• 한국전기전자재료학회논문지
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• 제11권3호
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• pp.229-236
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• 1998

Ferroelectric $Sr_xBi_yTa_2O_{9+\alpha}$/(0.7$\leqSr\leq1.0,\; 2.0\leqBi\leq2.6)$ solutions were prepared by MOD (Metalorganic Deposition) process. These solutions were made into thin films with thickness ranging from 1500~2000${\AA}$ by spin coating. The phase transformation of the SBT thin films by variation of annealing temperature and annealing time were observed using high temperature XRD and SEM. The crystallization and grain growth of SBT thin film were accomplished at $800^{\circ}C$ for 30 minutes after deposition of Pt top electrode by sputtering to prevent electrical breakdown. Ferroelectric properties of the SBT thin films were measured in the range of $\pm$3V\; and\; \pm5V$. The specimen with composition ratio of Sr/Bi/Ta (0.8/2.4/2.0) has the excellent ferroelectric properties ; $2P_r = 10.5,\; 13.2\muC/cm^2 \;at\; \pm3V\; and\; \pm5V$ respectively. Observing the post annealed Pt/SBT/Pt interface by SEM, it was found that Pt electrode sputtered on to the SBT thin film penetrated into the hollow on the SBT thin film, thus decreasing the effective insulation thickness. The effective insulation thickness recovered by post annealing, and this was confirmed by leakage current density measurement.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1311-1320
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• 2000

In this study, shape memory alloy(SMA) wires and piezoceramic actuators(PZT's) are employed in order to generate higher modes on the beam deformations. Compressive force is generated and applied to the beam by the pre-strained SMA wires attached at both ends of the beam. PZT's apply concentrated moments to several locations on the beam. Combinations of the compressive force and concentrated moments are investigated in order to understand the higher-mode deformation of beams. The first desired mode shape is obtained by controlling the temperature of the SMA wires. The first and third mode shapes are performed experimentally by heating SMA wires up to phase transformation temperature. The adaptive wing is defined as a wing whose shape parameters such as the camber, wing twist and thickness can be varied in order to change the wing shape for various flight conditions. In this research, control of the camber has been studied. The wing model consists of three plates and many ribs. Two of the plates are placed parallel to each other and they are clamped at one edge. Third plate connects the other edges of the parallel plates together. Each rib is made of SMA wire and connected to the parallel plates. It generates concentrated force and applies to the plates in oblique directions. The PZT's are bonded onto the plates and exert concentrated moments upon the plate at several locations. The object of this research is to generate various shape of wing by combining the concentrated forces and moments.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.129-129
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• 2018

Hard coating application is effective way of cutting tool for hard-to-machine materials such as Inconel, Ti and composite materials focused on high-tech industries which are widely employed in aerospace, automobile and the medical device industry also Information Technology. In cutting tool for hard-to-machine materials, high hardness is one of necessary condition along with high temperature stability and wear resistance. In recent years, high-entropy alloys (HEAs) which consist of five or more principal elements having an equi-atomic percentage were reported by Yeh. The main features of novel HEAs reveal thermodynamically stable, high strength, corrosion resistance and wear resistance by four characteristic features called high entropy, sluggish diffusion, several-lattice distortion and cocktail effect. It can be possible to significantly extend the field of application such as cutting tool for difficult-to-machine materials in extreme conditions. Base on this understanding, surface coatings using HEAs more recently have been developed with considerable interest due to their useful properties such as high hardness and phase transformation stability of high temperature. In present study, the nanocomposite coating layers with high hardness on WC substrate are investigated using high entropy alloy target made a powder metallurgy. Among the many surface coating methods, reactive magnetron sputtering is considered to be a proper process because of homogeneity of microstructure, improvement of productivity and simplicity of independent control for several critical deposition parameters. The N2 is applied to reactive gas to make nitride system with transition metals which is much harder than only alloy systems. The acceleration voltage from 100W to 300W is controlled by direct current power with various deposition times. The coating layers are systemically investigated by structural identification (XRD), evaluation of microstructure (FE-SEM, TEM) and mechanical properties (Nano-indenter).

• 한국세라믹학회지
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• 제30권12호
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• pp.1045-1053
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• 1993

Alumina hydrates were prepared by the neutralization of AlCl3.6H2O solution with NH3 gas diluted with N2 gas. The values of pH in reaction solution influenced the formation of alumina hydrates minerals. Amorphous alumina hydrates, for example, were formed at ${\gamma}$-Al2O3longrightarrow$\delta$-Al2O3longrightarrow$\theta$-Al2O3longrightarrow$\alpha$-Al2O3. (2) Bayeritelongrightarrowamorphouslongrightarrow${\gamma}$-Al2O3longrightarrow$\delta$-Al2O3longrightarrowη-Al2O3longrightarrow$\theta$-Al2O3longrightarrow$\alpha$-Al2O3. On the other hand, the shape of alumina hydrates whichw ere prepared by the reacton of Al2(SO4)3.16H2O solution and NH3 gas was spherical, the progress of its phase transformation with increasing temperature was amorphouslongrightarrow${\gamma}$-Al2O3longrightarrow$\alpha$Al2O3 in sequence.

