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http://dx.doi.org/10.5050/KSNVN.2002.12.3.187

Analysis of Dynamic Behavior of Piezoelectric Atomic Force Microscope Cantilever  

하성규 (한양대학교 기계공학부)
박성균 (한양대학교 대학원 기계설계학과)
김영호 (한양대학교 대학원 기계설계학과)
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.12, no.3, 2002 , pp. 187-194 More about this Journal
Abstract
A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural motional equations and the conjugate parameters. Overall impedance matrix of AFM cantilever can be obtained by combining two impedance matrices of the covered and the non-covered. she resonance and antiresonance frequencies and the effective electromechanical coupling factors are calculated using the derived matrices. The results and the three dimensional finite element solutions are compared with the experimental results in other publication.
Keywords
Piezoelectrics; Atomic Force Microscope; resonance Frequency; Antiresonance Frequency; Effective Electromechanical Coupling Factor; AFM;
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