• 제목/요약/키워드: multi-layer film

검색결과 342건 처리시간 0.027초

Doctor blade를 이용한 용액형 CIGS 균일 코팅에 관한 연구 (A Study of CIGS Coated Thin-Film Layer using Doctor Blade Process)

  • 유종수;윤성만;김도진;조정대
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.93.2-93.2
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    • 2010
  • Recently, printing and coating technologies application fields have been expanded to the energy field such as solar cell. One of the main reasons, why many researchers have been interested in printing technology as a manufacturing method, is the reduction of manufacturing cost. In this paper, We fabricated CIGS solar cell thin film layer by doctor blade methods using synthesis of CIS precursor nanoparticles ink on molybdenum (Mo) coated soda-lime glass substrate. Synthesis CIS precursor nanoparticles ink fabrication was mixed Cu, In, Se powder and Ethylenediamine, using microwave and centrifuging. Using multi coating process as we could easily fabrication a fine flatness CIS thin-film layer ($0.7{\sim}1.35{\mu}m$), and reduce a manufacture cost and process steps. Also if we use printing and coating method and solution process in each layer of CIGS solar cell (electrode, buffer), it is possible to fabricate all printed thin-film solar cell.

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DC펄스 스퍼터링 공정 변수가 다층 박막의 광 반사율에 미치는 영향 (Effect of process parameter of DC pulsed sputtering on optical reflectance of multi-layer thin films)

  • 정연길;박현식
    • 한국산학기술학회논문지
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    • 제17권10호
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    • pp.9-12
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    • 2016
  • 특정 광 파장 영역대역에서 광 반사율을 갖는 다층 박막을 DC펄스 스퍼터링 공정으로 제작하기 위하여 공정변수가 다층 박막의 광학 특성에 미치는 영향이 연구되었다. 다층 박막 필름을 제작하기위한 시뮬레이션이 이루어졌으며, DC펄스 스퍼터링 공정을 이용한 저 굴절률의 $SiO_2$와 고 굴절률의 $TiO_2$ 박막의 광학 특성에 미치는 공정 변수 파라미터가 연구되었다. DC펄스 스퍼터링 파워 2kW, 아르곤 가스 200sccm(standard cubic centimeter per minute)기준조건에서 산소가스 비율 12% 범위에서 제작한 $SiO_2$박막은 굴절률 1.46이었고 산소가스 1% 비율에서 제작한 $TiO_2$박막은 굴절률 2.27이었다. 이들 박막으로 구성된 고 굴절률 박막/저 굴절률 박막/고 굴절률 박막의 3층 다층 박막 구조의 광학설계 시뮬레이션 결과와 측정된 광 반사율 특성결과는 파장 대역에 걸쳐 유사한 경향이 있는 것으로 측정되었다. 근적외선 780nm에서 1200nm파장 대역 영역에서 광 반사율 45%이상의 성능을 갖는 다층 박막 필름을 제작할 수 있었고 근적외선 차단 기능 박막으로 사용될 것으로 기대된다.

다기능성 나노자성복합소재 기술동향 (Technical Trend of Multi-function for Nano-magnetic Material)

  • 김유상
    • 한국표면공학회지
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    • 제45권1호
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    • pp.43-52
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    • 2012
  • Recently, it has been developed for Eco-environment, Super light, Multi-functional nano materials. As needed mobile parts in Smart phone or TV, computer, information communication for high pass signal, multi-function, Magnetic thin film materials have been developed. As last, magnetic powder, sintered and sputtering parts were thick and low purity than electroplating layer, low pass signal and noise were resulted, vibrated TV screen. Because chemical complex temperature was high and ununiform surface layer, it has been very difficult for data pass in High Frequency (GHz) area. Large capacity data pass is used to GHz. Above GHz, signal pass velocity is dependent on Skin Effect of surface layer. If surface layer is thick or ununiform, attachment is poor, low pass signal and cross talk, noise are produced and leaked. It has been reported technical trend of Electrochemically plating and Surface treatment of Metal, Polymer, Ceramic etc. by dispersion/complex for Multi functional nano-magnetic material in this paper.