• 한국광학회지
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• 제18권2호
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• pp.171-177
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• 2007

전자빔 증착법을 이용하여 산소 분압에 따라 $TiO_2$ 박막을 제작하고, 열처리 온도에 따른 박막의 구조적 특성과 광학적 특성을 분석 하였다. $TiO_2$ 박막들의 물리적 특성은 주입된 산소량에 의존하였다. 주입된 산소량이 증가 할수록 상전이 온도가 높아지고, 가시광선 영역에서 $TiO_2$ 박막의 투과율이 증가하였다. 그리고 주입된 산소량이 작은 경우, $700^{\circ}C$에서 $1100^{\circ}C$로 열처리 후 $TiO_2$ 박막의 흡수단 이 좀더 장파장으로 이동하였다.

• 한국재료학회지
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• 제15권7호
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• pp.439-443
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• 2005

The oxidation behavior and the thermal stability of nanocrystalline Al-25Ti-8Mn intermetallic compound were investigated. $Al_3Ti$ intermetallic compound, which has a potential for high temperature structural material, was fabricated by mechanical alloying(MA) with $8at.\%$ Mn to enhance the thermal stability and ductility. And Al-25Ti-8Mn intermetallic compound was sintered by spark plasma sintering(SPS) at $700^{\circ}C$. After sintering process, cubic $Ll_2$ structure was maintained without phase transformation and the grain size was about 50nm. To investigate the oxidation behavior of the specimens, thermal gravimetric analysis(TGA) was performed at 700, 800, 900, and $1000^{\circ}C$ for 24 h in $O_2$. As the temperature increased from $700^{\circ}C\;to\;900^{\circ}C$ the weight gain of specimens increased. However at $1000^{\circ}C$, unlike the oxidation behavior of $700^{\circ}C\;to\;900^{\circ}C$, the weight gain of specimen decreased drastically and the transition from linear rate region to parabolic rate region occurred rapidly due to the dense $\alpha-Al_2O_3$.

• 대한금속재료학회지
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• 제49권11호
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• pp.845-852
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• 2011

The Spark Plasma Sintering(SPS) method offers a means of fabricating a sintered-body having high density without grain growth through short sintering time and a one-step process. A titanium compact having high density and purity was fabricated by the SPS process. It can be used to fabricate a Ti sputtering target with controlled parameters such as sintering temperature, heating rate, and pressure to establish the optimized processing conditions. The compact/target(?) has a diameter of ${\Phi}150{\times}6.35mm$. The density, purity, phase transformation, and microstructure of the Ti compact were analyzed by Archimedes, ICP, XRD and FE-SEM. A Ti thin-film fabricated on a $Si/SiO_2$ substrate by a sputtering device (SRN-100) was analyzed by XRD, TEM, and SIMS. Density and grain size were up to 99% and below $40{\mu}m$, respectively. The specific resistivity of the optimized Ti target was $8.63{\times}10^{-6}{\Omega}{\cdot}cm$.

• 한국재료학회지
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• 제32권5호
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• pp.264-269
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• 2022

Ti₃C₂T_x MXene, which is a representative of the two-dimensional MXene family, is attracting considerable attention due to its remarkable physicochemical and mechanical properties. Despite its strengths, however, it is known to be vulnerable to oxidation. Many researchers have investigated the oxidation behaviors of the material, but most researches were conducted at high temperatures above 500 ℃ in an oxidation-retarding environment. In this research, we studied changes in the structural and electrical properties of Ti₃C₂T_x MXene induced by low-temperature heat treatments in ambient conditions. It was found that a number of TiO₂ particles were formed on the MXene surface when it was mildly heated to 200 ℃. Heating the material to higher temperatures, up to 400 ℃, the phase transformation of Ti₃C₂T_x MXene to TiO₂ was accelerated, resulting in a TiO₂/Ti₃C₂T_x hybrid. Consequently, the metallic nature of pure Ti₃C₂T_x MXene was transformed to semiconductive behavior upon heat-treating at ≥ 200 ℃. The results of this research clearly demonstrate that Ti₃C₂T_x MXene may be easily oxidized even at low temperatures once it is exposed to air.

