• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.7
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• pp.569-572
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• 2003

In this study, we evaluated the dilute HF cleaning to reduce residual defects made by metal CMP process. The purpose of this test is to observe the existence of barrier metal damage during DHF cleaning on condition that it should not affect metal thin film reliability, so we will get rid of slurry residual particles as a main defect of the metal CMP process for the better yield. In-line defect data showed us that slurry residual particles were removed by DHF application. The HF rinse significantly reduced metal contamination levels and surface roughness. The best effect by additional oxide loss was discovered when Dilute HF condition is 10".

• Journal of Powder Materials
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• v.10 no.4
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• pp.281-287
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• 2003

Ultrafine TiC-15%Co powders were synthesized by a thermochemical process, including spray drying, calcination, and carbothermal reaction. Ti-Co oxide powders were prepared by spray drying of aqueous solution of titanium chloride and $Ti(OH)_2$ slurry, both containing cobalt nitrate, fellowed by calcination. The oxide powders were mixed with carbon powder to reduce and carburize at 1100~125$0^{\circ}C$ under argon or hydrogen atmosphere. Ultrafine TiC particles were formed by carbothermal reaction at 1200~125$0^{\circ}C$, which is significantly lower than the formation temperature (~1$700^{\circ}C$) of TiC particles prepared by conventional method. The oxygen content of TiC-15%Co powder synthesized under hydrogen atmosphere was lower than that synthesized under argon, suggesting that hydrogen accelerates the reduction rate of Ti-Co oxides. The size of TiC-15%Co powder was evaluated by FE-SEM and TEM and Identified to be smaller than 300 nm.

• Nuclear Engineering and Technology
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• v.40 no.4
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• pp.305-310
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• 2008

Based on a composition of 99.4 wt% AISI 316L stainless steel, 0.3wt% Ti and 0.3 wt% $Y_2O_3$, an austenitic ODS steel was fabricated by a process of mechanical alloying, hot isostatic pressing and rolling. Fine oxide particles were observed in the matrix, and their chemical formulations were determined to be $Y_2Si_2O_7$ and TiO. Heat treatment of the cold-rolled sample at $1200^{\circ}C$ induced an isotropic tensile behavior at room temperature and at $700^{\circ}C$. This result would be mainly attributed to the equiaxed grains that form as a result of the heat treatment for recrystallization.

• Corrosion Science and Technology
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• v.7 no.3
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• pp.145-151
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• 2008

Material degradation such as high temperature oxidation of metallic material is a severe problem in energy generation systems or manufacturing industries. The metallic materials are oxidized to form oxide films in high temperature environments. The oxide films act as diffusion barriers of oxygen and metal ions and thereafter decrease oxidation rates of metals. The metal oxidation is, however, accelerated by mechanical fracture and spalling of the oxide films caused by thermal stresses by repetition of temperature change, vibration and by the impact of solid particles. It is therefore very important to investigate mechanical properties and adhesion of oxide films in high temperature environments, as well as the properties in a room temperature environment. The oxidation tests were conducted for Ni and Ni-Co alloy under high temperature corrosive environments. The hardness distributions against the indentation depth from the top surface were examined at room temperature. Dynamic indentation tests were performed on Ni oxide films formed on Ni surfaces at room and high temperature to observe fractures or cracks generated around impact craters. As a result, it was found that the mechanical property as hardness of the oxide films were different between Ni and Ni-Co alloy, and between room and high temperatures, and that the adhesion of Ni oxide films was relatively stronger than that of Co oxide films.

• Particle and aerosol research
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• v.15 no.4
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• pp.127-137
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• 2019

Recently, high electrochemical performance anode materials for lithium ion secondary batteries are of interest. Here, we present silicon-carbon-graphene (Si-C-GR) composites for high performance anode materials of lithium ion secondary battery (LIB). Aerosol process and heat-treatment were employed to prepare the Si-C-GR composites using a colloidal mixture of silicon, glucose, and graphene oxide precursor. The effects of the size of the silicon particles in Si-C-GR composites on the material properties including the morphology and crystal structure were investigated. Silicon particles ranged from 50 nm to 1 ㎛ in average diameter were employed while concentration of silicon, graphene oxide and glucose was fixed in the aerosol precursor. Morphology of as-fabricated Si-C-GR composites was generally the shape of a crumpled paper ball and the Si particles were well wrapped in carbon and graphene. The size range of composites was about from 2.2 to 2.9 ㎛. The composites including silicon particles larger than 200 nm in size exhibited higher performance as LIB anodes such as capacity and coulombic efficiency than silicon particles less than 100 nm, which were about 1500 mAh/g at 100 cycles in capacity and 99% in coulombic efficiency, respectively.

• Korean Journal of Materials Research
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• v.21 no.8
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• pp.415-418
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• 2011

Tin (IV) dioxide ($SnO_2$) has attracted much attention due to its potential scientific significance and technological applications. $SnO_2$ nanoparticles were prepared under low temperature and pressure conditions via precipitation from a 0.1 M $SnCl_4{\cdot}5H_2O$ solution by slowly adding $NH_4OH$ while rapidly stirring the solution. $SnO_2$ nanoparticles were obtained from the reaction in the temperature range from 130 to $250^{\circ}C$ during 6 h. The microstructure and phase of the synthesized tin oxide particles were studied using XRD and TEM analyses. The average crystalline sizes of the synthesized $SnO_2$ particles were from 5 to 20 nm and they had a narrow distribution. The average crystalline size of the synthesized particles increased as the reaction temperature increased. The crystalline size of the synthesized tin oxide particles decreased with increases in the pH value. The X-ray analysis showed that the synthesized particles were crystalline, and the SAED patterns also indicate that the synthesized $SnO_2$ nanoparticles were crystalline. Furthermore, the morphology of the synthesized $SnO_2$ nanoparticles was as a function of the reaction temperature. The effects of the synthesis parameters, such as the pH condition and reaction temperature, are also discussed.

