Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of Working Pressure and Substrate Bias on the Tribology Properties of the Cr-Al-N Coatings

Cr-Al-N 코팅의 마찰마모 특성에 미치는 공정압력과 바이어스 전압의 영향

  • Choi, Seon-A (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Seong-Won (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sungmin (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Hyung-Tae (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Oh, Yoon-Suk (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
  • 최선아 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 김성원 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 이성민 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 김형태 (한국세라믹기술원 엔지니어링세라믹센터) ;
  • 오윤석 (한국세라믹기술원 엔지니어링세라믹센터)
  • Received : 2017.11.15
  • Accepted : 2017.12.12
  • Published : 2017.12.31
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Abstract

CrN coatings have been used as protective coatings for cutting tools, forming tools, and various tribological machining applications because these coatings have high hardness. Cr-Al-N coatings have been investigated to improve the properties of CrN coatings. Cr-Al-N coatings were fabricated by a hybrid physical vapor deposition method consisting of unbalanced magnetron sputtering and arc ion plating with different working pressure and substrate bias voltage. The phase analysis of the composition was performed using XRD (x-ray diffraction). Cr-Al-N coatings were grown with textured CrN phase and (111), (200), and (220) planes. The adhesion strength of the coatings tested by scratch test increased. The friction coefficient and removal rate of the coatings were measured by a ball-on-disk test. The friction coefficient and removal rate of the coatings decreased from 0.46. to 0.22, and from $2.00{\times}10^{-12}m^2/N$ to $1.31{\times}10^{-13}m^2/N$, respectively, with increasing bias voltage. The tribological properties of the coatings increased with increasing substrate bias voltage.

Keywords

References

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