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The influence of nonlinear damping on the response of a piezoelectric cantilever sensor in a symmetric or asymmetric configuration

  • Habib, Giuseppe (Department of Applied Mechanics, Budapest University of Technology and Economics) ;
  • Fainshtein, Emanuel (Department of Mechanical Engineering, Technion - Israel Institute of Technology) ;
  • Wolf, Kai-Dietrich (Institute for Security Systems, University of Wuppertal) ;
  • Gottlieb, Oded (Department of Mechanical Engineering, Technion - Israel Institute of Technology)
  • Received : 2022.05.13
  • Accepted : 2022.06.09
  • Published : 2022.09.25

Abstract

We investigate the influence of nonlinear viscoelastic damping on the response of a cantilever sensor covered by piezoelectric layers in a symmetric or asymmetric configuration. We formulate an initial-boundary-value problem which consistently incorporates both geometric and material nonlinearities including the effect of viscoelastic damping which cannot be ignored for micro- and nano-mechanical sensor operation in a vacuum environment. We employ an asymptotic multiple-scales methodology to yield the system nonlinear frequency response near its primary resonance and employ a model-based estimation procedure to deduce the system damping backone curve from controlled experiments in vacuum. We discuss the effect of nonlinear damping on sensor applications for scanning probe microscopy.

Keywords

Acknowledgement

The research described in this paper was supported in part by the Israel Science Foundation (Grant no. 136/16). O.G. was partially supported by the Henri Garih Chair in Mechanical Engineering. E.F. and K.W. acknowledge the support of their Technion graduate studies and postdoctoral fellowships, respectively.

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