• Title/Summary/Keyword: physical vapor deposition

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Solid State Cesium Ion Beam Sputter Deposition

  • Baik, Hong-Koo
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.5-18
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    • 1996
  • The solid state cesium ion source os alumino-silicate based zeolite which contains cerium. The material is an ionic conductor. Cesiums are stably stored in the material and one can extract the cesiums by applying electric field across the electrolyte. Cesium ion bombardment has the unique property of producing high negative ion yield. This ion source is used as the primary source for the production of a negative ion without any gas discharge or the need for a carrier gas. The deposition of materials as an ionic species in the energy range of 1.0 to 300eV is recently recognized as a very promising new thin film technique. This energetic non-thermal equilibrium deposition process produces films by “Kinetic Bonding / Energetic Condensation" mechansim not governed by the common place thermo-mechanical reaction. Under these highly non-equilibrium conditions meta-stable materials are realized and the negative ion is considered to be an optimum paeticle or tool for the purpose. This process differs fundamentally from the conventional ion beam assisted deposition (IBAD) technique such that the ion beam energy transfer to the deposition process is directly coupled the process. Since cesium ion beam sputter deposition process is forming materials with high kinetic energy of metal ion beams, the process provider following unique advantages:(1) to synthesize non thermal-equilibrium materials, (2) to form materials at lower processing temperature than used for conventional chemical of physical vapor deposition, (3) to deposit very uniform, dense, and good adhesive films (4) to make higher doposition rate, (5) to control the ion flux and ion energy independently. Solid state cesium ion beam sputter deposition system has been developed. This source is capable of producing variety of metal ion beams such as C, Si, W, Ta, Mo, Al, Au, Ag, Cr etc. Using this deposition system, several researches have been performed. (1) To produce superior quality amorphous diamond films (2) to produce carbon nitirde hard coatings(Carbon nitride is a new material whose hardness is comparable to the diamond and also has a very high thermal stability.) (3) to produce cesiated amorphous diamond thin film coated Si surface exhibiting negative electron affinity characteristics. In this presentation, the principles of solid state cesium ion beam sputter deposition and several applications of negative metal ion source will be introduced.

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Deposition uniformity of 7 wt% YSZ as a thermal barrier coating with different configurational arrangement for turbine blade shape mock-up by electron beam physical vapor deposition (터빈블레이드 형상 mock-up의 기하학적 배치조건에 따른 전자빔 물리기상증착법으로 제조된 7 wt% YSZ 열차폐 코팅의 코팅 균일성)

  • Oh, Yoon-Suk;Chae, Jung-Min;Ryu, Ho-lim;Han, Yoon-Soo;An, Jong-Kee;Son, Myung-Sook;Kim, Hong-Kyu
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.6
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    • pp.308-316
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    • 2019
  • Electron beam physical vapor deposition (EBPVD) is a conventional method to fabricate thermal barrier coating (TBC) of high temperature airfoil engine parts, such as blade etc. for its high temperature structural stability from the nature of columnar growth behavior. For the high quality of TBC by EBPVD, the structural factors, such as growth behavior, thickness uniformity and so on, should be managed to obtain the coating which satisfied the required specifications of usable level of mechanical and thermal properties. In this study, the growth behavior and structure variations of 7YSZ (7 wt% yttria stabilized zirconia) coatings with different configurational deposition parameters for the specimens which have turbine blade shape mock-up were investigated. Growth behavior of coatings were studied by comparing computational modeling of evaporation behavior with actual deposition process using e-beam source.

Influence of Subsurface Layer on the Indentation Damage Behavior of YSZ Thermal Barrier Coating Layers Deposited by Electron Beam Physical Vapor Deposition (전자 빔 물리적 증착(EB-PVD)법으로 코팅된 YSZ 열차폐층의 압흔손상 거동에 대한 하부층의 영향)

  • Heo, Yong-Suk;Park, Sang-Hyun;Han, In-Sub;Woo, Sang-Kuk;Jung, Yeon-Gil;Paik, Un-Gyu;Lee, Kee-Sung
    • Journal of the Korean Ceramic Society
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    • v.45 no.9
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    • pp.549-555
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    • 2008
  • The thermal barrier coating must withstand erosion when subjected to flowing gas and should also maintain good stability and mechanical properties while it must also protect the turbine component from high temperature, hot corrosion, creep, and oxidation during operation. In this study we investigated the influence of subsurface layer, $Al_2O_3$ or NiCrCoAIY bond coat layer, on the indentation damage behavior of YSZ thermal barrier coating layers deposited by electron beam physical vapor deposition (EB-PVD). The bond coat is deposited using different process such as air plasma spray (APS) or spray of high velocity oxygen fuel (HVOF) and the thickness is varied. Hertzian indentation technique is used to induce micro damages on the coated layer. The stress-strain behaviors are characterized by results of the indentation tests.

