Structural and Electrical Properties High Resistance of TiNxOy/TiNx Multi-layer Thin Film Resistors |
Park, Kyoung-Woo
(School of Nano Science and Technology, Chungnam National University)
Hur, Sung-Gi (School of Nano Science and Technology, Chungnam National University) Nguyen, Duy Cuong (School of Nano Science and Technology, Chungnam National University) Ahn, Jun-Ku (School of Nano Science and Technology, Chungnam National University) Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University) |
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