• 한국습지학회지
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• 제9권1호
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• pp.107-114
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• 2007

This study aimed to investigate the hexachlorobenzene (HCB) dechlorinating ability of sediment microbes collected from a natural canal receiving secondary effluents from an industrial estate and nearby factories. Nine sites along the stream and one in the estuary in the Gulf of Thailand into which the canal spills were specified and sampling for sediment and water. Preliminary analysis of the sediments showed that the first four sites nearest to the discharging location were contaminated by HCB within the range of 0.18 to 1.25 ppm. Apart from that, 1,3,5-trichlorobenzene which has never been commercially produced or used in any manufacturing processes except for the transformation from higher chlorinated benzene was also identified in the range of 0.16 to 0.24 ppm. This suggested a possibility of sporadically HCB contamination in this stream. Of more important, people in the community along this canal earn their living by coastal fishery; hence, posing a risk of spreading HCB and its less chlorinated congeners via food chain from caught marine creatures to human. As a result, there is an urgent need to understand the behavior of HCB dechlorination in this stream sediment which can lead to a clean-up action in the future. Serum bottles with sediment slurries (sediment to water ratio of 1:1 (v/v) and filtered to remove particles larger than 0.7 mm) from each site were inoculated with 2 mg/l of HCB, kept anaerobically in the dark at room temperature without any nourishment, and analyzed for HCB and its less-chlorinated congeners every 6 days. Total chemical oxygen demand, suspended solids, and volatile suspended solids were in the range of 21,492-73,584, 158,100-518,100 and 6,000-32,700 mg/l, respectively. It was found that all sediment slurries began to dechlorinate HCB in 12 to 30 days and the HCB was completely removed within 42 to 60 days or so. On the other hand, there was no HCB dechlorination occurred in the controlled set which was sterilized by autoclaving prior to the addition of HCB. This implies that the HCB transformation was solely due to microorganisms' activities. HCB was dechlorinated principally via pentachlolobenzene to 1,2,3,5-tetrachlorobenzene and terminated at 1,3,5-trichlorobenzene which is the major pathway as reported by many researchers. Dichlorobenzene has not been detected in any samples within the dechlorination period of 60 days. The results indicate that the microbial matrix in the sediment of this stream has an outstanding capability to dechlorinate HCB. Existing substrates and nutrients which mainly sorbed onto the solid phase and the typical temperature in Thailand were sufficient and suitable to promote the activities of these HCB-dechlorinating microbes.

• 한국진공학회지
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• 제17권6호
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• pp.528-537
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• 2008

ICP-CVD를 사용하여 수소화된 비정질 실리콘(a-Si:H)을 60 nm 또는 20 nm 두께로 성막 시키고, 그 위에 전자총증착장치(e-beam evaporator)를 이용하여 30 nm Ni 증착 후, 최종적으로 30 nm Ni/(60 또는 20 nm a-Si:H)/200 nm $SiO_2$/single-Si 구조의 시편을 만들고 $200{\sim}500^{\circ}C$ 사이에서 $50^{\circ}C$간격으로 40초간 진공열처리를 실시하여 실리사이드화 처리하였다. 완성된 니켈실리사이드의 처리온도에 따른 면저항값, 상구조, 미세구조, 표면조도 변화를 각각 사점면저항측정기, HRXRD, FE-SEM과 TEM, SPM을 활용하여 확인하였다. 60 nm a-Si:H 기판 위에 생성된 니켈실리사이드는 $400^{\circ}C$이후부터 저온공정이 가능한 면저항값을 보였다. 반면 20 nm a-Si:H 기판 위에 생성된 니켈실리사이드는 $300^{\circ}C$이후부터 저온공정이 가능한 면저항값을 보였다. HRXRD 결과 60 nm 와 20 nm a-Si:H 기판 위에 생성된 니켈실리사이드는 열처리온도에 따라서 동일한 상변화를 보였다. FE-SEM과 TEM 관찰결과, 60 nm a-Si:H 기판 위에 생성된 니켈실리사이드는 저온에서 고저항의 미반응 실리콘이 잔류하고 60 nm 두께의 니켈실리사이드를 가지는 미세구조를 보였다. 20 nm a-Si:H 기판위에 형성되는 니켈실리사이드는 20 nm 두께의 균일한 결정질 실리사이드가 생성됨을 확인하였다. SPM 결과 모든 시편은 열처리온도가 증가하면서 RMS값이 증가하였고 특히 20 nm a-Si:H 기판 위에 생성된 니켈실리사이드는 $300^{\circ}C$에서 0.75 nm의 가장 낮은 RMS 값을 보였다.