Study on The Manufacturing of The Titanium-Alloyed Eyerim (티타늄 합금 안경테홈선 제조에 관한 연구)

  • Kim, Sang-Yeoun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.3
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    • pp.1058-1062
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    • 2011
  • After the design and production of cold rolling to make titanium-alloyed(Gr.9) eyerim, the function of the roller was evaluated. The surface roughness values of the roller of Ra was $0.05{\sim}0.156{\mu}m$ and of Rz was $0.23{\sim}067{\mu}m$. The values showed a satisfactory result compared with the surface roughness values Ra was $0.04{\mu}m$ and Rz was $0.3{\mu}m$ which was measured after barrel polishing for the titanium eyeglasses frame PVD (Physical Vapor Deposition) gilding. As a result of cold rolling of Ti-3Al-2.5V (Half Titanium), the degree of hardness increased to 221Hv, 247Hv(1st), 270Hv(2nd), etc. Therefore, it was found that proper heat treatment and multi-stand rolling process are necessary.

Evaporation Characteristics of Materials from an Electron Beam Evaporation Source (전자빔 증발원을 이용한 물질의 증발 특성)

  • Jeong, J.I.;Yang, J.H.;Park, H.S.;Jung, J.H.;Song, M.A.
    • Journal of the Korean institute of surface engineering
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    • v.44 no.4
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    • pp.155-164
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    • 2011
  • Electron beam evaporation source is widely used to prepare thin films by physical vapor deposition because it is very effective to vaporize materials and there is virtually no limit to vaporize materials including metals and compounds such as oxide. In this study, evaporation characteristics of various metals and compounds from an electron beam evaporation source have been studied. The 180 degree deflection type electron beam evaporation source which has 6-hearth crucibles and is capable of inputting power up to 10 kW was employed for evaporation experiment. 36 materials including metals, oxides and fluorides have been tested and described in terms of optimum crucible liner, evaporation state, stability, and so on. Various crucible liners have been tried to find out the most effective way to vaporize materials. Two types of crucible liners have been employed in this experiment. One is contact type liner, and the other is non-contact type one. It has been tried to give the objective information and the most effective evaporation method on the evaporation of materials from the electron beam evaporation source. It is concluded that the electron beam evaporation source can be used to prepare good quality films by choosing the appropriate crucible liner.

Metallorganic Chemical Vapor Deposition and Characterization of TiO2 Nanoparticles

  • Jung, Oh-Jin;Kim, Sam-Hyeok;Cheong, Kyung-Hoon;Li, W.;Saha, S. Ismat
    • Bulletin of the Korean Chemical Society
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    • v.24 no.1
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    • pp.49-54
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    • 2003
  • TiO₂nanoparticles were synthesized using the metallorganic chemical vapor deposition process. Particles with and without metal ion dopants were obtained. X-ray photoelectron and energy dispersive X-ray spectroscopic measurements confirmed the stoichiometry of the TiO₂nanoparticles. X-ray diffraction patterns showed a polycrystalline anatase structure of TiO₂. Transmission electron microscopy revealed that these particles are of nanoscale dimensions. Exact particle size and size distribution analyses were carried out by dynamic light scattering. The average particle size was determined to be 22 nm. The nanosize particles provided large surface area for photocatalysis and a large number of free surface-charge carriers, which are crucial for the enhancement of photocatalytic activity. To improve the photocatalytic activity, metal ions, including transition metal ions $(Pd^{2+},\;Pt^{4+},\;Fe^{3+})$ and lanthanide ion $(Nd^{3+})$ were added to pure TiO₂nanoparticles. The effects of dopants on photocatalytic kinetics were investigated by the degradation of 2-chlorophenol under an ultraviolet light source. The results showed that the TiO₂nanoparticles with the metal ion dopants have higher photocatalytic activity than undoped TiO₂. The $Nd^{3+}$ ion of these dopant metal ions showed the highest catalytic activity. The difference in the photocatalytic activity with different dopants is related to the different ionic radii of the dopants.

