitor exhibited that of 0.997 mV/min. during communication under low duty cycle of 0.2%. Therefore, it is considered that the fabricated IDE embedded piezoelectric cantilever generator can be used for wireless sensor applications.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
• /
• pp.152-153
• /
• 2007

This paper describes a resonant driving piezoelectric micro cantilever practicable to ultrasound thrombolysis device for the treatment of ischemic stroke. The proposed piezoelectric cantilever was designed to be a unimorph structure of Si/$SiO_2$/Ti/Pt/PZT/Pt, and fabricated by top-down sequence etching process. The red blood cell (RBC) lysis experiment was carried out to confirm the usability of the proposed cantilever. Total 87.76 % of RBCs were ruptured using the ultrasound generated by up-down actuations of the fabricated cantilever with AC voltage having the frequency of 19.36 Hz and the magnitude of $30V_{p-p}$.

• 한국전기전자재료학회논문지
• /
• 제34권2호
• /
• pp.90-98
• /
• 2021

Piezoelectric ceramic fiber composite (PCFC) was fabricated using a planar electrode printed piezoelectric ceramic fiber driven in transverse mode for small-scale wind energy harvester applications. The PCFC consisted of an epoxy matrix material and piezoelectric ceramic fibers sandwiched by interdigitated electrode (IDE) patterned polyimide films. The PCFC showed an excellent mechanical performance under a continuous stress. For the fabrication of PCB cantilever harvester, five -PCFCs were vertically attached onto a flexible printed circuit board (PCB) substrate, and then PCFCs were serially connected through a printed Cu circuit. The energy harvesting performance was evaluated applying an inverted structure, which imples its free leading edge located at an open end but the trailing edge at a clamped end, to enhance strain energy in a wind tunnel. The output voltage of the PCB cantilever harvester was increased as the wind speed increased. The maximum output power was 17.2 ㎼ at a resistance load of 200 ㏀ and wind speed of 9 m/s. It is considered that the PCB cantilever energy harvester reveals a potential use for wind energy harvester applications.

• Transactions on Electrical and Electronic Materials
• /
• 제18권2호
• /
• pp.78-88
• /
• 2017

Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

• Smart Structures and Systems
• /
• 제30권3호
• /
• pp.239-243
• /
• 2022

We investigate the influence of nonlinear viscoelastic damping on the response of a cantilever sensor covered by piezoelectric layers in a symmetric or asymmetric configuration. We formulate an initial-boundary-value problem which consistently incorporates both geometric and material nonlinearities including the effect of viscoelastic damping which cannot be ignored for micro- and nano-mechanical sensor operation in a vacuum environment. We employ an asymptotic multiple-scales methodology to yield the system nonlinear frequency response near its primary resonance and employ a model-based estimation procedure to deduce the system damping backone curve from controlled experiments in vacuum. We discuss the effect of nonlinear damping on sensor applications for scanning probe microscopy.

• 센서학회지
• /
• 제14권4호
• /
• pp.225-230
• /
• 2005

This paper describes a novel tip position sensor made of a triangularly shaped piezoelectric PVDF (polyvinylidene fluoride) film for a cantilever beam. Due to the boundary condition of the cantilever beam and the spatial sensitivity function of the sensor, the charge output of the sensor is proportional to the tip position of the beam. Experimental results with the PVDF sensor were compared with those using two commercially available position sensors: an inductive sensor and an accelerometer. The resonance frequencies of the test beam, measured using the PVDF sensor, matched well with those measured with the two commercial sensors and the PVDF sensor also showed good coherence over wide frequency range, whereas the inductive sensor became poor above a certain frequency.