• Journal of the Korean Ceramic Society
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• v.42 no.8 s.279
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• pp.561-566
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• 2005

For the homogeneous dispersion of $ZrO_2$ particles in $Al_2O_3/ZrO_2$ceramics, Zr-precusors were mixed with oxide $Al_2O_3$powders by chemical routes such as partial precipitation or partial polymerization of Zr-nitrate solutions. In case of the mechanical mixing of ultrafine $Al_2O_3$ and $ZrO_2$ oxide powders, relatively homogeneous dispersion was difficult to achieve so that the particle size and distributions of $ZrO_2$ were relatively inhomogeneous after sintering at high temperature. But when the Zr-Y-hydroxide were co-precipitated to ultrafine $Al_2O_3$ oxide powders followed by calcinations, homogeneous dispersion of nano-sized $ZrO_2$ particles in $Al_2O_3/ZrO_2$ composite ceramics were obtained. But because of the coalescence of dispersed $ZrO_2$ particles, dispersed $ZrO_2$ was grown up to more than 0.2${mu}m$ (200 nm) when sintered at the temperature of higher than $1500^{\circ}C$ But when the sintering temperature was kept to lower than $1400^{\circ}C$ by using nano-sized $\alpha-alumina$, the particle size of dispersed $ZrO_2$ could be sustained below 0.1 ${\mu}m$. But the coalescence of dispersed $ZrO_2$ between $Al_2O_3$ particles could not be avoided so that the mechanical properties were not enhanced contrary to the expectations. So Zr-polyester precursors were precipitated and coated to the surface of ultrafine $\alpha-alumina$ powders by the polymerization of Ethylene Glycol with Citric Acid and Zirconium Nitrate. By this dispersion much more uniform dispersion of $ZrO_2$ was achieved at $1450\~1600^{\circ}C$ of sintering temperature ranges. And due to especially discrete dispersion of $ZrO_2$ between $Al_2O_3$ particles, their mechanical strength was more enhanced than mechanical mixing or hydroxide precipitation methods.

• Journal of the Korean Ceramic Society
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• v.56 no.2
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• pp.130-145
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• 2019

Widespread commercialization of solid oxide fuel cells (SOFCs) is expected to be realized in various application fields with the advent of cost-effective fabrication of cells and stacks in high volumes. Cost-reduction efforts have focused on production yield, power density, operation temperature, and continuous manufacturing. In this article, we examine several issues associated with processing for SOFCs from the standpoint of the bimodal packing model, considering the external constraints imposed by rigid substrates. Optimum compositions of composite cathode materials with high volume fractions of the second phase (particles dispersed in matrix) have been analyzed using the bimodal packing model. Constrained sintering of thin electrolyte layers is also discussed in terms of bimodal packing, with emphasis on the clustering of dispersed particles during anisotropic shrinkage. Finally, the structural transition of dispersed particle clusters during constrained sintering has been correlated with the structural stability of thin-film electrolyte layers deposited on porous solid substrates.

• Applied Science and Convergence Technology
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• v.25 no.1
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• pp.15-18
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• 2016

Study investigated the optimal anodizing conditions for fabricating an oxide film that produces less contamination in a corrosive plasma environment, using oxalic acid and tartaric acid. Oxide films were produced using sulfuric acid, oxalic acid, and tartaric acid electrolyte mixtures with various mole ratios. The oxide film made by adding 0.05M tartaric acid to 0.3M oxalic acid showed higher breakdown voltage and lower leakage current. Additionally, contamination particles were reduced during plasma etching, thus demonstrates that this mixture presented optimal conditions. However, higher tartaric acid content (0.1 M, 0.15 M) led to lower breakdown voltages and higher leakage currents. Also, it resulted in more cracking during thermal shock tests as well as the generation of more contamination particles during plasma processing.

• Journal of the Korean Ceramic Society
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• v.20 no.4
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• pp.305-314
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• 1983

In order to enhance the rate of th nitridation and to give the high density of reaction-bonded silicon nitride MgO powder as nitriding aid were added to silicon powders and the mixture was pressed isostatically into compacts which were nitrided in the furnace of 1, 35$0^{\circ}C$ where 95% $N_2$-5% $H_2$ gases were flowing. As the other nitriding aid $Mg(NO_3)_2 6H_2O$ was selected, A slip made of magnesium nitrate solution and fine silicon particles was spray-dried and then decomposed at 30$0^{\circ}C$. Magnesium oxide-coated silicon powders were formed into compacts prior to the nitridation on the same condition as the former. Magnesium nitrate (MgO, produced from the decomposition of magnesium nitrate) was more effective for the formation of the $\beta$-phase in the initial stage of the nitridation probably due to the easy formation of $MgO-SiO_2$-metal oxide eutectic melt. It has been confirmed that forsterite was formed as a result of the reaction between MgO and $SiO_2$ film of silicon surface. It was considered that MgO produced from magnesium nitrate may be finer more reactive and more uniformly distributed on the surface of silicon particles than original MgO. The higher the forming pressure was the more the $\beta$-phase was formed.