Effect of Diamond-Like Carbon Passivation on Physical and Electrical Properties of Plasma Polymer (플라즈마 폴리머의 물리적, 전기적 특성에서 다이아몬드상 탄소 패시베시션이 미치는 영향)

  • Park, Y.S.;Cho, S.J.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.21 no.4
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    • pp.193-198
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    • 2012
  • In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

Effect of Working Pressure and Substrate Bias on the Tribology Properties of the Cr-Al-N Coatings (Cr-Al-N 코팅의 마찰마모 특성에 미치는 공정압력과 바이어스 전압의 영향)

  • Choi, Seon-A;Kim, Seong-Won;Lee, Sungmin;Kim, Hyung-Tae;Oh, Yoon-Suk
    • Journal of the Korean institute of surface engineering
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    • v.50 no.6
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    • pp.473-479
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    • 2017
  • CrN coatings have been used as protective coatings for cutting tools, forming tools, and various tribological machining applications because these coatings have high hardness. Cr-Al-N coatings have been investigated to improve the properties of CrN coatings. Cr-Al-N coatings were fabricated by a hybrid physical vapor deposition method consisting of unbalanced magnetron sputtering and arc ion plating with different working pressure and substrate bias voltage. The phase analysis of the composition was performed using XRD (x-ray diffraction). Cr-Al-N coatings were grown with textured CrN phase and (111), (200), and (220) planes. The adhesion strength of the coatings tested by scratch test increased. The friction coefficient and removal rate of the coatings were measured by a ball-on-disk test. The friction coefficient and removal rate of the coatings decreased from 0.46. to 0.22, and from $2.00{\times}10^{-12}m^2/N$ to $1.31{\times}10^{-13}m^2/N$, respectively, with increasing bias voltage. The tribological properties of the coatings increased with increasing substrate bias voltage.

Influence of Heat Treatment and Magnesium Content on Corrosion Resistance of Al-Mg Coated Steel Sheet (PVD법에 의해 제작한 Al-Mg 코팅 강판의 내식성에 미치는 Mg 함량 및 열처리의 영향)

  • Kang, Jae Wook;Park, Jun-Mu;Hwang, Sung-Hwa;Lee, Seung-Hyo;Moon, Kyung-Man;Lee, Myeong-Hoon
    • Journal of the Korean institute of surface engineering
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    • v.49 no.2
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    • pp.202-210
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    • 2016
  • This study was intended to investigate the effect of the amount of magnesium addition and heat treatment in the Al-Mg coating film in order to improve corrosion resistance of aluminum coating. Al-Mg alloy films were deposited on cold rolled steel by physical vapor deposition sputtering method. Heat treatment was fulfilled in an nitrogen atmosphere at the temperature of $400^{\circ}C$ for 10 min. The morphology was observed by SEM, component and phase of the deposited films were investigated by using GDLS and XRD, respectively. The corrosion behaviors of Al-Mg films were estimated by exposing salt spray test at 5 wt.% NaCl solution and measuring polarization curves in deaerated 3 wt.% NaCl solution. With the increase of magnesium content, the morphology of the deposited Al-Mg films changed from columnar to featureless structure and particle size was became fine. The x-ray diffraction data for deposited Al-Mg films showed only pure Al peaks. However, Al-Mg alloy peaks such as $Al_3Mg_2$ and $Al_{12}Mg_{17}$ were formed after heat treatment. All the sputtered Al-Mg films obviously showed good corrosion resistance compared with aluminum and zinc films. And corrosion resistance of Al-Mg film was increased after heat treatment.

AREVA NP's enhanced accident-tolerant fuel developments: Focus on Cr-coated M5 cladding

  • Bischoff, Jeremy;Delafoy, Christine;Vauglin, Christine;Barberis, Pierre;Roubeyrie, Cedric;Perche, Delphine;Duthoo, Dominique;Schuster, Frederic;Brachet, Jean-Christophe;Schweitzer, Elmar W.;Nimishakavi, Kiran
    • Nuclear Engineering and Technology
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    • v.50 no.2
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    • pp.223-228
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    • 2018
  • AREVA NP (Courbevoie, Paris, France) is actively developing several enhanced accident-tolerant fuels cladding concepts ranging from near-term evolutionary (Cr-coated zirconium alloy cladding) to long-term revolutionary (SiC/SiC composite cladding) solutions, relying on its worldwide teams and partnerships, with programs and irradiations planned both in Europe and the United States. The most advanced and mature solution is a dense, adherent chromium coating on zirconium alloy cladding, which was initially developed along with the CEA and EDF in the French joint nuclear R&D program. The evaluation of the out-of-pile behavior of the Cr-coated cladding showed excellent results, suggesting enhanced reliability, enhanced operational flexibility, and improved economics in normal operating conditions. For example, because chromium is harder than zirconium, the Cr coating provides the cladding with a significantly improved wear resistance. Furthermore, Cr-coated samples exhibit extremely low corrosion kinetics in autoclave and prevents accelerated corrosion in harsh environments such as in water with 70 ppm Li leading to improved operational flexibility. Finally, AREVA NP has fabricated a physical vapor deposition prototype machine to coat full-length cladding tubes. This machine will be used for the manufacturing of full-length lead test rods in commercial reactors by 2019.