Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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An Estimation on Characteristics of SOG Film for MEMS Application

MEMS 응용을 위한 SOG 막의 특성 평가

  • Kim, Hyoung-Dong (Dept. of Electronic Engineering, Seoul City University) ;
  • Lee, Seong-Jun (Dept. of Electronic Engineering, Seoul City University) ;
  • Pack, Seung-Ho (Mando Machinery Co. R&D Center Group 1 Engeer) ;
  • Kim, Chul-Ju (Dept. of Electronic Engineering, Seoul City University)
  • 김형동 (서울시립대학교 전자공학과) ;
  • 이성준 (서울시립대학교 전자공학과) ;
  • 백승호 (만도기계 중앙연구소 연구1실) ;
  • 김철주 (서울시립대학교 전자공학과)
  • Published : 1995.11.18
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Abstract

In this study, we experimented the properties of SOG film as sacrificials layers in surface micromachining and made $SiO_2$ films through spin, bake, cure process. When we culled SOG films once, SOG film thickness is 1000 $\sim$ 3000 ${\AA}$. Then we coaled 200-${\AA}$ SOG film on 9000 ${\AA}$-CVD oxide and then we fabricated test structure, cantilever and ring/beam structure. We estimated deformed structure by SEM. As the results, The deformation of the structure layer in the SOG-coated sacrificial layers is small compared with that or the structure layer on CVD oxide or PSG. In the future, we use multi coated SOG films, SOG film become adequate material as sacrificial layer.

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