$CeO_2$ 단일 완충층을 이용한 SmBCO 초전도테이프 제조 (Fabrication of SmBCO coated conductor using $CeO_2$ single buffer layer)

  • 김태형;김호섭;오상수;양주생;고락길;하동우;송규정;하홍수;정규동;박경채;조상흥
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.261-262
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    • 2006
  • High temperature superconducting coated conductor has multi-layer structure of protecting layer/superconducting layer/buffer layer/metallic substrate. The buffer layer consists of multi layer, and the architecture most widely used in RABiTS approach is $CeO_2$(cap layer)/YSZ(diffusion barrier layer)/$CeO_2$(seed layer). Multi-buffer layer deposition required many times and process. Therefore single buffer layer deposition study reduce 2G HTS manufacture efforts. Evaporation technique for single buffer deposition method is used for the $CeO_2$ layer. $CeO_2$ single buffer film could be achieved in the chamber. Detailed deposition conditions (temperature and partial gas pressure of deposition) were investigated for the rapid growth of high quality $CeO_2$ single buffer film.

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MEMS 응용을 위한 SOG 막의 특성 평가 (An Estimation on Characteristics of SOG Film for MEMS Application)

  • 김형동;이성준;백승호;김철주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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    • pp.609-611
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    • 1995
  • In this study, we experimented the properties of SOG film as sacrificials layers in surface micromachining and made $SiO_2$ films through spin, bake, cure process. When we culled SOG films once, SOG film thickness is 1000 $\sim$ 3000 ${\AA}$. Then we coaled 200-${\AA}$ SOG film on 9000 ${\AA}$-CVD oxide and then we fabricated test structure, cantilever and ring/beam structure. We estimated deformed structure by SEM. As the results, The deformation of the structure layer in the SOG-coated sacrificial layers is small compared with that or the structure layer on CVD oxide or PSG. In the future, we use multi coated SOG films, SOG film become adequate material as sacrificial layer.

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Effect of SiO2 and Nb2O5 Buffer Layer on Optical Characteristics of ITO Thin Film

  • Kwon, Yong-Han;Jang, Gun-Eik
    • Transactions on Electrical and Electronic Materials
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    • 제16권1호
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    • pp.29-33
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    • 2015
  • This paper presents the results of the optical characteristics of ITO thin film with different buffer layer thicknesses of $SiO_2$ and $Nb_2O_5$ for touch sensor application. $SiO_2$ and $Nb_2O_5$ buffer layers were deposited using RF magnetron sputtering equipment. The buffer layers were inserted between glass and ITO layers. In order to compare with the experimental results, the Essential Macleod Program (EMP) was adopted. Based on EMP simulation, the [$Nb_2O_5{\mid}SiO_2{\mid}ITO$] multi-layered thin film exhibited high transmittance of more than 85% in the visible region. The actual experimental results also showed transmittance of more than 85% in the visible region, indicating that the simulated results were well matched with the experimental results. The sheet resistance of ITO based film was about $340{\Omega}/sq$. The surface roughness maintained a relatively small value within the range of 0.1~0.4 nm when using the $Nb_2O_5$ and $SiO_2$ buffer layers.

고분자 기판위에 유기 용매를 사용하지 않은 다층 박막 Encapsulation 기술 개발 (Improvement of Permeation of Solvent-free Multi-Layer Encapsulation of thin films on Ethylene Terephthalate(PET))

  • 강희진;한진우;김종연;문현찬;최성호;박광범;김태하;김휘운;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.56-57
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    • 2006
  • In this paper, the inorganic multi-layer thin film encapsulation was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Ethylene Terephthalate(PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON SiO2 and parylene layer showed the most suitable properties. Under these conditions, the WVTR for PET can be reduced from a level of $0.57\;g/m^2/day$ (bare subtrate) to 1*10-5 g/$m^2$/day after application of a SiON and SiO2 layer. These results indicates that the PET/SiO2/SiON/Parylene barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

