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http://dx.doi.org/10.3807/HKH.2007.18.2.171

Optical and Structural Properties of TiO2 Thin Films Prepared at Various Oxygen Pressure by Electron-Beam Evaporation  

Choi, Won-Seok (Department of Physics, University of Ulsan)
Kim, Jang-Seob (Department of Physics, University of Ulsan)
Jung, Jong-Min (Department of Physics, University of Ulsan)
Hahn, Sung-Hong (Department of Physics, University of Ulsan)
Kim, Eui-Jung (Department of Chemical Engineering, University of Ulsan)
Lee, Chung-Woo (IHL)
Joo, Jong-Hyun (IHL)
Publication Information
Korean Journal of Optics and Photonics / v.18, no.2, 2007 , pp. 171-177 More about this Journal
Abstract
We prepared $TiO_2$ thin films by electron-beam evaporation at various oxygen pressures, and investigated their optical and structural properties as a function of the annealing temperature. The physical properties of the $TiO_2$ thin films depend upon the injection oxygen content. With the increased injection of oxygen, the phase transformation temperature and the transmittance of $TiO_2$ thin films in the range of visible wavelength were increased. For low injection of oxygen, the absorption edges of $TiO_2$ thin films were more red-shifted when annealed at temperatures from $700^{\circ}C$ to $1100^{\circ}C$.
Keywords
$TiO_2$ thin film; Oxygen pressure; Electron-beam evaporation;
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Times Cited By KSCI : 1  (Citation Analysis)
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