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TiNxOy/TiNx 다층 박막을 이용한 고저항 박막 저항체의 구조 및 전기적 특성평가 (Structural and Electrical Properties High Resistance of TiNxOy/TiNx Multi-layer Thin Film Resistors)

  • 박경우;허성기;;안준구;윤순길
    • 대한금속재료학회지
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    • 제47권9호
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    • pp.591-596
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    • 2009
  • $TiN_xO_y/TiN_x$ multi-layer thin films with a high resistance(${\sim}k{\Omega}$) were deposited on $SiO_2/Si$ substrates at room temperature by sputtering. The $TiN_x$ thin films show island and smooth surface morphology in samples prepared by ${\alpha}$ and RF magnetron sputtering, respectively. $TiN_xO_y/TiN_x$ multi-layer in has been developed to control temperature coefficient of resistance(TCR) by the incorporation of $TiN_x$ layer(positive TCR) inserted into $TiN_xO_y$ layers(negative TCR). Electrical and structural properties of sputtered $TiN_xO_y/TiN_x$ multi-layer films were investigated as a function of annealing temperature. In order to achieve a stable high resistivity, multi-layer films were annealed at various temperatures in oxygen ambient. Samples annealed at $700^{\circ}C$ for 1 min exhibited good TCR value of approximately $-54 ppm/^{\circ}C$ and a stable high resistivity around $20k{\Omega}/sq$. with good reversibility.

스퍼터 증착된 Zinc Tin Oxide 박막 트랜지스터의 공정 압력에 따른 특성 연구 (The Properties of RF Sputtered Zinc Tin Oxide Thin Film Transistors at Different Sputtering Pressure)

  • 이홍우;양봉섭;오승하;김윤장;김형준
    • 반도체디스플레이기술학회지
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    • 제13권1호
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    • pp.43-49
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    • 2014
  • Zinc-tin oxides (ZTO) thin film transistors have been fabricated at different process pressure via re sputtering technique. TFT properties were improved by depositing channel layers at lower pressure. From the analysis of TFTs comprised of multi layer channel, deposited consecutively at different sputtering pressure, it was suggested that the electrical characteristics of TFTs were mainly affected by interfacial layer due to their high conductance, however, the stability under the NBIS condition was influenced by whole bulk layer due to low concentration of positive charges, which might be generated by the oxygen vacancy transition, from Vo0 to $Vo^{2+}$. Those improvements were attributed to increasing sputtered target atoms and decreasing harmful effects of oxygen molecules by adopting low sputtering pressure condition.

성형 콘크리트 복층마감도장 공법 개선에 관한 연구 (A Study on the Improvement of Multi-Layer Coating Method on Concrete Base)

  • 김종원;최인성
    • 한국건축시공학회지
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    • 제3권1호
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    • pp.93-105
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    • 2003
  • The Precast Concrete(PC) method was developed for a large production of a structure in Europe. Afterwards, this PC method has been applied to a structure and an outside Coating of buildings extensively. The outside Coating of the building applied this PC method is a method to put tiles or stones to base concrete. And there is a method to use paints for, so the expression of various patterns is possible. The Multi-Layer Coating is one of the methods to use paints. This Multi-Layer Coating method can show various designs of external appearance with Foam when it is made with the PC panel. Also, the paint film of the PC panel enables a splendid appearance, and a protective function of concrete is possible, too. Therefore, it makes good durability of the PC. Besides, maintenance is easy to manage because it is free from pollution when it uses metallic materials, stones, or any other materials. You might have no trouble in applying the Multi-Layer Coating method in order to save a merit of an outside Coating on the PC panel. However, the Multi-Layer Coating method used as a current outside Coating method has pollution and bad working environment because Oil Epoxy Resins have toxicity and flammability. Therefore, a lot of warnings are required for coating work in order to have appropriate quality because working hours are short, and production efficiency is low too. These reasons make the cost of construction of the Multi-Layer Coating method increase. And employers or designers may have problems in selecting this Multi-Layer Coating method. Therefore, the purpose of this study is to get activation of the Multi-Layer Coating method by offering improvement measures about the problems of the existing Multi-Layer Coating method.